- Compact 75 mm width with travel to 100 mm
- Precision ground ball-screw drive
- DC servo or stepper motor
- Anti-creep crossed-roller bearings
- High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.0 µm)
- High-vacuum compatible
- Optional bellows waycovers
- Compact multi-axis configurations
The MPS75SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly.
The precision ground ball-screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The anti-creep crossed-roller linear bearings provide smooth travel and excellent payload characteristics.
Optional Vacuum Preparation
The MPS75SL is available with optional vacuum preparation to 10-6 Torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.
An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Bellows waycovers are available for use in dusty environments. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be mounted with the smaller MPS50SL stage.
The MPS75SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.
|Travel||25 mm||50 mm||75 mm||100 mm|
|Accuracy||Standard||±2.5 µm||±3.0 µm||±3.5 µm||±4.0 µm|
|HALAR(1)||±1.0 µm||±1.0 µm||±1.5 µm||±1.5 µm|
|Repeatability (Bidirectional)(1)||±0.75 µm|
|Straightness||±2.0 µm||±2.0 µm||±3.0 µm||±3.0 µm|
|Flatness||±2.0 µm||±2.0 µm||±3.0 µm||±3.0 µm|
|Maximum Speed||1.0 mm/rev
|DC Motor||50 mm/s||50 mm/s||50 mm/s||35 mm/s|
|SM Motor||30 mm/s||30 mm/s||30 mm/s||30 mm/s|
|Load Capacity(2)||Horizontal||15 kg|
|Stage Mass||1.7 kg||1.8 kg||1.9 kg||2.0 kg|
|Material||Anodized Aluminum Body|
- With Aerotech controllers.
- Payload specifications are single-axis system.
- Excessive duty cycle may impact stage accuracy.
- Specifications are for single-axis systems measured 25 mm above the tabletop.
- Contact factory for specifications of stages with bellows option.
|Model||DC Motor (Standard and VAC)||SM Motor (Standard and VAC)|
|Drive System||DC Brush Servomotor||24 VDC Bipolar Stepper Motor|
|Feedback||10,000 lines/rev Rotary Encoder||N/A|
|Electronic Resolution||0.025 µm||0.025 µm @ 40,000 steps/rev Motor Resolution|
|Maximum Bus Voltage||48 VDC||48 VDC*|
|Limit Switches||5V, Normally Closed|
- *With Aerotech control system.
|Model||DC Motor and SM Motor|
|Multi-Axis||A3200||Npaq/Npaq MR/Ndrive MP|
|Ensemble||Ensemble LAB/Epaq/Epaq MR/Ensemble MP|
|Single Axis||Soloist||Soloist MP|
MPS75SL Series Drive-Screw Stage
|-025||25 mm travel stage with drive screw and limits|
|-050||50 mm travel stage with drive screw and limits|
|-075||75 mm travel stage with drive screw and limits|
|-100||100 mm travel stage with drive screw and limits|
|-VAC||Vacuum preparation of the stage and motor to 10-6 torr|
|-TTM||Metric pattern/thread tabletop|
|-B1MM||1 mm/rev precision-ground ball screw|
|-DC||DC servomotor with 3 meter integral cable|
|-SM||Stepping motor with 3 meter integral cable|
|-5V-NC||5 V normally-closed limits|
|-BELLOWS||Bellows way cover (not available with VAC option)|
|-MP||Breadboard mounting plate|
|-PLOTS||Accuracy and repeatability plots|
|-NO PLOTS||No performance plots|
Accessories (to be ordered as separate line item)
|HALAR||High-accuracy system linear error correction for accuracy and repeatability|
|HDZ-MPS75SL-VAC||VAC 6 prepared right angle L-bracket|
|ALIGNMENT-NPA||Non-precision XY assembly|
|ALIGNMENT-NPAZ||Non-precision YZ assembly|
|ALIGNMENT-PA10||XY assembly; 10 arc sec orthogonal|
|ALIGNMENT-PA10Z||XZ or YZ assembly; 10 arc sec orthogonal|
|ALIGNMENT-PA5||XY assembly; 5 arc sec orthogonal|
|ALIGNMENT-PA5Z||XZ or YZ assembly; 5 arc sec orthogonal|