PlanarSL Two Axis, Mechanical Bearing, Ball-Screw Stage

Description

Design Features

  • Integrated, low-profile, XY, ball-screw stage
  • Long-life linear motion guide bearing system
  • Optional low thermal expansion glass linear encoder
  • Cost-effective, high-precision planar performance
Aerotech’s PlanarSL mechanical bearing, ball-screw-driven XY stages offer exceptional performance in a cost-effective, low-profile package. Combining two axes of motion in a compact package, the PlanarSL is the perfect solution for applications ranging from surface metrology to general high-precision automation.

Robust, High-Precision Design

The PlanarSL comes standard with a precision-ground and preloaded ball screw. Unlike competitive designs where the ball screw is positioned on the side or off-center, the PlanarSL is designed to drive directly through the centers of friction and stiffness resulting in superior geometric performance and accuracy.

High-precision linear motion guide bearings provide excellent straightness and flatness performance while supplying optimal support of the moving carriage over the entire XY travel. Using careful design and years of experience in precision motion systems, the PlanarSL structural elements have been optimized for the highest possible planar performance.

Optional Low Thermal-Expansion Linear Encoder

Unlike competitive designs using steel (13 ppm/˚C) or glass scales with 8 ppm/˚C thermal expansion coefficients, the PlanarSL is available with low-thermal expansion (3.3 ppm/˚C) precision glass scales on both axes allowing for high-accuracy and repeatable positioning over long periods of time. The linear encoder, available with amplified sine (1 Vpp) or 0.1 µm TTL digital outputs, is mounted near the centers of action, again providing an optimized stage solution for high-accuracy positioning.

Configuration Options

The PlanarSL is available standard with a 24 VDC bipolar stepper motor. Aerotech can also provide brushless and brush DC motors with high-resolution rotary encoders preconfigured for use with Aerotech controls.

Wide Variety of Control Options

A wide selection of state-of-the-art motion controllers is available to control the PlanarSL series. This suite of software and drive electronics provides various cost and performance levels to meet the needs of any application.

Specifications

Mechanical Specifications

 PlanarSL-100XY
Travel 100 mm x 100 mm
Accuracy Ball Screw HALAR(1) ±1.5 µm
Standard ±4.0 µm
LT Encoder HALAR(1) ±1.0 µm
Standard ±3.0 µm
Bidirectional Repeatability Ball Screw ±0.75 µm
LT Encoder ±0.3 µm
Resolution (Minimum Incremental Motion) 0.1 µm
Straightness ±2.0 µm
Flatness ±2.0 µm
Pitch 14 arc sec
Roll 14 arc sec
Yaw 8 arc sec
Orthogonality 20 arc sec
Maximum Speed(2) 30 mm/s
Load Capacity(3) Horizontal 20 kg
Stage Mass 16.6 kg
Material Black Anodized Aluminum
MTBF (Mean Time Between Failure) 20,000 Hours
  1. Available with Aerotech controllers.
  2. With -SM option. Consult Aerotech for other motor options.
  3. On-axis loading for orientation listed.
  4. Specifications are per axis measured 25 mm above the tabletop.

Electrical Specifications

 PlanarSL-100XY
Drive System 24 VDC Bipolar Stepper Motor Standard;
Other Motors Available – Contact Aerotech
Feedback Noncontact Linear Encoder (LT) Optional;
Amplified Sine (-AS) and TTL (0.1 µm) Versions Available
Maximum Bus Voltage 48 VDC(1)
Limit Switches 5 V, Normally Closed
  1. With Aerotech control system.

Recommended Controller

Multi-Axis A3200 Ndrive CP
Ndrive MP
Npaq/Npaq MR
Ensemble Ensemble LAB
Ensemble CP
Ensemble MP
Single Axis Soloist Soloist CP
Soloist MP

Dimensions

  • PlanarSL-100XY

Ordering Information

PlanarSL-series XY Stage

Option Description
PlanarSL-100XY Ball-screw-driven XY table, 100 mm x 100 mm travel

Motor Configuration

Option Description
-SM 24 VDC bipolar stepper motor (standard)
  1. Other motor options available. Contact Aerotech for more details.

Lower-Axis Linear Encoder (Optional)

Option Description
-L-LTAS Lower-axis glass-scale linear encoder; amplified sine output 1 Vpp (20 µm signal period)
-L-LTX50 Lower-axis glass-scale linear encoder; 0.1 µm line-driver output after quadrature

Upper-Axis Linear Encoder (Optional)

Option Description
-U-LTAS Upper-axis glass-scale linear encoder; amplified sine output 1 Vpp (20 µm signal period)
-U-LTX50 Upper-axis glass-scale linear encoder; 0.1 µm line-driver output after quadrature