MPS75SLE Mechanical-Bearing, Ball-Screw Stage with Linear Encoder


Design Features

  • Compact stage with travels to 100 mm
  • Low-thermal expansion glass-scale linear encoder
  • Precision-ground ball-screw drive
  • DC servo or stepper motor
  • Anti-creep crossed-roller bearings
  • High resolution (0.025 µm), repeatability (±0.1 µm) and accuracy (±0.75 µm)
  • Optional bellows waycovers
  • Compact multi-axis configurations

Aerotech’s MPS75SLE is a compact, high-performance linear positioning stage offering the benefits of direct measurement feedback via a linear encoder. The MPS75SLE is the ideal high-accuracy stage for applications in optics positioning, z-axis positioning of sensors in surface metrology, or high-precision alignment. Multi-axis stage configurations can easily be assembled with other MPS linear and rotary stages using the multitude of adapter brackets and mounting compatibility inherent in the entire MPS stage family.

Ultra-Precise Design

The precision ground, preloaded ball-screw coupled with the linear encoder provide outstanding accuracy, repeatability and a positioning resolution capability to 25 nm. The anti-creep crossed-roller bearings provide exceptionally smooth travel and high-load capacity in a compact package.

Unlike competitive designs using steel (13 ppm/˚C) or glass scales with 8 ppm/˚C thermal expansion coefficients, the MPS75SLE is available with a low thermal expansion (3.3 ppm/˚C) precision glass scale allowing for high-accuracy and repeatable positioning over long periods of time. The linear encoder is available with amplified sine (1 Vpp) or 50 nm TTL digital outputs allowing for easy integration with all standard controllers.

Highly Configurable

The MPS75SLE motor options include a DC servomotor with a high-resolution rotary encoder or a stepper motor. Just like the MPS75SL, the SLE is available with and without optional bellows waycovers.

An optional mounting plate provides direct mounting to both English and metric optical breadboards. The inherent mounting compatibility of all MPS stages allows for simple mounting in multi-axis arrangements.


Mechanical Specifications

Travel 25 mm 50 mm 75 mm 100 mm
Accuracy Standard ±1.75 µm ±2.25 µm ±2.75 µm ±3.25 µm
HALAR(1) ±0.75 µm ±0.75 µm ±1.0 µm ±1.0 µm
Resolution (Minimum Incremental Motion)(2) 0.025 µm
Repeatability (Bidirectional)(2) ±0.1 µm
Straightness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Flatness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Maximum Speed 1.0 mm/rev
Ball Screw
DC Motor 50 mm/s 50 mm/s 50 mm/s 35 mm/s
SM Motor 30 mm/s 30 mm/s 30 mm/s 30 mm/s
Load Capacity(3) Horizontal 15 kg
Side 15 kg
Vertical 4 kg
Stage Mass 2.3 kg 2.4 kg 2.5 kg 2.6 kg
Material Anodized Aluminum Body
  1. Available with Aerotech controllers.
  2. Resolution and repeatability specifications are for systems running in dual-loop mode with feedback resolutions of 25 nm on both the rotary and linear encoders.
  3. Payload specifications are single-axis.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop.
  5. Contact factory for specifications of stages with bellows option.

Electrical Specifications

ModelDC Motor (Standard and VAC)SM Motor (Standard and VAC)
Drive System DC Brush Servomotor 24 VDC Bipolar Stepper Motor
Feedback (Linear Encoder) Noncontact Linear Encoder (LT);
Amplified sine (-AS) and TTL (50 nm) versions available
Feedback (Rotary Motor Encoder) 10,000 lines/rev Rotary Encoder N/A
Maximum Bus Voltage 48 VDC(1)
Rotary Encoder Electronic Resolution 0.025 µm 0.025 µm @ 40,000 steps/rev Motor Resolution
Linear Encoder Electronic Resolution 20 µm fundamental, 0.05 µm with LTX100 option;
Amplified Sine (-AS) option allows for electronic resolutions below 1 nm(2)
Limit Switches 5V, Normally Closed
  1. With Aerotech control system.
  2. For optimum performance, Aerotech recommends using 0.025 µm as the highest-resolution when using the linear encoder as part of the servo feedback loop (e.g., dual-loop).

Recommended Controller

ModelDC Motor and SM Motor
Multi-Axis A3200 Npaq/Npaq MR/Ndrive MP
Ensemble Ensemble LAB/Epaq/Epaq MR/Ensemble MP
Single Axis Soloist Soloist MP
  • MPS75SLE Step Plot
  • MPS75SL Load Curves


  • MPS75SLE
  • MPS75SLE Bellows Option
  • MPS75SLE Mounting Plates
  • HDZ-MPS75SLE L-Bracket

Ordering Information

MPS75SLE Series Ball-Screw Stage with Linear Encoder

Option Description
-025 25 mm travel stage with ball screw, linear encoder and limits
-050 50 mm travel stage with ball screw, linear encoder and limits
-075 75 mm travel stage with ball screw, linear encoder and limits
-100 100 mm travel stage with ball screw, linear encoder and limits

Linear Encoder

Option Description
-LTAS Amplified sine output 1 Vpp (20 µm signal period); requires signal multiplier
-LTX100 0.05 µm line driver output


Option Description
-TTM Metric pattern/thread tabletop

Drive Screw

Option Description
-B1MM 1 mm/rev precision-ground ball screw


Option Description
-DC DC servomotor with 3 meter integral cable
-SM Stepping motor with 3 meter integral cable


Option Description
-NC-5V 5 V normally-closed limits


Option Description
-BELLOWS Bellows waycover
-MP Breadboard mounting plate


Option Description
-PLOTS Accuracy and repeatability plots
-NO PLOTS No performance plots

Accessories (to be ordered as separate line item)

Option Description
HALAR High-accuracy system – error correction for accuracy and repeatability
HDZ-MPS75SL Right-angle L-bracket