ANT95-XY Series Two-Axis XY Direct-Drive Nanopositioning Stages

Description

Design Features

  • Integrated, low-profile, XY linear motor stage
  • Nanometer-level performance in a large travel format
  • High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm)
  • In-position stability of <1 nm
  • Anti-creep crossed-roller bearings
  • High dynamic performance with direct-drive technology
  • ULTRA accuracy grade option

Introduction

Aerotech’s ANT series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95-XY crossed-roller-bearing, linear motor, dual-axis stage continues the evolution of the ANT series of stages. The integrated, sleek design provides an extremely low profile of only 60 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system, and three accuracy grades.

Ultra-Precise Stage Design

The ANT95-XY design allows critical elements such as orthogonality, straightness, and flatness to be optimized, resulting in a stage with exceptional geometric tolerances. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion in both the X and Y dimensions. Both travel options (25 mm x 25 mm and 50 mm x 50 mm) come with the 60 mm profile height. The integrated cable management system is designed for long life and to minimize drag forces.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate, and high-speed positioning necessary for mass production of precision devices. ANT95-XY stages utilise advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high speed, high resolution, and high accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fibre alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion.

Multi-Axis Configurations

The ANT95-XY can be combined with other Aerotech ANT series products (vertical lift stages, direct-drive rotaries, and goniometers) to create unique, high performance, multi-axis systems.

ULTRA Accuracy Grade Option

In order to achieve the highest possible system accuracy from our multi-axis nanopositioning systems, Aerotech has developed an advanced, dynamic trajectory calibration system. To take advantage of this sophisticated calibration system, the mechanical system has to be completely assembled, functionally tested, and calibrated in our best-in-class metrology labs. Nanometer-level system accuracy can only be achieved under stringent environmental conditions, calibrating with the best test equipment, using the highest-precision mechanical elements, and utilizing the ULTRA software capabilities of Aerotech’s industry-leading controls. By implementing ULTRA dynamic trajectory calibration with the ANT95-XY, we are able to produce guaranteed two-dimensional accuracies of ±250 nm or better.

The plots provided in the specifications illustrate performance differences between a standard ANT95-XY and the ULTRA version. Straightness, orthogonality, and accuracy errors caused by stage yawing are virtually eliminated.

Specifications

Mechanical Specifications

  ANT95-25-XY ANT95-50-XY
- PLUS(1,2) ULTRA(1,2) - PLUS(1,2) ULTRA(1,2)
Travel 25 mm 50 mm
Accuracy(2,3) ±2.5 µm ±250 nm ±250 nm ±2.5 µm ±250 nm ±250 nm
Resolution (Minimum Incremental Motion) 1 nm
Repeatability (Bidirectional)(3) ±100 nm ±75 nm ±75 nm ±100 nm ±75 nm ±75 nm
Repeatability (Unidirectional) ±25 nm ±25 nm ±25 nm ±25 nm ±25 nm ±25 nm
Straightness(3) ±1.0 µm ±1.0 µm ±250 nm ±1.0 µm ±1.0 µm ±250 nm
Flatness(3) ±1.0 µm ±1.0 µm ±1.0 µm ±1.0 µm ±1.0 µm ±1.0 µm
Pitch 49 µrad
(10 arc sec)
49 µrad
(10 arc sec)
49 µrad
(10 arc sec)
49 µrad
(10 arc sec)
49 µrad
(10 arc sec)
49 µrad
(10 arc sec)
Roll 49 µrad
(10 arc sec)
49 µrad
(10 arc sec)
49 µrad
(10 arc sec)
49 µrad
(10 arc sec)
49 µrad
(10 arc sec)
49 µrad
(10 arc sec)
Yaw 24 µrad
(5 arc sec)
24 µrad
(5 arc sec)
24 µrad
(5 arc sec)
24 µrad
(5 arc sec)
24 µrad
(5 arc sec)
24 µrad
(5 arc sec)
Orthogonality 49 µrad
(10 arc sec)
15 µrad
(3 arc sec)
4.8 µrad
(1 arc sec)
49 µrad
(10 arc sec)
15 µrad
(3 arc sec)
4.8 µrad
(1 arc sec)
Maximum Speed(4) 500 mm/s (Upper Axis)
Maximum Acceleration(4) 4.5 g - 45 m/s2 (No Load) (Upper Axis) 2.75 g - 27 m/s2 (No Load) (Upper Axis)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
In-Position Stability(5) <1 nm
Maximum Force (Continuous) 7.75 N 9.5 N
Load Capacity(6) Horizontal 4.0 kg 6.0 kg
Moving Mass Upper 0.45 kg 0.8 kg
Lower 1.13 kg 2.1 kg
Stage Mass 1.8 kg 3.2 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 20,000 Hours
  1. -PLUS and -ULTRA require the use of an Aerotech controller.
  2. Specifications for -BASE and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.
  3. Certified with each stage.
  4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
  5. In-Position Jitter listing is 3 sigma value.
  6. Axis orientation for on-axis loading is listed.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXH
Epaq MR-MXH
Ensemble ML-MXH
Ensemble LAB
Single Axis Soloist Soloist ML-MXH

Note: Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

  • ANT95-XY Plots 1
  • ANT95-XY Plots 2

Dimensions

  • ANT95-25-XY-BASE/-PLUS/-ULTRA
  • ANT95-50-XY-BASE/-PLUS/-ULTRA
  • ANT95-25-XY-BASE/-PLUS/-ULTRA Mounting Plate
  • ANT95-50-XY-BASE/-PLUS/-ULTRA Mounting Plate

Ordering Information

ANT95-XY Series Linear Stage

Option Description
ANT95-XY-BASE Aerotech nanotranslation crossed-roller linear positioner
ANT95-XY-PLUS Aerotech nanotranslation crossed-roller linear positioner
ANT95-XY-ULTRA Aerotech nanotranslation crossed-roller linear positioner with 2D calibration

Linear Stage Travel

Option Description
ANT95-25-XY-BASE 25 mm (1 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder, and limits
ANT95-50-XY-BASE 50 mm (2 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder, and limits
ANT95-25-XY-PLUS 25 mm (1 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder, and limits (High Accuracy Version)
ANT95-50-XY-PLUS 50 mm (2 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder, and limits (High Accuracy Version)
ANT95-25-XY-ULTRA 25 mm (1 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits
ANT95-50-XY-ULTRA 50 mm (2 in) XY travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits

Options

Option Description
-MP Breadboard mounting plate