MPS75SL Mechanical-Bearing Ball-Screw Linear Stage

Description

Design Features

  • Compact 75 mm width with travel to 100 mm
  • Precision ground ball-screw drive
  • DC servo or stepper motor
  • Anti-creep crossed-roller bearings
  • High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.0 µm)
  • High-vacuum compatible
  • Optional bellows waycovers
  • Compact multi-axis configurations

The MPS75SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly.

High Accuracy

The precision ground ball-screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The anti-creep crossed-roller linear bearings provide smooth travel and excellent payload characteristics.

Optional Vacuum Preparation

The MPS75SL is available with optional vacuum preparation to 10-6 Torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.

Highly Configurable

An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Bellows waycovers are available for use in dusty environments. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be mounted with the smaller MPS50SL stage.

The MPS75SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.

Specifications

Mechanical Specifications

ModelMPS75SL-025MPS75SL-050MPS75SL-075MPS75SL-100
Travel 25 mm 50 mm 75 mm 100 mm
Accuracy Standard ±2.5 µm ±3.0 µm ±3.5 µm ±4.0 µm
HALAR(1) ±1.0 µm ±1.0 µm ±1.5 µm ±1.5 µm
Resolution 0.1 µm
Repeatability (Bidirectional)(1) ±0.75 µm
Straightness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Flatness ±2.0 µm ±2.0 µm ±3.0 µm ±3.0 µm
Maximum Speed 1.0 mm/rev
Ball Screw
DC Motor 50 mm/s 50 mm/s 50 mm/s 35 mm/s
SM Motor 30 mm/s 30 mm/s 30 mm/s 30 mm/s
Load Capacity(2) Horizontal 15 kg
Side 15 kg
Vertical 4 kg
Stage Mass 1.7 kg 1.8 kg 1.9 kg 2.0 kg
Material Anodized Aluminum Body
  1. With Aerotech controllers.
  2. Payload specifications are single-axis system.
  3. Excessive duty cycle may impact stage accuracy.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop.
  5. Contact factory for specifications of stages with bellows option.

Electrical Specifications

ModelDC Motor (Standard and VAC)SM Motor (Standard and VAC)
Drive System DC Brush Servomotor 24 VDC Bipolar Stepper Motor
Feedback 10,000 lines/rev Rotary Encoder N/A
Electronic Resolution 0.025 µm 0.025 µm @ 40,000 steps/rev Motor Resolution
Maximum Bus Voltage 48 VDC 48 VDC*
Limit Switches 5V, Normally Closed
    *With Aerotech control system.

Recommended Controller

ModelDC Motor and SM Motor
Multi-Axis A3200 Npaq/Npaq MR/Ndrive MP
Ensemble Ensemble LAB/Epaq/Epaq MR/Ensemble MP
Single Axis Soloist Soloist MP
  • MPS75SL Load Curves

Dimensions

  • MPS75SL
  • MPS75SL Bellows Option
  • MPS75SL Mounting Plates
  • HDZ-MPS75SL L-Bracket

Ordering Information

MPS75SL Series Drive-Screw Stage

Option Description
-025 25 mm travel stage with drive screw and limits
-050 50 mm travel stage with drive screw and limits
-075 75 mm travel stage with drive screw and limits
-100 100 mm travel stage with drive screw and limits

Stage Construction

Option Description
-VAC Vacuum preparation of the stage and motor to 10-6 torr

Tabletop

Option Description
-TTM Metric pattern/thread tabletop

Drive Screw

Option Description
-B1MM 1 mm/rev precision-ground ball screw

Motor

Option Description
-DC DC servomotor with 3 meter integral cable
-SM Stepping motor with 3 meter integral cable

Limits

Option Description
-5V-NC 5 V normally-closed limits

Way Cover

Option Description
-BELLOWS Bellows way cover (not available with VAC option)

Options

Option Description
-MP Breadboard mounting plate

Testing

Option Description
-PLOTS Accuracy and repeatability plots
-NO PLOTS No performance plots

Accessories (to be ordered as separate line item)

Option Description
HALAR High-accuracy system linear error correction for accuracy and repeatability
HDZ-MPS75SL Right-angle L-bracket
HDZ-MPS75SL-VAC VAC 6 prepared right angle L-bracket
ALIGNMENT-NPA Non-precision XY assembly
ALIGNMENT-NPAZ Non-precision YZ assembly
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA10Z XZ or YZ assembly; 10 arc sec orthogonal
ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal
ALIGNMENT-PA5Z XZ or YZ assembly; 5 arc sec orthogonal