MPS50SL Miniature Mechanical-Bearing Screw-Driven Linear Stage

Description

Design Features

  • Compact 50 mm width with travel to 50 mm
  • Precision ground ball-screw or lead-screw drive
  • DC servo or stepper motor
  • Crossed-roller bearings
  • High resolution (0.1 µm), repeatability (±0.75 µm), and accuracy (±1.5 µm)
  • High vacuum capable
  • Compact multi-axis configurations

The MPS50SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly in space-constrained applications.

High Accuracy

The precision ground ball-screw or lead screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The crossed-roller linear bearings provide smooth travel and excellent payload characteristics.

Optional Vacuum Preparation

The MPS50SL is available with optional vacuum preparation to 10-6 Torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.

Highly Configurable

An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be directly mounted to the larger MPS75SL stage.

The MPS50SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.

Specifications

Mechanical Specifications

ModelMPS50SL-025MPS50SL-050
Travel 25 mm 50 mm
Accuracy 1.0 mm/rev Ball Screw Uncalibrated ±3.0 µm ±4.0 µm
Calibrated(1) ±1.5 µm ±1.5 µm
0.5 mm/rev Lead Screw Uncalibrated ±4.0 µm ±6.0 µm
Calibrated(1) ±2.0 µm ±2.5 µm
Resolution (Minimum Incremental Motion) 1.0 mm/rev Ball Screw 0.1 µm 0.1 µm
0.5 mm/rev Lead Screw 0.1 µm 0.1 µm
Repeatability (Bidirectional)(1) 1.0 mm/rev Ball Screw ±0.75 µm ±0.75 µm
0.5 mm/rev Lead Screw ±1.0 µm ±1.0 µm
Straightness ±2.0 µm ±3.0 µm
Flatness ±2.0 µm ±3.0 µm
Maximum Speed 1.0 mm/rev Ball Screw DC Motor (-M1) 5 mm/s 5 mm/s
Stepper Motor (-M2) 1 mm/s 1 mm/s
0.5 mm/rev Lead Screw DC Motor (-M1) 2.5 mm/s 2.5 mm/s
Stepper Motor (-M2) 0.5 mm/s 0.5 mm/s
Load Capacity(2) Horizontal 5 kg 5 kg
Side 5 kg 5 kg
Vertical 2.5 kg 2.5 kg
Stage Mass 0.85 kg 0.9 kg
Material Anodized Aluminum Body
  1. With Aerotech controllers.
  2. Payload specifications are single-axis system.
  3. Excessive duty cycle may impact stage accuracy.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop.

Electrical Specifications

ModelDC Motor (-M1)
(Standard and VAC)

Stepper Motor (-M2)
(Standard and VAC)

Drive System DC Brush Servomotor with 14:1 Gearbox 24 VDC Bipolar Stepper Motor with 43:1 Gearbox
Feedback 512 lines/rev Rotary Encoder N/A
Electronic Resolution 1.0 mm/rev Ball Screw 0.0348 µm 0.0484 µm @ 480 steps/rev Motor Resolution
0.5 mm/rev Lead Screw 0.0174 µm 0.0242 µm @ 480 steps/rev Motor Resolution
Maximum Bus Voltage 48 VDC 48 VDC*
Limit Switches 5 V, Normally Closed 5 V, Normally Closed
    *With Aerotech control system.

Recommended Controller

Model 
Multi-Axis A3200 Npaq/Npaq MR/Ndrive MP
Ensemble Ensemble LAB/Epaq/Epaq MR/Ensemble MP
Single Axis Soloist Soloist MP
  • MPS50SL Load Curves

Dimensions

  • MPS50SL
  • MPS50SL Mounting Plates
  • MPS50SL Mounting Bracket

Ordering Information

MPS50SL Miniature Mechanical-Bearing Screw-Driven Linear Stage

Travel (Required)

Option Description
-025 25 mm travel stage
-050 50 mm travel stage

Drive Screw (Required)

Option Description
-BS Precision-ground ball screw, 1 mm/rev
-LS Precision-ground lead screw, 0.5 mm/rev

Vacuum Preparation (Optional)

Option Description
-HV High vacuum preparation to 10-6 Torr

Motor (Required)

Option Description
-M1 DC servomotor
-M2 Stepper motor

Mounting Plate (Optional)

Option Description
-MP Optical table mounting plate

Metrology (Required)

Option Description
-PL0 No metrology performance plots
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system.

Accessories (to be ordered as separate line item)

Option Description
HDZ-MPS50SL Right angle bracket, MPS50SL
HDZ-MPS50SL-HV Right angle bracket, MPS50SL, high vacuum preparation to 10-6 Torr