- Low profile for space-conscious applications
- Direct-drive, brushless, slotless servomotor
- Direct-coupled, high-accuracy rotary encoder
- 25 mm aperture
- Optional rotary union for vacuum
Aerotech's WaferMax T rotary stage is an excellent choice for applications that require high performance in a low-height package. Originally designed for the demands of precision wafer inspection, the WaferMax T has been applied to a multitude of applications. A standard 25 mm aperture allows for easy pass-through of vacuum lines where limited rotation is required. If continuous rotation is necessary, an optional single- or dual-port rotary union can be incorporated. The tabletop includes a standard mounting pattern that allows for easy wafer-chuck mounting.
Superior Mechanical Design
Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and rotating friction. A thick-walled, precision-ground shaft further minimizes wobble.
Cable management is a snap with integral motor power and feedback connectors. Because the WaferMax T is a self-contained unit, it can be integrated easily into multi-stage stacks. Either a service loop or an integrated Aerotech cable management system (CMS) can be provided for a highly reliable solution.
To maximize positioning performance, the WaferMax T utilizes Aerotech’s S-series brushless, slotless motor. This motor has all of the advantages of a brushless direct-drive motor — no brushes to wear, no gear trains to maintain and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the WaferMax T ideal for applications requiring outstanding contoured motion, smooth scan velocity or precise incremental steps. The low inertia and zero backlash make the WaferMax T the ideal solution for applications requiring frequent directional changes.
Performance is assured with a 10,000 lines per revolution encoder that results in 0.065 arc sec resolution. A 2048 line option is also available. The motor and high-performance rotary encoder are directly coupled to a common shaft.
Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.
WaferMax T Specifications
|Travel||360 degrees, continuous|
|Tabletop Diameter||106.7 mm|
|Drive System||Direct-drive brushless servomotor|
|Maximum Bus Voltage||up to 340 VDC|
|Maximum Torque (Continuous)||5.99 N·m|
|Encoder||2048 lines/rev fundamental; 10000 lines/rev fundamental|
|Accuracy(1)||HALAR||±25 µrad (±5 arc sec)|
|Bidirectional Repeatability||±10 µrad (±2 arc sec)|
|Tilt Error Motion||97 µrad (20 arc sec)|
|Axial Error Motion||5 µm|
|Radial Error Motion||5 µm|
|Maximum Speed||400 rpm (unloaded)|
|Maximum Load(2)||Axial||40 kg|
- Available with Aerotech controllers.
- Maximum loads are mutually exclusive.
- Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
WaferMax T Direct-Drive Rotary Stage
|WaferMax T||Direct-drive rotary stage with 25 mm clear aperture|
|-RE2048AS||Rotary encoder 2048 lines/rev; fundamental AS output|
|-RE10000AS||Rotary encoder 10000 lines/rev; fundamental AS output|
|-RU1||Rotary union for feed-through of air/vacuum, single port|
|-RU2||Rotary union for feed-through of air/vacuum, dual port|
|-GRND||Adds grounding connection from tabletop|