ECO165LM Series Mechanical Bearing, Linear Motor Stage

Description

Design Features

  • High-performance in a cost-effective, economic package
  • Rugged mechanical design
  • Direct-drive linear motor for precision motion
  • Eight models with travels from 100 mm to 600 mm

The ECO165LM series, part of the ECO linear stage family, builds upon Aerotech’s long tradition of producing low total cost of ownership motion designs. Excellent positioning specifications, high stiffness, and a variety of options and features combined with economic pricing make ECO165LM stages an ideal choice for medium-performance production applications.

Quality Mechanical Construction

A long-life recirculating linear guide bearing system and quality construction make the ECO165LM an attractive solution for applications where uptime is critical. Unlike low-cost competitive motion stages, the ECO165LM can be integrated into complex machines with the assurance it will perform at a high level and outlast other machine components.

Precision Motion Performance

ECO165LM series stages are optimized with high precision, noncontact linear encoders. Precision recirculating linear bearings, along with Aerotech’s machining and assembly craftsmanship, enable the best geometric performance per unit price on the market.

The precision noncontact encoders enable minimum incremental motion to 10 nm with micrometer-level repeatability. The optional HALAR factory calibration improves positioning accuracy to ±1.5 µm.

Direct-Drive Linear Motor

The ECO165LM comes standard with Aerotech’s field-proven linear motor technology. It is available with a high-performance linear-motor option for applications requiring higher force and acceleration motion profiles. In both cases the ironless forcer coil provides high force with zero cogging for super-smooth velocity and position control. This ironless design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor stages, the linear motor has zero backlash, no windup, zero friction, and excellent dynamic responsiveness.

Design and Integration Flexibility

The ECO165LM is available in eight different models with travels ranging from 100 mm to 600 mm and speeds up to 2 m/s. Configurable cable management solutions are available for single and multi-axis systems as standard options.

The base mounting holes are accessible from the outside of the stage for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. Tabletops are available with both English and metric mounting patterns. Tabletop hole patterns allow the direct attachment of several types of Aerotech rotary stages.

The ECO165LM stage is a flexible, yet cost-effective, linear motion stage with many options to fit the exact needs of the application. It is easily the best performing and most versatile linear stage per unit price that money can buy.

Specifications

ECO165LM Specifications

ECO165LM
Travel 100 150 200 250 300 400 500 600
Accuracy(1) Standard ±6 µm ±8 µm ±10 µm ±12 μm ±14 µm ±16 μm ±18 μm ±20 μm
HALAR ±1.5 μm ±1.5 μm ±2 μm ±2 μm ±2 μm ±2.5 μm ±2.5 μm ±3 μm
Resolution (Min.
Incremental Motion)
10 nm
Bidirectional Repeatability(1) ±0.75 μm ±0.75 μm ±0.75 μm ±0.75 μm ±0.75 μm ±1.0 μm ±1.0 μm ±1.0 μm
Straightness(1) ±3 µm ±4 µm ±5 µm ±6 µm ±7 μm ±9 μm ±11 μm ±13 μm
Flatness(1) ±3 µm ±4 µm ±5 µm ±6 µm ±7 μm ±9 μm ±11 μm ±13 μm
Pitch 40 μrad
(8.2 arc sec)
40 μrad
(8.2 arc sec)
50 μrad
(10.3 arc sec)
55 μrad
(11.3 arc sec)
65 μrad
(13.4 arc sec)
80 μrad
(16.5 arc sec)
95 μrad
(19.6 arc sec)
110 μrad
(22.7 arc sec)
Roll 40 μrad
(8.2 arc sec)
40 μrad
(8.2 arc sec)
50 μrad
(10.3 arc sec)
55 μrad
(11.3 arc sec)
65 μrad
(13.4 arc sec)
80 μrad
(16.5 arc sec)
95 μrad
(19.6 arc sec)
110 μrad
(22.7 arc sec)
Yaw 40 μrad
(8.2 arc sec)
40 μrad
(8.2 arc sec)
50 μrad
(10.3 arc sec)
55 μrad
(11.3 arc sec)
65 μrad
(13.4 arc sec)
80 μrad
(16.5 arc sec)
95 μrad
(19.6 arc sec)
110 μrad
(22.7 arc sec)
Maximum Speed(2) 2 m/s
Maximum Acceleration(2) 1.5 g
Maximum Force, Continuous M1 36.5 N
M2 77.7 N
Load Capacity(3) Horizontal 45 kg
Side 45 kg
Moving Mass 2.1 kg
Stage Mass M1 6.4 kg 7.1 kg 7.7 kg 8.3 kg 9.0 kg 10.3 kg 11.6 kg 12.8 kg
M2 7.2 kg 8.0 kg 8.8 kg 9.6 kg 10.4 kg 12.0 kg 13.6 kg 15.2 kg
Material Anodized Aluminum
MTBF (Mean Time Between Failure) 20,000 Hours
  1. Certified with -PL1 option.
  2. Requires the selection of an appropriate amplifier with sufficient voltage and current, and is dependent on motor selection.
  3. Axis-orientation for on-axis loading is listed.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Contact factory for multi-axis applications.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Encoder
Incremental – 1 Vpp and TTL (0.1 μm) Output
Absolute – EnDat 2.2
Maximum Bus Voltage 320 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Ndrive HLe/Ndrive CP/Ndrive HPe/Npaq
Ensemble Ensemble HLe/Ensemble CP/Ensemble HPe
Single Axis Soloist Soloist CP/Soloist HPe
  • ECO165LM Plot

Dimensions

  • ECO165LM
  • Accessory Tabletop

Ordering Information

ECO165LM Linear Motor Stage

Option Description
-0100 100 mm travel stage with hardcover and limits
-0150 150 mm travel stage with hardcover and limits
-0200 200 mm travel stage with hardcover and limits
-0250 250 mm travel stage with hardcover and limits
-0300 300 mm travel stage with hardcover and limits
-0400 400 mm travel stage with hardcover and limits
-0500 500 mm travel stage with hardcover and limits
-0600 600 mm travel stage with hardcover and limits

Motor (Required)

Option Description
-M1 Standard motor option
-M2 High-performance motor option

Tabletop (Optional)

Option Description
-TT1 Tabletop with metric dimension mounting pattern and holes
-TT2 Tabletop with English dimension mounting pattern and holes
-TT3 Accessory tabletop with mounting pattern for Aerotech rotary stages; see drawings for the supported stage types

Encoder (Required)

Option Description
-E1 Incremental linear encoder; 1 Vpp
-E2 Incremental linear encoder; 0.1 μm digital TTL output

CMS (Required)

Option Description
-CMS0 No cable management system; connector bracket only
-CMS1 External cable management system for single axis (-X-CMS)
-CMS2 External cable management system for lower-axis of two-axis ECO XY assembly; flying leads to ECO stages; order with lower-axis only (-XY-CMS)
-CMS3 External cable management system for lower-axis of two-axis (XZ or XT) assembly; connectorized at top for Z or T axis; order with lower-axis only (-XZ/XT-CMS)
-CMS4 External cable management system for upper-axis of two-axis ECO XY assembly; flying leads to ECO stages; order with upper-axis only (-Y-CMS)

Lifting (Optional)

Option Description
-LF1 Lifting hardware
  1. Lifting option only available on travels 400 mm and greater. Lifting should never be ordered on the upper-axis of an XY set (only order on lower axis).

Metrology (Required)

Option Description
-PL0 No Accuracy, Straightness, and Flatness plots (standard)
-PL1 Accuracy, Straightness, and Flatness plots provided

Accessories (to be ordered as separate line item)

Option Description
HALAR High-accuracy system correction
ALIGNMENT-NPA Non-precision XY assembly
ALIGNMENT-NPAZ Non-precision XZ or YZ assembly
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonality; alignment to within 7 microns orthogonality for short travel stages
ALIGNMENT-PA10Z XZ or YZ assembly with L-bracket; 10 arc sec orthogonality; alignment to within 10 microns orthogonality for short travel stages
ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonality; alignment to within 3 microns orthogonality for short travel stages
ALIGNMENT-PA5Z XZ or YZ assembly with L-bracket; 5 arc sec orthogonality; alignment to within 5 microns orthogonality for short travel stages