- Integrated, low-profile, XY, linear-motor stage
- Excellent geometric performance (straightness to ±0.4 µm; flatness to ±1 µm)
- Anti-creep, precision crossed-roller bearings
- Large selection – nine models in travel and accuracy
Aerotech’s PlanarDL-series stages offer excellent geometric and dynamic performance in a compact, low-profile package. A variety of travel and performance options make this stage ideal for applications ranging from surface profilometry to LED wafer scribing.
Superior Stage Design
The PlanarDL XY design allows for unparalleled planar geometric performance in applications where straightness and flatness of motion are critical. High-precision anti-creep crossed-roller bearings, precision-machined surfaces and Aerotech linear motors driving through the axes’ center-of-stiffness result in a positioning stage with exceptional geometric tolerances.
The PlanarDL structural elements are optimized for high-dynamics and high-stiffness for the most demanding dynamic applications. Capable of achieving 1 m/s velocities and 1.5 g accelerations, the PlanarDL enables high-throughput, high-accuracy processing resulting in superior process yield and a low total cost of ownership. Unlike competitive products using recirculating bearings, the anti-creep crossed-roller bearings used in this design permit smooth motion making this an ideal stage solution for challenging scanning applications.
Noncontact Direct-Drive Technology
Only noncontact, direct-drive technology offers high-speed and accurate positioning coupled with maintenance-free operation and long service life. At the heart of the PlanarDL is Aerotech’s proprietary direct-drive technology. This drive technology allows for unmatched performance compared to other competitive screw-based and linear motor designs.
The PlanarDL-200XY and -300XY stages are both available with one or two motors per axis, allowing optimization of each individual axis for the specific application and process. Regardless of the number of motors selected, the resulting drive force acts through the centers of friction and stiffness resulting in superior geometric performance and accuracy.
Integrated Cable Management
The cable management system on the PlanarDL is integrated into the stage and optimized for long life and performance. Additional standard options are available for extra servo axes or air/vacuum lines for vacuum chucks or other process pneumatics.
Extreme Positioning Performance
The PlanarDL is available in three positioning performance options. Relying upon decades of experience in system-level design including not only positioning mechanics, but also software and electronics, Aerotech has developed advanced technologies to push the envelope of precision. High-performance -PLUS and -ULTRA options are available to enable accuracies and straightness values down to ±400 nm and orthogonality down to 1 arc second.
|Travel||100 mm x 100 mm||200 mm x 200 mm||300 mm x 300 mm|
|Bidirectional Repeatability(2)||±0.1 µm|
(Minimum Incremental Motion)
|Straightness||±1 µm||±0.4 µm||±1.5 µm||±0.5 µm||±2 µm||±0.75 µm|
|Flatness||±1 µm||±1.5 µm||±2 µm|
|Pitch||12 arc sec||15 arc sec||18 arc sec|
|Roll||12 arc sec||15 arc sec||18 arc sec|
|Yaw||6 arc sec||8 arc sec||10 arc sec|
|Orthogonality||20 arc sec||5 arc sec||1 arc sec||20 arc sec||5 arc sec||1 arc sec||20 arc sec||5 arc sec||1 arc sec|
|Maximum Speed||500 mm/s||750 mm/s||1000 mm/s|
(No Load; Upper Axis)
|1.5 g (No Load)||1.0 g (X1 Motor)
1.5 g (X2 Motors)
|1.0 g (X1 Motor)
1.5 g (X2 Motors)
|Maximum Force (Continuous)||26 N||31 N (X1 Motor)
62 N (X2 Motors)
|78 N (X1 Motor)
156 N (X2 Motors)
|Load Capacity(3)||Horizontal||15 kg||20 kg||30 kg|
|Moving Mass||Upper Axis||2.9 kg||6.3 kg (-UX1 Motor)
7.4 kg (-UX2 Motor)
|16.3 kg (-UX1 Motor)
19.1 kg (-UX2 Motor)
|Lower Axis||8.4 kg||16.8 kg (-LX1-UX1 Motor)
17.8 kg (-LX1-UX2 or -LX2-UX1 Motor)
19.0 kg (-LX2-UX2 Motors)
|45.0 kg (-LX1-UX1 Motor)
48.1 kg (-LX1-UX2 or -LX2-UX1 Motor)
50.9 kg (-LX2-UX2 Motors)
|Stage Mass(4)||11 kg||23-25 kg||53-63 kg|
|Material||Black Anodized Aluminum|
|MTBF (Mean Time Between Failure)||30,000 Hours|
- The -PLUS and -ULTRA options require the use of an Aerotech controller.
- Repeatability specification assumes a feedback resolution of 20 nm or less.
- On-axis loading for orientation listed.
- Stage mass a function of motor configuration.
- Specifications for Base and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.
|Drive System||Brushless Linear Servomotor|
|Feedback||Noncontact Linear Encoder|
|Maximum Bus Voltage||320 VDC|
|Limit Switches||5 V, Normally Closed|
|Home Switch||Near Center of XY Travel|
|Single Axis||Soloist||Soloist CP
PlanarDL-series XY Stage
|PlanarDL-100XY||Linear motor XY table; 100 mm x 100 mm travel|
|PlanarDL-200XY||Linear motor XY table; 200 mm x 200 mm travel|
|PlanarDL-300XY||Linear motor XY table; 300 mm x 300 mm travel|
CMS Options (Required)
|-CMS0||No cable management for third axis on top of XY|
|-CMS1||Cable management for air/vacuum line for vacuum chuck or process pneumatics|
|-CMS2||Cable management for motor/feedback and air/vacuum line for third axis on top of the XY|
Motor Configuration (Required) - Not Applicable for PlanarDL-100XY
|-LX1-UX1||1 motor on lower-axis; 1 motor on upper-axis|
|-LX1-UX2||1 motor on lower-axis; 2 motors on upper-axis|
|-LX2-UX1||2 motors on lower-axis; 1 motor on upper-axis|
|-LX2-UX2||2 motors on lower-axis; 2 motors on upper-axis|
Lower-Axis Encoder (Required)
|-L-LTAS||Lower-axis glass-scale linear encoder; amplified sine output 1 Vpp (20 µm signal period)|
|-L-LTX50||Lower-axis glass-scale linear encoder; 0.1 µm line-driver output after quadrature|
Upper-Axis Encoder (Required)
|-U-LTAS||Upper-axis glass-scale linear encoder; amplified sine output 1 Vpp (20 µm signal period)|
|-U-LTX50||Upper-axis glass-scale linear encoder; 0.1 µm line-driver output after quadrature|
Performance (Optional) - Requires Aerotech Controller
|-PLUS||High-accuracy performance option|
|-ULTRA||Ultra-high accuracy 2D performance option|