ABRT-400 Air-Bearing Direct-Drive Rotary Stage

Description

Design Features

  • Accuracy: <0.6 microradian (<0.12 arc-second)
  • Minimum incremental step: 0.035 microradian (0.007 arc-second)
  • Repeatability: <0.4 microradian (<0.08 arc-second)
  • Axial Error Motion: <50 nm synchronous; <10 nm asynchronous
  • Radial Error Motion: <75 nm synchronous; <10 nm asynchronous

Air-Bearing Rotary Master Axis

The ABRT-400 is the heart of Aerotech's µARC Angle and Rotary Device Calibration System. The ABRT-400 is a large rotary air-bearing axis with nanometer-level error motion performance. This high-accuracy air-bearing master axis is constructed of steel to closely match the CTE of the µARC's surrounding granite structure. The air bearing is equipped with a non-influencing rotary union and slip ring to pass vacuum or air and electrical service to the device under test.

The ABRT-400 can be used as the angular standard in high-accuracy measuring machines, x-ray diffraction, protein crystallography or high-precision machining applications.

Master-Axis-Accuracy

Specifications

Rotary Air-Bearing Stage Comparison

ModelABRT-260ABRT-400ABRT-400
Performance Version Standard Standard High-Accuracy
Accuracy 19.4 µrad (4 arc sec) 9.7 µrad (2 arc sec) 0.6 µrad (0.12 arc sec)
Repeatability <4.9 µrad (<1 arc sec) <4.9 µrad (<1 arc sec) 0.4 µrad (0.08 arc sec)
Axial Error Motion (Synchronous) <100 nm <100 nm <50 nm
Radial Error Motion (Synchronous) <150 nm <250 nm <75 nm
Tilt Error Motion (Synchronous) <2.4 µrad (<0.5 arc sec) <2.4 µrad (<0.5 arc sec) <0.5 µrad (<0.1 arc sec)
Axial Error Motion (Asynchronous) <20 nm <20 nm <10 nm
Radial Error Motion (Asynchronous) <20 nm <20 nm <10 nm
Tilt Error Motion (Asynchronous) 0.19 µrad (0.04 arc sec) 0.19 µrad (0.04 arc sec) 0.05 µrad (0.01 arc sec)
Load Capacity Axial 69 kg 110 kg 200 kg
Load Capacity Radial 10 kg 90 kg 50 kg
Slip Ring Optional Optional Optional