- Large, clear aperture
- Travel range from 100 mm x 100 mm to 400 mm x 400 mm
- High-performance linear motion guides
- 15 arc sec orthogonality
- Noncontact linear encoder for high accuracy
The demand for a high accuracy, robust, open-frame stage is met with the ATS3600. This dual-axis, large aperture, open-frame stage addresses the unique needs of scanning microscopy, wafer and printed circuit board inspection and automated assembly.
Design and Construction
Unlike other designs that are assembled from several discrete pieces, the ATS3600 is a three-piece design. This allows critical components such as orthogonality, straightness and flatness to be controlled during the initial machining, resulting in a stage with exceptional geometrical tolerances and inherent orthogonality.
The ATS3600 utilizes high-precision linear motion guide (LMG) bearings, with a total of four trucks per axis. These make the ATS3600 ideal for fast, repetitive operations. The LMG bearings also exhibit exceptional stiffness, high load capacity and extremely low friction.
The high stiffness inherent in this stage allows it to be side-driven, yet still retain excellent performance characteristics. The ATS3600 represents a major upgrade in performance over typical side-drive stages.
Motors and Drives
The ATS3600 includes two high-performance NEMA 23 BMS series brushless, slotless motors. This motor has all of the advantages of a brushless motor – high acceleration, no brushes to wear and lower heating – yet has zero cogging for the ultimate in smooth motion.
Optional Linear Encoder Feedback
A high-resolution, noncontact linear encoder is available as an option. This noncontact encoder offers exceptional repeatability and stability over a range of operating conditions. Both digital and analog output versions are available. The digital version has a resolution of 1 µm, while the analog version, when coupled with an Aerotech multiplier box, can reach resolutions of 20 nm.
All stage travels offer both single- and dual-axis designs, as well as the option for a solid tabletop. For the ultimate in performance, a linear motor version is available – please refer to ALS3600.
|Travel||100 mm||200 mm||300 mm||400 mm|
|Drive System||Super-Precision Ground Ball Screw (P) or Precision Ball Screw (B); Brushless Servomotor (BMS60-A-D25-E1250H)|
|Bus Voltage||Up to 160 VDC|
|Continuous Current||Apk||Up to 2.3 A|
|Arms||Up to 1.6 A|
|Feedback||Noncontact Rotary Encoder (1250 line)|
|Resolution||5 mm/rev Lead||1.0 µm @ 5000 steps/rev Motor Resolution|
|LT Linear Encoder||0.005 µm - 1.0 µm|
|Maximum Travel Speed(1)||200 mm/s|
|Maximum Load(2)||90.0 kg|
|Accuracy||Super-Precision Ball Screw||±1.0 µm/25 mm|
|Precision Ball Screw||±2.0 µm/25 mm|
|LT||HALAR(3)||±2.0 µm (±80.0 µin)|
|Standard||±4.0 µm||±8.0 µm||±12.0 µm||±16.0 µm|
|Precision Ball Screw||±2.0 µm|
|Straightness and Flatness||Differential||1.0 µm/25mm|
|Maximum Deviation||±2.0 µm||±4.0 µm||±6.0 µm||±8.0 µm|
|Pitch and Yaw||10 arc sec||15 arc sec||18 arc sec||20 arc sec|
|Nominal Stage Weight||Less Motor||22.8 kg||34.2 kg||44.4 kg||60.3 kg|
|With Motor||26.4 kg||37.8 kg||48.0 kg||63.9 kg|
|Construction||Aluminum Body; Black Anodize Finish|
- Excessive duty cycle may impact stage accuracy.
- Payload specifications are based on ball screw and bearing life of 2500 km (100 million inches) of travel.
- Available with Aerotech controllers.
- Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
|Series||Travel (mm)||Stage Construction Options||Drive Screw||Motor||Limits||Standard Linear Encoder||Coupling|
-LGR MTR COUPLING
ATS3620 Series Two-Axis, Open Frame, Linear Ball-Screw Stage
|ATS36210||100 mm x 100 mm (4 in x 4 in) travel stage with ball screw and limits|
|ATS36220||200 mm x 200 mm (8 in x 8 in) travel stage with ball screw and limits|
|ATS36230||300 mm x 300 mm (12 in x 12 in) travel stage with ball screw and limits|
|ATS36240||400 mm x 400 mm (16 in x 16 in) travel stage with ball screw and limits|
Base Model Options
|/VAC3||Vacuum preparation of stage to 10-3 torr|
|/VAC6||Vacuum preparation of stage to 10-6 torr|
|-50B||5 mm per revolution precision ball screw|
|-50P||5 mm per revolution super-precision ground ball screw|
|-BMS||Brushless servomotor with connectors and 2500-line encoder (BMS60-A-D25-E2500H)|
|-SM||Stepping motor with connector and home marker pulse (one per rev); requires cable (101SMB2-HM/)|
|-NM||No motor or encoder|
|-NC||Normally-closed end of travel limit switches (standard)|
|-NO||Normally-open end of travel limit switches|
|-9DU||With 9-pin limit connector|
|-FLY||With flying leads|
Standard Linear Encoder
|-2LT10X5||Linear encoder set for model ATS36210; 1.0 micron line driver output|
|-2LT20X5||Linear encoder set for model ATS36220; 1.0 micron line driver output|
|-2LT30X5||Linear encoder set for model ATS36230; 1.0 micron line driver output|
|-2LT40X5||Linear encoder set for model ATS36240; 1.0 micron line driver output|
|-2LT10AS||Linear encoder set for model ATS36210; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier|
|-2LT20AS||Linear encoder set for model ATS36220; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier|
|-2LT30AS||Linear encoder set for model ATS36230; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier|
|-2LT40AS||Linear encoder set for model ATS36240; amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier|
Note: Internal signal multipliers available with A3200 amplifier products.
|-NO COUPLING||No coupling|
|-STD COUPLING||0.25 inch coupling|
|-LGR MTR COUPLING||0.375 inch coupling|
Accessories (to be ordered as separate line item)
|HALAR||High-accuracy system – linear error correction for accuracy and repeatability|