- Compact 50 mm width with travel to 50 mm
- Precision ground ball-screw or lead-screw drive
- DC servo or stepper motor
- Crossed-roller bearings
- High resolution (0.1 µm), repeatability (±0.75 µm), and accuracy (±1.5 µm)
- High vacuum capable
- Compact multi-axis configurations
The MPS50SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment and component assembly in space-constrained applications.
The precision ground ball-screw or lead screw provides exceptional accuracy, repeatability and ultra-fine positioning resolution capability to 0.1 micron. The DC servomotor is equipped with a rotary encoder. The crossed-roller linear bearings provide smooth travel and excellent payload characteristics.
Optional Vacuum Preparation
The MPS50SL is available with optional vacuum preparation to 10-6 Torr. It is the perfect compact stage choice for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace.
An optional breadboard mounting plate provides direct mounting to both English and metric breadboards. Any of the models can be mounted in an XY configuration and, with the right-angle L-bracket, in XYZ configurations. It can also be directly mounted to the larger MPS75SL stage.
The MPS50SL is a member of the MPS (Miniature Positioning Stage) family of linear, rotary, goniometer and vertical lift and Z stages. Two or more stages can easily be mounted together in numerous combinations using standardized mounting patterns and adapter plates.
|Travel||25 mm||50 mm|
|Accuracy||1.0 mm/rev Ball Screw||Standard||±3.0 µm||±4.0 µm|
|HALAR(1)||±1.5 µm||±1.5 µm|
|0.5 mm/rev Lead Screw||Standard||±4.0 µm||±6.0 µm|
|HALAR(1)||±2.0 µm||±2.5 µm|
|Resolution||1.0 mm/rev Ball Screw||0.1 µm||0.1 µm|
|0.5 mm/rev Lead Screw||0.1 µm||0.1 µm|
|Repeatability (Bidirectional)(1)||1.0 mm/rev Ball Screw||±0.75 µm||±0.75 µm|
|0.5 mm/rev Lead Screw||±1.0 µm||±1.0 µm|
|Straightness||±2.0 µm||±3.0 µm|
|Flatness||±2.0 µm||±3.0 µm|
|Maximum Speed||1.0 mm/rev Ball Screw||DC Motor||5 mm/s||5 mm/s|
|SM Motor||1 mm/s||1 mm/s|
|0.5 mm/rev Lead Screw||DC Motor||2.5 mm/s||2.5 mm/s|
|SM Motor||0.5 mm/s||0.5 mm/s|
|Load Capacity(2)||Horizontal||5 kg||5 kg|
|Side||5 kg||5 kg|
|Vertical||2.5 kg||2.5 kg|
|Stage Mass||0.85 kg||0.9 kg|
|Material||Anodized Aluminum Body|
- With Aerotech controllers.
- Payload specifications are single-axis system.
- Excessive duty cycle may impact stage accuracy.
- Specifications are for single-axis systems measured 25 mm above the tabletop.
|Model||DC Motor (Standard and VAC)||SM Motor (Standard and VAC)|
|Drive System||DC Brush Servomotor with 14:1 Gearbox||24 VDC Bipolar Stepper Motor with 43:1 Gearbox|
|Feedback||512 lines/rev Rotary Encoder||N/A|
|Electronic Resolution||1.0 mm/rev Ball Screw||0.0348 µm||0.0484 µm @ 480 steps/rev Motor Resolution|
|0.5 mm/rev Lead Screw||0.0174 µm||0.0242 µm @ 480 steps/rev Motor Resolution|
|Maximum Bus Voltage||48 VDC||48 VDC*|
|Limit Switches||5 V, Normally Closed||5 V, Normally Closed|
- *With Aerotech control system.
|Model||DC Motor and SM Motor|
|Multi-Axis||A3200||Npaq/Npaq MR/Ndrive MP|
|Ensemble||Ensemble LAB/Epaq/Epaq MR/Ensemble MP|
|Single Axis||Soloist||Soloist MP|
MPS50SL Series Drive-Screw Stage
|-025||25 mm travel stage with drive screw and limits|
|-050||50 mm travel stage with drive screw and limits|
|-VAC||Vacuum preparation of the stage and motor to 10-6 torr|
|-TTM||Metric pattern/thread tabletop|
|-B1MM||1 mm/rev precision-ground ball screw|
|-L0.5MM||0.5 mm/rev ground lead screw|
|-DC||DC servomotor with 3 meter integral cable|
|-SM||Stepping motor with 3 meter integral cable|
|-5V-NC||5 V normally-closed limits|
|-MP||Breadboard mounting plate|
|-PLOTS||Accuracy and repeatability plots|
|-NO PLOTS||No performance plots|
Accessories (to be ordered as separate line item)
|HALAR||High-accuracy system linear error correction for accuracy and repeatability|
|HDZ-MPS50SL-VAC||VAC6 prepared right angle L-bracket|
|ALIGNMENT-NPA||Non-precision XY assembly|
|ALIGNMENT-NPAZ||Non-precision YZ assembly|
|ALIGNMENT-PA10||XY assembly; 10 arc sec orthogonal|
|ALIGNMENT-PA10Z||XZ or YZ assembly; 10 arc sec orthogonal|
|ALIGNMENT-PA5||XY assembly; 5 arc sec orthogonal|
|ALIGNMENT-PA5Z||XZ or YZ assembly; 5 arc sec orthogonal|