Aerotech HexGen Hexapod Six DOF Positioning System
Aerotech’s HEX500-350HL hexapod is ideal for applications in x-ray diffraction, sensor testing, high-force device manipulation, synchrotron sample or optics adjustment, semiconductor manufacturing and inspection, or satellite sensor testing. The HEX500-350HL provides up to ±0.5 µm linear/±2.5 µrad angular positioning accuracy and 20 nm linear/0.2 µrad angular positioning resolution.
Aerotech’s HexGen® hexapods represent the next-generation in six degree-of-freedom (DOF) positioning performance. The HEX500-350HL is a high-load, ultra-precision hexapod ideal for applications in… More >