- Compact stage with travels to 100 mm
- Low-thermal expansion glass-scale linear encoder
- Precision-ground ball-screw drive
- DC servo or stepper motor
- Anti-creep crossed-roller bearings
- High resolution (0.025 µm), repeatability (±0.1 µm) and accuracy (±0.75 µm)
- Optional bellows waycovers
- Compact multi-axis configurations
Aerotech’s MPS75SLE is a compact, high-performance linear positioning stage offering the benefits of direct measurement feedback via a linear encoder. The MPS75SLE is the ideal high-accuracy stage for applications in optics positioning, z-axis positioning of sensors in surface metrology, or high-precision alignment. Multi-axis stage configurations can easily be assembled with other MPS linear and rotary stages using the multitude of adapter brackets and mounting compatibility inherent in the entire MPS stage family.
The precision ground, preloaded ball-screw coupled with the linear encoder provide outstanding accuracy, repeatability and a positioning resolution capability to 25 nm. The anti-creep crossed-roller bearings provide exceptionally smooth travel and high-load capacity in a compact package.
Unlike competitive designs using steel (13 ppm/˚C) or glass scales with 8 ppm/˚C thermal expansion coefficients, the MPS75SLE is available with a low thermal expansion (3.3 ppm/˚C) precision glass scale allowing for high-accuracy and repeatable positioning over long periods of time. The linear encoder is available with amplified sine (1 Vpp) or 50 nm TTL digital outputs allowing for easy integration with all standard controllers.
The MPS75SLE motor options include a DC servomotor with a high-resolution rotary encoder or a stepper motor. Just like the MPS75SL, the SLE is available with and without optional bellows waycovers.
An optional mounting plate provides direct mounting to both English and metric optical breadboards. The inherent mounting compatibility of all MPS stages allows for simple mounting in multi-axis arrangements.
|Travel||25 mm||50 mm||75 mm||100 mm|
|Accuracy||Uncalibrated||±1.75 µm||±2.25 µm||±2.75 µm||±3.25 µm|
|Uncalibrated with Bellows||±2.75 µm||±3.25 µm||±3.75 µm||±4.25 µm|
|Calibrated(1)||±0.75 µm||±0.75 µm||±1.0 µm||±1.0 µm|
|Resolution (Minimum Incremental Motion)(2)||0.025 µm|
|Repeatability (Bidirectional)(2)||±0.1 µm (Standard); ±0.2 µm (with Bellows)|
|Straightness||±2.0 µm||±2.0 µm||±3.0 µm||±3.0 µm|
|Flatness||±2.0 µm||±2.0 µm||±3.0 µm||±3.0 µm|
|Maximum Speed||1.0 mm/rev
|DC Motor (-M1)||50 mm/s||50 mm/s||50 mm/s||35 mm/s|
|Stepper Motor (-M2)||30 mm/s||30 mm/s||30 mm/s||30 mm/s|
|Load Capacity(3)||Horizontal||15 kg|
|Stage Mass||2.3 kg||2.4 kg||2.5 kg||2.6 kg|
|Material||Anodized Aluminum Body|
- Available with Aerotech controllers.
- Resolution and repeatability specifications are for systems running in dual-loop mode with feedback resolutions of 25 nm on both the rotary and linear encoders.
- Payload specifications are single-axis.
- Specifications are for single-axis systems measured 25 mm above the tabletop.
- Contact factory for specifications of stages with bellows option.
|Model||DC Motor||Stepper Motor|
|Drive System||DC Brush Servomotor||24 VDC Bipolar Stepper Motor|
|Feedback (Linear Encoder)||Noncontact Linear Encoder;
Amplified sine and TTL versions available
|Feedback (Rotary Motor Encoder)||10,000 lines/rev Rotary Encoder||N/A|
|Maximum Bus Voltage||48 VDC(1)|
|Rotary Encoder Electronic Resolution||0.025 µm||0.025 µm @ 40,000 steps/rev Motor Resolution|
|Linear Encoder Electronic Resolution||20 µm fundamental, 0.05 µm with LTX100 option;
Amplified Sine (-AS) option allows for electronic resolutions below 1 nm(2)
|Limit Switches||5V, Normally Closed|
- With Aerotech control system.
- For optimum performance, Aerotech recommends using 0.025 µm as the highest-resolution when using the linear encoder as part of the servo feedback loop (e.g., dual-loop).
|Multi-Axis||A3200||Npaq/Npaq MR/Ndrive MP|
|Ensemble||Ensemble LAB/Epaq/Epaq MR/Ensemble MP|
|Single Axis||Soloist||Soloist MP|
MPS75SLE Miniature Mechanical-Bearing Screw-Driven Linear Stage with Linear Feedback
Direct Linear Feedback (Required)
|-E1||Incremental linear encoder; 1 Vpp|
|-E2||Incremental linear encoder; 0.05 µm digital TTL output|
|-025||25 mm travel stage|
|-050||50 mm travel stage|
|-075||75 mm travel stage|
|-100||100 mm travel stage|
Mounting Plate (Optional)
|-MP||Optical table mounting plate|
|-PL0||No metrology performance plots|
|-PL1||Metrology, uncalibrated with performance plots|
|-PL2||Metrology, calibrated (HALAR) with performance plots|
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
|-TAS||Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
|-TAC||Integration - Test as components
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system.
Accessories (to be ordered as separate line item)
|HDZ-MPS75SL||Right angle bracket, MPS75SL|