- Long life linear motion guide bearing system
- Ultra-fine resolution
- Integral bellows waycovers
- Low-profile compact design
- Submicron accuracy
- Optional high-accuracy linear encoder
The ATS150 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precision micromachining applications.
ATS150 series stages are machined from a special cast aluminum alloy to provide a high strength-to-weight ratio and long-term stability. The base is a box design that provides exceptional stiffness and stability.
ATS150 series stages employ a precision-ground ball screw that is pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High quality, pre-loaded duplex bearings are used to eliminate axial play.
All ATS150 series stages incorporate Linear Motion Guide (LMG) bearings to provide high load capability and high stiffness. The LMG design provides a compact stage with continuous carriage support over the entire travel and good cantilevered load capability. Integral wipers on the bearing trucks help ensure stage travel life. Highly accurate optical limit switches and end stops are also standard.
Integral bellows-type waycovers protect the drive and bearing system from contamination. Metal surfaces are protected with an attractive clear anodized finish. Both metric (standard) and English mounting and bolt-hole patterns are available.
A precision noncontact linear encoder is an option. The encoder is mounted internal to the stage, protecting it from external contaminants and debris.
Motors and Drives
Included with all ATS150 series stages are Aerotech’s BMS series brushless rotary motors. This motor has all of the advantages of a brushless motor – high acceleration, no brushes to wear and lower heating – yet has zero cogging for extremely smooth motion and accuracy. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.
|Travel||100 mm||150 mm||200 mm||250 mm|
|Drive System||Super Precision Ground Ball Screw/Brushless Servomotor (BMS60-A-D25-E1000H)|
|Bus Voltage||Up to 160 VDC|
|Continuous Current||Apk||Up to 2.3 A|
|Arms||Up to 1.6 A|
|Feedback||Noncontact Rotary Encoder (1000 line)|
|Resolution||2 mm/rev lead||0.5 µm @ 4000 steps/rev Motor Resolution|
|4 mm/rev lead||1.0 µm @ 4000 steps/rev Motor Resolution|
|LN Linear Encoder||0.001 µm - 0.2 µm||N/A||N/A|
|Maximum Travel Speed(1)||2 mm/rev lead||115 mm/s|
|4 mm/rev lead||230 mm/s|
|Maximum Load(2)||Horizontal||45.0 kg|
|Accuracy||Ball Screw||HALAR(3)||±1.0 µm|
|Standard||+2,-4 µm||+2,-5 µm||+2,-8 µm||+2,-10 µm|
|Repeatability (Bidirectional)||Ball Screw||HALAR(3)||±0.5 µm|
|Straightness and Flatness||Differential||HALSF||1 µm/25 mm|
|Standard||2 µm/25 mm|
|HALSF||±1.0 µm||±1.5 µm||±2.0 µm||±3.0 µm|
|Standard||±2.0 µm||±3.0 µm||±4.0 µm||±5.0 µm|
|Pitch and Yaw||8 arc sec||10 arc sec||12 arc sec||14 arc sec|
|Nominal Stage Weight||Less Motor||6.1 kg||7.5 kg||7.9 kg||8.4 kg|
|With Motor||7.2 kg||8.6 kg||9.0 kg||9.5 kg|
|Construction||Aluminum Body/Stage and Table; Clear Anodize Finish|
- Excessive duty cycle may impact accuracy.
- Payload specifications are for single axis system and based on ball screw and bearing life of 2500 km (100 million inches) of travel.
- Available with Aerotech controllers.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
|Series||Travel (mm)||Stage Construction Options||High Accuracy Linear Encoder||Mounting and Grid Pattern||Drive Screw||Motor||Limits||Coupling||Options|
-LGR MTR COUPLING
ATS150 Series Linear Ball-Screw Stage
|ATS150-100||100 mm (4 in) travel stage with limits|
|ATS150-150||150 mm (6 in) travel stage with limits|
|ATS150-200||200 mm (8 in) travel stage with limits|
|ATS150-250||250 mm (10 in) travel stage with limits|
Stage Construction Options
|/VAC3||Vacuum preparation of stage to 10-3 torr|
|/VAC6||Vacuum preparation of stage to 10-6 torr|
|/STEEL||All steel construction|
High-Accuracy Linear Encoders
|-LN10AS||High-accuracy linear encoder for ATS150-100; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier|
|-LN15AS||High-accuracy linear encoder for ATS150-150; amplified sine output 1 Vpp (4 µm signal period); requires signal multiplier|
Note: Internal signal multipliers available with A3200 amplifier products.
Mounting and Grid Pattern
|-M||Metric dimension mounting pattern and holes|
|-U||English dimension mounting pattern and holes|
|-20P||2 mm/rev precision-ground ball screw|
|-40P||4 mm/rev precision-ground ball screw|
|-BMS||Brushless servomotor with connectors and 1000-line encoder; requires cable (BMS60-A-D25-E1000H/)|
|-SM||Stepping motor with connector and home marker pulse (one per rev); requires cable (101SMB2-HM/)|
|-NM||No motor or encoder|
|-NC||Normally-closed end of travel limit switches (standard)|
|-NO||Normally-open end of travel limit switches|
|-9DU||With 9-pin limit connector|
|-FLY||With flying leads|
|-NO COUPLING||No coupling|
|-STD COUPLING||0.25 in coupling|
|-LGR MTR COUPLING||0.375 in coupling|
|-COFB||Rigid coupling required for fold-back -FB150 option|
|-COFBBRK||Rigid coupling required for fold-back with stage brake -FB-BRK1 option|
|-BRK23||24 VDC spring-set motor brake for NEMA 23 motor|
|-FB150||Fold-back motor configuration|
|-FB-BRK1||Fold-back motor configuration with 24 VDC spring-set motor brake for NEMA 23 motor|
Accessories (to be ordered as separate line item)
|ALIGNMENT-NPA||Non-precision XY assembly|
|ALIGNMENT-NPAZ||Non-precision XZ or YZ assembly|
|ALIGNMENT-PA10||XY assembly; 10 arc sec orthogonal|
|ALIGNMENT-PA10Z||XZ or YZ assembly with L-bracket; 10 arc second orthogonal|
|ALIGNMENT-PA5||XY assembly; 5 arc sec orthogonal|
|ALIGNMENT-PA5Z||XZ or YZ assembly with L-bracket; 5 arc second orthogonal|
|HALAR||High-accuracy system – linear error correction for accuracy and repeatability|
|HALSF||High-accuracy system – improved straightness and flatness|
|HDZ2||English right angle L-bracket; for ATS150-100 and ATS150-150 stages only|
|HDZ2M||Metric right angle L-bracket; for ATS150-100 and ATS150-150 stages only|
|HDZ2/VAC6||VAC6 prepared English right angle L-bracket; for ATS150-100 and ATS150-150 stages only|
|HDZ2M/VAC6||VAC6 prepared metric right angle L-bracket; for ATS150-100 and ATS150-150 stages only|
- Please consult factory for other travel lengths.
*Please go HERE for complete information on XY, XZ and YZ assembly options.
*Please go HERE for complete information on motor orientation options.