PRO165LM Mechanical Bearing, Linear Motor Stage

Description

Design Features

  • Improved second-generation design
  • Rugged mechanical construction
  • High-performance in a cost-effective package
  • Direct-drive linear motor for ultra-precise motion
  • Ten models with travels from 100 mm to 1000 mm
  • Vacuum and cleanroom versions available
  • Available with ThermoCompTM for high-performance in changing environments

The PRO165LM is part of Aerotech’s second-generation PRO-LM stage series with many improvements and added features. Enhanced positioning specifications, improved stiffness, and competitive pricing make the PRO165LM stage the ideal choice for both medium and high-performance production applications. The design is similar to the PRO115LM series, providing additional load capacity and stiffness with larger bearings and a wider cross-section.

Rugged Mechanical Construction

A long-life recirculating linear guide bearing system and a low-friction sealing solution make the PRO165LM an attractive solution for industrial applications such as laser machining. The basic external construction of the PRO165LM design provides protection from debris while the side-seals prevent dirt and particulates from entering the stage. The curved hard-cover design provides a natural shape that prevents excessive debris from collecting on the stage.

Precision Motion Performance

The PRO165LM series stages are optimized with high-precision, noncontact linear encoders that are protected from debris by the stage sealing system. Precision recirculating linear bearings along with machining and assembly craftsmanship enable excellent geometric performance specifications.

Incremental and absolute encoders are available as standard options and enable minimum incremental motion down to 5 nm and sub-micrometer repeatability. The optional HALAR factory calibration improves positioning accuracy down to ±1 μm.

Direct-Drive Linear Motor

Aerotech’s high-power U-channel linear motors drive the PRO165LM. The ironless forcer coil provides high force with zero cogging for super-smooth velocity and position control. This ironless design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor stages, the linear motor has zero backlash, no windup, zero friction, and excellent dynamic responsiveness.

Accurate Positioning with ThermoComp

Temperature changes and thermal effects are some of the largest error sources in precision machines. All PRO series stages are available with Aerotech’s ThermoComp feature, an embedded temperature compensation unit that guarantees accurate positioning in variable temperature environments. Using this feature protects your process from real-world conditions, even in extreme industrial settings.

Design and Integration Flexibility

The PRO165LM is designed with many standard features and options that make the design incredibly flexible and allow it to be easily tailored to a specific application. The PRO165LM is available in 10 different models with travels
ranging from 100 mm to 1000 mm and speeds up to 2 m/s. Configurable cable management solutions are available for single and multi-axis systems as standard options.

The base mounting holes are accessible from the outside of the stage allowing for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. The tabletop is available with both English and metric mounting patterns and can be ordered with brush attachments to clear any debris that may collect on the stage hard cover. Tabletops with hole patterns that allow the direct attachment of Aerotech’s ADRS, ACS-LP, ADRT, ACS, and AGR rotary stages are also available.

The PRO165LM series is also available with cleanroom preparation and vacuum versions.

Specifications

PRO165LM Specifications

PRO165LM
Travel 100 150 200 250 300 400 500 600 800 1000
Accuracy(1) Standard ±4 µm ±6 µm ±8 µm ±9 μm ±10 µm ±12 μm ±14 μm ±15.5 μm ±17 μm ±18 μm
HALAR ±1 μm ±1 μm ±1.5 μm ±1.5 μm ±1.5 μm ±1.5 μm ±2 μm ±2 μm ±2 μm ±2 μm
Resolution (Min.
Incremental Motion)
5 nm (-E1 Encoder), 10 nm (-E3 Encoder)
Bidirectional Repeatability(1) ±0.4 μm ±0.4 μm ±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm ±0.5 μm
Horizontal Straightness(1) ±2.5 µm ±3 µm ±4 µm ±5 µm ±6 μm ±8 μm ±9 μm ±10 μm ±12 μm ±14 μm
Vertical Straightness(1) ±2.5 µm ±3 µm ±4 µm ±5 µm ±6 μm ±8 μm ±9 μm ±10 μm ±12 μm ±14 μm
Pitch 29 μrad
(6 arc sec)
29 μrad
(6 arc sec)
40 μrad
(8.2 arc sec)
46 μrad
(9.5 arc sec)
58 μrad
(12 arc sec)
70 μrad
(14.4 arc sec)
80 μrad
(16.5 arc sec)
90 μrad
(18.6 arc sec)
100 μrad
(20.6 arc sec)
120 μrad
(24.7 arc sec)
Roll 29 μrad
(6 arc sec)
29 μrad
(6 arc sec)
40 μrad
(8.2 arc sec)
46 μrad
(9.5 arc sec)
58 μrad
(12 arc sec)
70 μrad
(14.4 arc sec)
80 μrad
(16.5 arc sec)
90 μrad
(18.6 arc sec)
100 μrad
(20.6 arc sec)
120 μrad
(24.7 arc sec)
Yaw 29 μrad
(6 arc sec)
29 μrad
(6 arc sec)
40 μrad
(8.2 arc sec)
46 μrad
(9.5 arc sec)
58 μrad
(12 arc sec)
70 μrad
(14.4 arc sec)
80 μrad
(16.5 arc sec)
90 μrad
(18.6 arc sec)
100 μrad
(20.6 arc sec)
120 μrad
(24.7 arc sec)
Maximum Speed(2) 2 m/s
Maximum Acceleration(2) 3 g
Maximum Force, Continuous 77.7 N
Load Capacity(3) Horizontal 45 kg
Side 45 kg
Moving Mass 2.5 kg
Stage Mass 8.2 kg 9.1 kg 9.9 kg 10.7 kg 11.6 kg 13.3 kg 14.9 kg 16.6 kg 20.0 kg 23.3 kg
Material Aluminum
MTBF (Mean Time Between Failure) 20,000 Hours
  1. Certified with -PL1 option.
  2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
  3. Axis-orientation for on-axis loading is listed.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Contact factory for multi-axis applications.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Encoder
Incremental – 1 Vpp and TTL (0.1 μm) Output
Absolute – EnDat 2.2
Maximum Bus Voltage 320 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Ndrive HLe/Ndrive CP/Ndrive HPe/Npaq
Ensemble Ensemble HLe/Ensemble CP/Ensemble HPe
Single Axis Soloist Soloist CP/Soloist HPe
  • Pro165LM Plot

Dimensions

  • PRO165LM
  • Accessory Tabletop
  • Cable Management (-CMS0)

Ordering Information

PRO165LM Linear Motor Stage

Option Description
-0100 100 mm travel stage with hardcover, side-seals, and limits
-0150 150 mm travel stage with hardcover, side-seals, and limits
-0200 200 mm travel stage with hardcover, side-seals, and limits
-0250 250 mm travel stage with hardcover, side-seals, and limits
-0300 300 mm travel stage with hardcover, side-seals, and limits
-0400 400 mm travel stage with hardcover, side-seals, and limits
-0500 500 mm travel stage with hardcover, side-seals, and limits
-0600 600 mm travel stage with hardcover, side-seals, and limits
-0800 800 mm travel stage with hardcover, side-seals, and limits
-1000 1000 mm travel stage with hardcover, side-seals, and limits

Tabletop (Required)

Option Description
-TT1 Tabletop with metric dimension mounting pattern and holes
-TT2 Tabletop with English dimension mounting pattern and holes
-TT3 Accessory tabletop with mounting pattern for Aerotech rotary stages; see drawings for the supported stage types
-TT4 Tabletop with metric dimension mounting pattern and holes and optional brushes to assist in debris removal from hardcover
-TT5 Tabletop with English dimension mounting pattern and holes and optional brushes to assist in debris removal from hardcover
-TT6 Accessory tabletop with wiper and mounting pattern for Aerotech rotary stages; see drawings for the supported stage types
  1. -TT1 option required for lower axis of XY.

Encoder (Required)

Option Description
-E1 Incremental linear encoder; 1 Vpp
-E2 Incremental linear encoder; 0.1 μm digital TTL output
-E3 Absolute linear encoder; EnDat 2.2

CMS (Required)

Option Description
-CMS0 No external cable management system; motor/feedback connector bracket located on carriage (-CMS0)
-CMS1 External cable management system for single axis (-X-CMS)
-CMS2 External cable management system for lower-axis of two-axis PRO XY assembly; flying leads to PRO stages; order with lower-axis only (-XY-CMS)
-CMS3 External cable management system for lower-axis of two-axis (XZ or XT) assembly; connectorized at top for Z or T axis; order with lower-axis only (-XZ/XT-CMS)
-CMS4 External cable management system for upper-axis of two-axis PRO XY assembly; flying leads to PRO stages; order with upper-axis only (-Y-CMS)
-CMS5 External cable management system for upper-axis of two-axis (YZ or YT) assembly; connectorized at the top for Z or T axis; order with upper-axis only (-YZ/YT-CMS)
-CMS6 External cable management system for lower-axis of three-axis (XYZ or XYT) assembly; flying leads to PRO stages; order with lower-axis only (-XYZ/XYT-CMS)
-CMS7 External cable management system for lower-axis of three-axis (XZT) assembly; connectorized at the top for Z and T axis; order with lower-axis only (-XZT-CMS)

Lifting (Optional)

Option Description
-LF1 Lifting hardware
  1. Lifting option only available on travels 400 mm and greater. Lifting should never be ordered on the upper-axis of an XY set (only order on lower-axis).

Metrology (Required)

Option Description
-PL0 No Accuracy, Straightness, and Flatness plots (standard)
-PL1 Accuracy, Straightness, and Flatness plots provided

ThermoComp (Optional)

Option Description
-TCMP ThermoComp™ integrated thermal compensation feature
  1. An A3200 controller must be used with the –TCMP option.

Accessories (to be ordered as separate line item)

Option Description
HALAR High-accuracy system correction
ALIGNMENT-NPA Non-precision XY assembly
ALIGNMENT-NPAZ Non-precision XZ or YZ assembly
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonality; alignment to within 7 microns orthogonality for short travel stages
ALIGNMENT-PA10Z XZ or YZ assembly with L-bracket; 10 arc sec orthogonality; alignment to within 10 microns orthogonality for short travel stages
ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonality; alignment to within 3 microns orthogonality for short travel stages
ALIGNMENT-PA5Z XZ or YZ assembly with L-bracket; 5 arc sec orthogonality; alignment to within 5 microns orthogonality for short travel stages