PRO165LM Mechanical Bearing, Linear Motor Stage

Description

Design Features

  • Improved second-generation design
  • Rugged mechanical construction
  • High-performance in a cost-effective package
  • Direct-drive linear motor for ultra-precise motion
  • Ten models with travels from 100 mm to 1000 mm
  • Vacuum and cleanroom versions available
  • Available with ThermoCompTM for high-performance in changing environments

The PRO165LM is part of Aerotech’s second-generation PRO-LM stage series with many improvements and added features. Enhanced positioning specifications, improved stiffness, and competitive pricing make the PRO165LM stage the ideal choice for both medium and high-performance production applications. The design is similar to the PRO115LM series, providing additional load capacity and stiffness with larger bearings and a wider cross-section.

Rugged Mechanical Construction

A long-life recirculating linear guide bearing system and a low-friction sealing solution make the PRO165LM an attractive solution for industrial applications such as laser machining. The basic external construction of the PRO165LM design provides protection from debris while the side-seals prevent dirt and particulates from entering the stage. The curved hard-cover design provides a natural shape that prevents excessive debris from collecting on the stage.

Precision Motion Performance

The PRO165LM series stages are optimized with high-precision, noncontact linear encoders that are protected from debris by the stage sealing system. Precision recirculating linear bearings along with machining and assembly craftsmanship enable excellent geometric performance specifications.

Incremental and absolute encoders are available as standard options and enable minimum incremental motion down to 5 nm and sub-micrometer repeatability. The optional HALAR factory calibration improves positioning accuracy down to ±1 μm.

Direct-Drive Linear Motor

Aerotech’s high-power U-channel linear motors drive the PRO165LM. The ironless forcer coil provides high force with zero cogging for super-smooth velocity and position control. This ironless design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor stages, the linear motor has zero backlash, no windup, zero friction, and excellent dynamic responsiveness.

Accurate Positioning with ThermoComp

Temperature changes and thermal effects are some of the largest error sources in precision machines. All PRO series stages are available with Aerotech’s ThermoComp feature, an embedded temperature compensation unit that guarantees accurate positioning in variable temperature environments. Using this feature protects your process from real-world conditions, even in extreme industrial settings.

Design and Integration Flexibility

The PRO165LM is designed with many standard features and options that make the design incredibly flexible and allow it to be easily tailored to a specific application. The PRO165LM is available in 10 different models with travels
ranging from 100 mm to 1000 mm and speeds up to 2 m/s. Configurable cable management solutions are available for single and multi-axis systems as standard options.

The base mounting holes are accessible from the outside of the stage allowing for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. The tabletop is available with both English and metric mounting patterns and can be ordered with brush attachments to clear any debris that may collect on the stage hard cover. Tabletops with hole patterns that allow the direct attachment of Aerotech’s ADRS, ACS-LP, ADRT, ACS, and AGR rotary stages are also available.

The PRO165LM series is also available with cleanroom preparation and vacuum versions.

Specifications

PRO165LM Specifications

PRO165LM
Travel 100 150 200 250 300 400 500 600 800 1000
Accuracy(1) Standard ±4 µm ±6 µm ±8 µm ±9 μm ±10 µm ±12 μm ±14 μm ±15.5 μm ±17 μm ±18 μm
Calibrated ±1 μm ±1 μm ±1.5 μm ±1.5 μm ±1.5 μm ±1.5 μm ±2 μm ±2 μm ±2 μm ±2 μm
Resolution (Min.
Incremental Motion)
5 nm (-E1 Encoder), 10 nm (-E3 Encoder)
Bidirectional Repeatability(1) ±0.4 μm ±0.4 μm ±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm
Horizontal Straightness(1) ±2.5 µm ±3 µm ±4 µm ±5 µm ±6 μm ±8 μm ±9 μm ±10 μm ±12 μm ±14 μm
Vertical Straightness(1) ±2.5 µm ±3 µm ±4 µm ±5 µm ±6 μm ±8 μm ±9 μm ±10 μm ±12 μm ±14 μm
Pitch 29 μrad
(6 arc sec)
29 μrad
(6 arc sec)
40 μrad
(8.2 arc sec)
46 μrad
(9.5 arc sec)
58 μrad
(12 arc sec)
70 μrad
(14.4 arc sec)
80 μrad
(16.5 arc sec)
90 μrad
(18.6 arc sec)
100 μrad
(20.6 arc sec)
120 μrad
(24.7 arc sec)
Roll 29 μrad
(6 arc sec)
29 μrad
(6 arc sec)
40 μrad
(8.2 arc sec)
46 μrad
(9.5 arc sec)
58 μrad
(12 arc sec)
70 μrad
(14.4 arc sec)
80 μrad
(16.5 arc sec)
90 μrad
(18.6 arc sec)
100 μrad
(20.6 arc sec)
120 μrad
(24.7 arc sec)
Yaw 29 μrad
(6 arc sec)
29 μrad
(6 arc sec)
40 μrad
(8.2 arc sec)
46 μrad
(9.5 arc sec)
58 μrad
(12 arc sec)
70 μrad
(14.4 arc sec)
80 μrad
(16.5 arc sec)
90 μrad
(18.6 arc sec)
100 μrad
(20.6 arc sec)
120 μrad
(24.7 arc sec)
Maximum Speed(2) 2 m/s
Maximum Acceleration(2) 3 g
Maximum Force, Continuous 77.7 N
Load Capacity(3) Horizontal 45 kg
Side 45 kg
Moving Mass 2.5 kg
Stage Mass 8.2 kg 9.1 kg 9.9 kg 10.7 kg 11.6 kg 13.3 kg 14.9 kg 16.6 kg 20.0 kg 23.3 kg
Material Aluminum
MTBF (Mean Time Between Failure) 20,000 Hours
  1. Certified with -PL1 option.
  2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
  3. Axis-orientation for on-axis loading is listed.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Contact factory for multi-axis applications.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Encoder
Incremental – 1 Vpp and TTL (0.1 μm) Output
Absolute – EnDat 2.2
Maximum Bus Voltage 320 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Ndrive HLe/Ndrive CP/Ndrive HPe/Npaq
Ensemble Ensemble HLe/Ensemble CP/Ensemble HPe
Single Axis Soloist Soloist CP/Soloist HPe
  • Pro165LM Plot

Dimensions

  • PRO165LM
  • Accessory Tabletop
  • Cable Management (-CMS0)

Ordering Information

PRO165LM Series Linear Motor Stage

Travel (Required)

Option Description
-0100 100 mm travel stage
-0150 150 mm travel stage
-0200 200 mm travel stage
-0250 250 mm travel stage
-0300 300 mm travel stage
-0400 400 mm travel stage
-0500 500 mm travel stage
-0600 600 mm travel stage
-0800 800 mm travel stage
-1000 1000 mm travel stage

Mounting Orientation (Required)

Option Description
  Normal mounting orientation
-MT1 Side-mounted or vertical orientation
-MT2 Inverted mounting orientation

Tabletop (Required)

Option Description
-TT1 Tabletop with metric dimension mounting
-TT2 Tabletop with English dimension mounting
-TT3 Accessory tabletop with mounting for select rotary stages
-TT4 Tabletop with metric dimension mounting and wiper brushes
-TT5 Tabletop with English dimension mounting and wiper brushes
-TT6 Accessory tabletop with mounting for select rotary stages and wipers
    Note: -TT1 or -TT4 tabletop option required for lower axis of XY.

Feedback (Required)

Option Description
-E1 Incremental encoder, 1 Vpp
-E2 Incremental linear encoder, 0.1 µm digital TTL output
-E3 Absolute linear encoder, EnDat 2.2

Cable Management (Required)

Option Description
-CMS0 No external CMS, motor/feedback connector bracket on carriage
-CMS1 External CMS for single axis
-CMS2 External CMS for lower-axis of two-axis PRO (XY) assembly
-CMS3 External CMS for lower-axis of two-axis (XZ or XT) assembly
-CMS4 External CMS for upper-axis of two-axis PRO (XY) assembly
-CMS5 External CMS for upper-axis of two-axis (YZ or YT) assembly
-CMS6 External CMS for lower-axis of three-axis (XYZ or XYT) assembly
-CMS7 External CMS for lower-axis of three-axis (XZT) assembly

Lifting Hardware (Optional)

Option Description
-LF Lifting hardware
    Note: Lifting option only available on travels 400 mm and greater. Lifting should never be ordered on the upper-axis of an XY set (only order on lower-axis).

ThermoComp (Optional)

Option Description
-TCMP ThermoComp integrated thermal compensation, single or lower axis
    Note: An A3200 controller must be used with the -TCMP option

Metrology (Required)

Option Description
-PL0 No metrology performance plots
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system

Accessories (to be ordered as a separate line item)

Option Description
ALIGN-NPA Non-precision XY assembly
ALIGN-NPAZ Non-precision XZ or YZ assembly
ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages
ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages.
ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages.
ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5 microns orthogonality for short travel stages.