- Integrated, low-profile, XY, ball-screw stage
- Long-life linear motion guide bearing system
- Optional low thermal expansion glass linear encoder
- Cost-effective, high-precision planar performance
Robust, High-Precision DesignThe PlanarSL comes standard with a precision-ground and preloaded ball screw. Unlike competitive designs where the ball screw is positioned on the side or off-center, the PlanarSL is designed to drive directly through the centers of friction and stiffness resulting in superior geometric performance and accuracy.
High-precision linear motion guide bearings provide excellent straightness and flatness performance while supplying optimal support of the moving carriage over the entire XY travel. Using careful design and years of experience in precision motion systems, the PlanarSL structural elements have been optimized for the highest possible planar performance.
Optional Low Thermal-Expansion Linear EncoderUnlike competitive designs using steel (13 ppm/˚C) or glass scales with 8 ppm/˚C thermal expansion coefficients, the PlanarSL is available with low-thermal expansion (3.3 ppm/˚C) precision glass scales on both axes allowing for high-accuracy and repeatable positioning over long periods of time. The linear encoder, available with amplified sine (1 Vpp) or 0.1 µm TTL digital outputs, is mounted near the centers of action, again providing an optimized stage solution for high-accuracy positioning.
Configuration OptionsThe PlanarSL is available standard with a 24 VDC bipolar stepper motor. Aerotech can also provide brushless and brush DC motors with high-resolution rotary encoders preconfigured for use with Aerotech controls.
Wide Variety of Control Options
A wide selection of state-of-the-art motion controllers is available to control the PlanarSL series. This suite of software and drive electronics provides various cost and performance levels to meet the needs of any application.
|Travel||100 mm x 100 mm|
|Accuracy||Ball Screw||HALAR(1)||±1.5 µm|
|LT Encoder||HALAR(1)||±1.0 µm|
|Bidirectional Repeatability||Ball Screw||±0.75 µm|
|LT Encoder||±0.3 µm|
|Resolution (Minimum Incremental Motion)||0.1 µm|
|Pitch||14 arc sec|
|Roll||14 arc sec|
|Yaw||8 arc sec|
|Orthogonality||20 arc sec|
|Maximum Speed(2)||30 mm/s|
|Load Capacity(3)||Horizontal||20 kg|
|Stage Mass||16.6 kg|
|Material||Black Anodized Aluminum|
|MTBF (Mean Time Between Failure)||20,000 Hours|
- Available with Aerotech controllers.
- With -SM option. Consult Aerotech for other motor options.
- On-axis loading for orientation listed.
- Specifications are per axis measured 25 mm above the tabletop.
|Drive System||24 VDC Bipolar Stepper Motor Standard;
Other Motors Available – Contact Aerotech
|Feedback||Noncontact Linear Encoder (LT) Optional;
Amplified Sine (-AS) and TTL (0.1 µm) Versions Available
|Maximum Bus Voltage||48 VDC(1)|
|Limit Switches||5 V, Normally Closed|
- With Aerotech control system.
|Single Axis||Soloist||Soloist CP
PlanarSL-series XY Stage
|PlanarSL-100XY||Ball-screw-driven XY table, 100 mm x 100 mm travel|
|-SM||24 VDC bipolar stepper motor (standard)|
- Other motor options available. Contact Aerotech for more details.
Lower-Axis Linear Encoder (Optional)
|-L-LTAS||Lower-axis glass-scale linear encoder; amplified sine output 1 Vpp (20 µm signal period)|
|-L-LTX50||Lower-axis glass-scale linear encoder; 0.1 µm line-driver output after quadrature|
Upper-Axis Linear Encoder (Optional)
|-U-LTAS||Upper-axis glass-scale linear encoder; amplified sine output 1 Vpp (20 µm signal period)|
|-U-LTX50||Upper-axis glass-scale linear encoder; 0.1 µm line-driver output after quadrature|