ATS150 Mechanical-Bearing Ball-Screw Linear Stage

Description

Design Features

  • Long life linear motion guide bearing system
  • Ultra-fine resolution
  • Integral bellows waycovers
  • Low-profile compact design
  • Submicron accuracy
  • Optional high-accuracy linear encoder

The ATS150 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precision micromachining applications.

Construction Features

ATS150 series stages are machined from a special cast aluminum alloy to provide a high strength-to-weight ratio and long-term stability. The base is a box design that provides exceptional stiffness and stability.

ATS150 series stages employ a precision-ground ball screw that is pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High quality, pre-loaded duplex bearings are used to eliminate axial play.

All ATS150 series stages incorporate Linear Motion Guide (LMG) bearings to provide high load capability and high stiffness. The LMG design provides a compact stage with continuous carriage support over the entire travel and good cantilevered load capability. Integral wipers on the bearing trucks help ensure stage travel life. Highly accurate optical limit switches and end stops are also standard.

Integral bellows-type waycovers protect the drive and bearing system from contamination. Metal surfaces are protected with an attractive clear anodized finish. Both metric (standard) and English mounting and bolt-hole patterns are available.

Linear Encoder

A precision noncontact linear encoder is an option. The encoder is mounted internal to the stage, protecting it from external contaminants and debris.

Motors and Drives

Included with all ATS150 series stages are Aerotech’s BMS series brushless rotary motors. This motor has all of the advantages of a brushless motor – high acceleration, no brushes to wear and lower heating – yet has zero cogging for extremely smooth motion and accuracy. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.

Specifications

ATS150 Specifications

ModelATS150-100 ATS150-150 ATS150-200 ATS150-250
Travel 100 mm 150 mm 200 mm 250 mm
Drive System Super Precision Ground Ball Screw/Brushless Servomotor (BMS60-A-D25-E1000H)
Bus Voltage Up to 160 VDC
Continuous Current Apk Up to 2.3 A
Arms Up to 1.6 A
Feedback Noncontact Rotary Encoder (1000 line)
Resolution 2 mm/rev lead 0.5 µm @ 4000 steps/rev Motor Resolution
4 mm/rev lead 1.0 µm @ 4000 steps/rev Motor Resolution
LN Linear Encoder 0.001 µm - 0.2 µm N/A N/A
Maximum Travel Speed(1) 2 mm/rev lead 115 mm/s
4 mm/rev lead 230 mm/s
Maximum Load(2) Horizontal 45.0 kg
Vertical 25.0 kg
Side 25.0 kg
Accuracy Ball Screw HALAR(3) ±1.0 µm
Standard +2,-4 µm +2,-5 µm +2,-8 µm +2,-10 µm
LN HALAR(3) ±1.0 µm N/A N/A
Standard ±5.0 µm N/A N/A
Repeatability (Bidirectional) Ball Screw HALAR(3) ±0.5 µm
Standard ±1.0 µm
LN ±0.5 µm N/A N/A
Straightness and Flatness Differential HALSF 1 µm/25 mm
Standard 2 µm/25 mm
Maximum
Deviation
HALSF ±1.0 µm ±1.5 µm ±2.0 µm ±3.0 µm
Standard ±2.0 µm ±3.0 µm ±4.0 µm ±5.0 µm
Pitch and Yaw 8 arc sec 10 arc sec 12 arc sec 14 arc sec
Nominal Stage Weight Less Motor 6.1 kg 7.5 kg 7.9 kg 8.4 kg
With Motor 7.2 kg 8.6 kg 9.0 kg 9.5 kg
Construction Aluminum Body/Stage and Table; Clear Anodize Finish
  1. Excessive duty cycle may impact accuracy.
  2. Payload specifications are for single axis system and based on ball screw and bearing life of 2500 km (100 million inches) of travel.
  3. Available with Aerotech controllers.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • ATS150

Dimensions

  • ATS150
  • HDZ2 Bracket

Ordering Information

Ordering Example

ATS150 -100 - - -M -20P -BMS -NC - -

Ordering Options

Series Travel (mm) Stage Construction OptionsHigh Accuracy Linear Encoder Mounting and Grid PatternDrive ScrewMotorLimits CouplingOptions
ATS150 -100
-150
-200
-250
/VAC3
/VAC6
/STEEL
-LN10AS
-LN15AS
-M
-U
-20P
-40P
-BMS
-SM
-NM
-NC
-NO
-9DU
-FLY
-NO COUPLING
-STD COUPLING
-LGR MTR COUPLING
-COFB
-COFBBRK
-BRK23
-FB150
-FB-BRK1

ATS150 Series Linear Ball-Screw Stage

Option Description
ATS150-100 100 mm (4 in) travel stage with limits
ATS150-150 150 mm (6 in) travel stage with limits
ATS150-200 200 mm (8 in) travel stage with limits
ATS150-250 250 mm (10 in) travel stage with limits

Stage Construction Options

Option Description
/VAC3 Vacuum preparation of stage to 10-3 torr
/VAC6 Vacuum preparation of stage to 10-6 torr
/STEEL All steel construction

High-Accuracy Linear Encoders

Option Description
-LN10AS High-accuracy linear encoder for ATS150-100; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier
-LN15AS High-accuracy linear encoder for ATS150-150; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier

Note: Internal signal multipliers available with A3200 amplifier products.

Mounting and Grid Pattern

Option Description
-M Metric dimension mounting pattern and holes
-U English dimension mounting pattern and holes

Drive Screw

Option Description
-20P 2 mm/rev precision-ground ball screw
-40P 4 mm/rev precision-ground ball screw

Motor

Option Description
-BMS Brushless servomotor with connectors and 1000-line encoder; requires cable (BMS60-A-D25-E1000H/)
-SM Stepping motor with connector and home marker pulse (one per rev); requires cable (101SMB2-HM/)
-NM No motor or encoder

Limits

Option Description
-NC Normally-closed end of travel limit switches (standard)
-NO Normally-open end of travel limit switches
-9DU With 9-pin limit connector
-FLY With flying leads

Coupling

Option Description
-NO COUPLING No coupling
-STD COUPLING 0.25 in coupling
-LGR MTR COUPLING 0.375 in coupling
-COFB Rigid coupling required for fold-back -FB150 option
-COFBBRK Rigid coupling required for fold-back with stage brake -FB-BRK1 option

Options

Option Description
-BRK23 24 VDC spring-set motor brake for NEMA 23 motor
-FB150 Fold-back motor configuration
-FB-BRK1 Fold-back motor configuration with 24 VDC spring-set motor brake for NEMA 23 motor

Accessories (to be ordered as separate line item)

Option Description
ALIGNMENT-NPA Non-precision XY assembly
ALIGNMENT-NPAZ Non-precision XZ or YZ assembly
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonal
ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal
ALIGNMENT-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonal
HALAR High-accuracy system – linear error correction for accuracy and repeatability
HALSF High-accuracy system – improved straightness and flatness
HDZ2 English right angle L-bracket; for ATS150-100 and ATS150-150 stages only
HDZ2M Metric right angle L-bracket; for ATS150-100 and ATS150-150 stages only
HDZ2/VAC6 VAC6 prepared English right angle L-bracket; for ATS150-100 and ATS150-150 stages only
HDZ2M/VAC6 VAC6 prepared metric right angle L-bracket; for ATS150-100 and ATS150-150 stages only
  1. Please consult factory for other travel lengths.


*Please go HERE for complete information on XY, XZ and YZ assembly options.

*Please go HERE for complete information on motor orientation options.