- Compact 75 mm width with travel to 100 mm
- Precision ground ball-screw drive
- DC servo or stepper motor
- Anti-creep crossed-roller bearings
- High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.0 µm)
- High-vacuum compatible
- Optional bellows waycovers
- Compact multi-axis configurations
The MPS75SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly.
The precision ground ball-screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The anti-creep crossed-roller linear bearings provide smooth travel and excellent payload characteristics.
Optional Vacuum Preparation
The MPS75SL is available with optional vacuum preparation to 10-6 Torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.
An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Bellows waycovers are available for use in dusty environments. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be mounted with the smaller MPS50SL stage.
The MPS75SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.
|Travel||25 mm||50 mm||75 mm||100 mm|
|Accuracy||Uncalibrated||±2.5 µm||±3.0 µm||±3.5 µm||±4.0 µm|
|Uncalibrated with Bellows||±3.5 µm||±4.0 µm||±4.5 µm||±5.0 µm|
|Calibrated(1)||±1.0 µm||±1.0 µm||±1.5 µm||±1.5 µm|
|Resolution (Minimum Incremental Motion)||0.1 µm|
|Repeatability (Bidirectional)(1)||±0.75 µm (Standard); ±1.2 µm (with Bellows)|
|Straightness||±2.0 µm||±2.0 µm||±3.0 µm||±3.0 µm|
|Flatness||±2.0 µm||±2.0 µm||±3.0 µm||±3.0 µm|
|Maximum Speed||1.0 mm/rev
|DC Motor (-M1)||50 mm/s||50 mm/s||50 mm/s||35 mm/s|
|Stepper Motor (-M2)||30 mm/s||30 mm/s||30 mm/s||30 mm/s|
|Load Capacity(2)||Horizontal||15 kg|
|Stage Mass||1.7 kg||1.8 kg||1.9 kg||2.0 kg|
|Material||Anodized Aluminum Body|
- With Aerotech controllers.
- Payload specifications are single-axis system.
- Excessive duty cycle may impact stage accuracy.
- Specifications are for single-axis systems measured 25 mm above the tabletop.
- Contact factory for specifications of stages with bellows option.
|Model||DC Motor (-M1)|
(Standard and VAC)
|Stepper Motor (-M2)|
(Standard and VAC)
|Drive System||DC Brush Servomotor||24 VDC Bipolar Stepper Motor|
|Feedback||10,000 lines/rev Rotary Encoder||N/A|
|Electronic Resolution||0.025 µm||0.025 µm @ 40,000 steps/rev Motor Resolution|
|Maximum Bus Voltage||48 VDC||48 VDC*|
|Limit Switches||5V, Normally Closed|
- *With Aerotech control system.
|Multi-Axis||A3200||Npaq/Npaq MR/Ndrive MP|
|Ensemble||Ensemble LAB/Epaq/Epaq MR/Ensemble MP|
|Single Axis||Soloist||Soloist MP|
MPS75SL Miniature Mechanical-Bearing Screw-Driven Linear Stage
|-025||25 mm travel stage|
|-050||50 mm travel stage|
|-075||75 mm travel stage|
|-100||100 mm travel stage|
Vacuum Preparation (Optional)
|-HV||High vacuum preparation to 10-6 Torr|
- Note: Bellows waycover not available with -HV vacuum preparation.
Mounting Plate (Optional)
|-MP||Optical table mounting plate|
|-PL0||No metrology performance plots|
|-PL1||Metrology, uncalibrated with performance plots|
|-PL2||Metrology, calibrated (HALAR) with performance plots|
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
|-TAS||Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
|-TAC||Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.
Accessories (to be ordered as separate line item)
|HDZ-MPS75SL||Right angle bracket, MPS75SL|
|HDZ-MPS75SL-HV||Right angle bracket, MPS75SL, high vacuum preparation to 10-6 Torr|