ATS100 Mechanical Bearing, Screw-Driven Linear Stage

Description

Design Features

  • Long life linear motion guide bearing system
  • Ultra-fine resolution
  • Integral bellows waycovers
  • Low-profile compact design
  • Includes brushless, slotless motor

The ATS100 series motor-driven linear stages provide the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems and precision micromachining applications.

Outstanding Construction Features

ATS100 series stages are machined from a special cast aluminum alloy to provide a high strength-to-weight ratio and long-term stability. The base is a box design that provides exceptional stiffness and stability.

ATS100 series stages employ a precision-ground ball screw pre-loaded to eliminate backlash, and its nut has wipers to prevent contamination and maintain high accuracy throughout the life of the stage. High-quality, pre-loaded duplex bearings are used to eliminate axial play.

All ATS100 series stages incorporate Linear Motion Guide (LMG) bearings to provide high load capability and high stiffness. The LMG design provides a compact stage with continuous carriage support over the entire travel and good cantilevered load capability. Integral wipers on the bearing trucks help ensure stage travel life. Highly accurate optical limit switches and end stops are also standard.

Integral bellows-type waycovers protect the drive and bearing system from contamination. Metal surfaces are protected with an attractive clear anodized finish. Both metric (standard) and English mounting and bolt-hole patterns are available.

High Accuracy

The ATS100 sets the standard for precision performance in a compact package. With the -PL2 option, the ATS100 is capable of submicron accuracy and an impressive repeatability of 0.3 µm.

Motors and Drives

Included with the ATS100 series stages are Aerotech's BMS series brushless rotary motors. This motor has all of the advantages of a brushless motor – high acceleration, no brushes to wear and lower heating – yet has zero cogging for extremely smooth motion and accuracy. Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.

Options

Standard options include a precision right-angle bracket for multi-axis assembly and vacuum preparation to 10-6 torr.

Specifications

ATS100 Specifications

ModelATS100-050 ATS100-100 ATS100-150 ATS100-200
Travel 50 mm 100 mm 150 mm 200 mm
Maximum Travel Speed(1) 100 mm/s
Maximum Load(2) Horizontal 25.0 kg
Vertical 10.0 kg
Side 10.0 kg
Accuracy Calibrated(3) ±0.5 µm ±0.5 µm ±0.75 µm ±1.0 µm
Standard ±2.0 µm ±3.0µm ±5.0 µm ±6.0 µm
Repeatability (Bidirectional) Calibrated(3) ±0.3 µm
Standard ±0.7 µm
Straightness and Flatness Differential HALSF 1.0 µm/25 mm
Standard 2.0 µm/25 mm
Maximum
Deviation
HALSF ±0.5 µm ± 1.0 µm ±1.5 µm ±1.75 µm
Standard ±1.0 µm ±2.0 µm ±2.0 µm ±3.0 µm
Pitch and Yaw 5 arc sec 8 arc sec 10 arc sec 12 arc sec
Nominal Stage Weight Less Motor 1.6 kg 1.7 kg 1.8 kg 2.0 kg
With Motor 2.7 kg 2.8 kg 2.9 kg 3.1 kg
Construction Aluminum Body/Stage and Table; Clear Anodize Finish
  1. Excessive duty cycle may impact stage accuracy.
  2. Payload specifications are for single axis systems and based on ball screw and bearing life of 2500 km (100 million inches) of travel.
  3. Available with Aerotech controllers.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • ATS100 Cantilevered Load Graph

Dimensions

  • ATS100
  • HDZ1 Bracket
  • MP100 Mounting Plate

Ordering Information

ATS100 Series Mechanical-Bearing Screw-Driven Linear Stage

Travel (Required)

Option Description
-050 50 mm
-100 100 mm
-150 150 mm
-200 200 mm

Vacuum Preparation (Required)

Option Description
-HV High vacuum preparation to 10^-6 Torr

Tabletop (Required)

Option Description
-TT1 Tabletop with metric dimension mounting pattern and holes
-TT2 Tabletop with English dimension mounting pattern and holes

Motor (Optional)

Option Description
-M1 BMS60 servomotor w/2500-line TTL encoder
-M2 BMS60 servomotor w/2500-line TTL encoder and holding brake
-M3 BMS60 servomotor w/1000-line 1 Vpp encoder
-M4 BMS60 servomotor w/1000-line 1 Vpp encoder and holding brake
-M5 BM75 servomotor w/2500-line TTL encoder
-M6 BM75 servomotor w/2500-line TTL encoder and holding brake
-M7 BM75 servomotor w/1000-line 1 Vpp encoder
-M8 BM75 servomotor w/1000-line 1 Vpp encoder and holding brake
-M9 SM60 stepper motor, SM60-CN1-VT2
-M10 SM60 stepper motor w/holding brake, SM60-CN1-VT2-BK

Foldback (Optional)

Option Description
-FB1 Foldback kit for .250 inch diameter shaft NEMA 23 motor
-FB2 Foldback kit w/brake for .250 inch diameter shaft NEMA 23 motor

Motor Orientation (Optional)

Option Description
-2 Bottom cable exit, optional orientation
-3 Left-side cable exit, standard orientation
-4 Top cable exit, optional orientation
-5 Right-side cable exit, optional orientation
-8 Right-side foldback, standard orientation
-12 Left-side foldback, optional orientation

Limits (Required)

Option Description
-LI1 Normally-closed limit switches; 5 VDC with 9-pin D connector
-LI2 Normally-open limit switches; 5 VDC with 9-pin D connector
-LI3 Normally-open limit switches, 9-pin D connector
-LI4 Normally-open limit switches, flying leads

Coupling (Optional)

Option Description
-CP1 Coupling for 0.250 inch diameter shaft
-CP2 Coupling for 0.375 inch diameter shaft

Mounting Plate (Optional)

Option Description
-MP1 Mounting plate, metric
-MP2 Mounting plate, English

Metrology (Optional)

Option Description
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots

Metrology - HALSF (Optional)

Option Description
-PL5 Metrology, horizontal/vertical straightness correction (HALSF)

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system

Accessories (to be ordered as a separate line item)

Option Description
ALIGN-NPA Non-precision XY assembly
ALIGN-NPAZ Non-precision XZ or YZ assembly
ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages.
ALIGN-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonality. Alignment to within 10 microns orthogonality for short travel stages.
ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages.
ALIGN-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonality. Alignment to within 5 microns orthogonality for short travel stages.
HDZ2-AP1500 English right angle L-bracket - for ATS1500-100 and ATS1500-200 only
HDZ2M-AP1500 Metric right angle L-bracket - for ATS1500-100 and ATS1500-200 only