ANT95L Series Single-Axis Linear Direct-Drive Nanopositioning Stages
Description
Design Features
- Nanometer-level performance in a large travel format
- High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm)
- In-position stability of <1 nm
- Anti-creep crossed-roller bearings
- High dynamic performance
Introduction
Aerotech’s ANT95L series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95L and ANT95L-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability and size, and are offered in two accuracy grades. These linear stages exhibit up to 5 g acceleration, 500 mm/s velocity, enhanced load capacity and are available with standardized, universal base mounting patterns that allow their use in a wide range of configurations.
Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95L stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. The unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT95L family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations.
System Characteristics
Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT95L stage’s industry-leading 1 nm minimum incremental step size provides this high level of performance. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.
Specifications
Mechanical Specifications
Model | ANT95L-025 | ANT95L-050 | |
---|---|---|---|
Travel | 25 mm | 50 mm | |
Accuracy(1) | Base | ±2.5 µm (±100 µin) | ±2.5 µm (±100 µin) |
PLUS | ±250 nm (±10 µin) | ±250 nm (±10 µin) | |
Resolution (Minimum Incremental Motion) | 1 nm (0.04 µin) | 1 nm (0.04 µin) | |
Repeatability (Bidirectional)(1) | Base | ±100 nm (±4 µin) | ±100 nm (±4 µin) |
PLUS | ±75 nm (±3 µin) | ±75 nm (±3 µin) | |
Repeatability (Unidirectional) | ±25 nm (±1 µin) | ±25 nm (±1 µin) | |
Straightness(1) | ±1.0 µm (±40 µin) | ±1.0 µm (±40 µin) | |
Flatness(1) | ±1.0 µm (±40 µin) | ±1.0 µm (±40 µin) | |
Pitch | 10 arc sec | 10 arc sec | |
Roll | 10 arc sec | 10 arc sec | |
Yaw | 5 arc sec | 5 arc sec | |
Maximum Speed | 500 mm/s (20 in/s) | 500 mm/s (20 in/s) | |
Maximum Acceleration | 5 g (no load) | 4 g (no load) | |
Speed Stability | See graph for typical performance | ||
Settling Time | See graph for typical performance | ||
In-Position Stability(2) | <1 nm (<0.04 µin) | <1 nm (<0.04 µin) | |
Maximum Force (Continuous) | 7.75 N | 9.5 N | |
Load Capacity(3) | Horizontal | 5.0 kg (11 lb) | 7.0 kg (15.4 lb) |
Side | 5.0 kg (11 lb) | 5.0 kg (11 lb) | |
Moving Mass | 0.46 kg (1.0 lb) | 0.52 kg (1.1 lb) | |
Stage Mass | 0.8 kg (1.8 lb) | 1.2 kg (2.7 lb) | |
Material | Aluminum body/black hardcoat finish | ||
MTBF (Mean Time Between Failure) | 30,000 hours |
- Certified with each stage.
- In-Position Jitter listing is 3 sigma value.
- Axis orientation for on-axis loading is listed.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- -PLUS requires the use of an Aerotech controller.
Model | ANT95L-075 | ANT95L-100 | |
---|---|---|---|
Travel | 75 mm | 100 mm | |
Accuracy(1) | Base | ±4.0 µm (±160 µin) | ±5.0 µm (±200 µin) |
PLUS | ±275 nm (±11 µin) | ±275 nm (±11 µin) | |
Resolution (Minimum Incremental Motion) | 1 nm (0.04 µin) | 1 nm (0.04 µin) | |
Repeatability (Bidirectional)(1) | Base | ±100 nm (±4 µin) | ±100 nm (±4 µin) |
PLUS | ±75 nm (±3 µin) | ±75 nm (±3 µin) | |
Repeatability (Unidirectional) | ±25 nm (±1 µin) | ±25 nm (±1 µin) | |
Straightness(1) | ±2.0 µm (±80 µin) | ±2.5 µm (±80 µin) | |
Flatness(1) | ±2.0 µm (±80 µin) | ±2.5 µm (±80 µin) | |
Pitch | 10 arc sec | 10 arc sec | |
Roll | 10 arc sec | 10 arc sec | |
Yaw | 5 arc sec | 5 arc sec | |
Maximum Speed | 500 mm/s (20 in/s) | 500 mm/s (20 in/s) | |
Maximum Acceleration | 3 g (no load) | 3 g (no load) | |
Speed Stability | See graph for typical performance | ||
Settling Time | See graph for typical performance | ||
In-Position Stability(2) | <1 nm (<0.04 µin) | <1 nm (<0.04 µin) | |
Maximum Force (Continuous) | 9.5 N | 12.9 N | |
Load Capacity(3) | Horizontal | 7.0 kg (15.4 lb) | 7.0 kg (15.4 lb) |
Side | 5.0 kg (11 lb) | 5.0 kg (11 lb) | |
Moving Mass | 0.72 kg (1.6 lb) | 0.91 kg (2.0 lb) | |
Stage Mass | 1.64 kg (3.6 lb) | 2.1 kg (4.6 lb) | |
Material | Aluminum body/black hardcoat finish | ||
MTBF (Mean Time Between Failure) | 30,000 hours |
- Certified with each stage.
- In-Position Jitter listing is 3 sigma value.
- Axis orientation for on-axis loading is listed.
- Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- -PLUS requires the use of an Aerotech controller.
Electrical Specifications | ANT95L |
---|---|
Drive System | Brushless Linear Servomotor |
Feedback | Noncontact Linear Encoder |
Maximum Bus Voltage | ±40 VDC |
Limit Switches | 5 V, Normally Closed |
Home Switch | Near Center |
Recommended Controller | ANT95L | |
---|---|---|
Multi-Axis | A3200 | Npaq MXR Npaq MR-MXH Npaq ML-MXH |
Ensemble | Epaq MXH Epaq MR-MXH Ensemble ML-MXH |
|
Single Axis | Soloist | Soloist ML-MXH |
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.
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Step Plot -
Performance Graphs

Dimensions
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ANT95L-025 Enlarge Image
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ANT95L-050 Enlarge Image
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ANT95L-075 Enlarge Image
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ANT95L-100 Enlarge Image
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Mounting Plates: ANT95-25-L/ANT95-25-L-PLUS Enlarge Image
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Mounting Plates: ANT95-50-L/ANT95-50-L-PLUS Enlarge Image
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Mounting Plates: ANT95-75-L/ANT95-75-L-PLUS Enlarge Image
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Mounting Plates: ANT95-100-L/ANT95-100-L-PLUS Enlarge Image
Ordering Information
ANT95L Single-Axis Linear Direct-Drive Nanopositioning Stage
Travel (Required)
Option | Description |
---|---|
-025 | 25 mm travel |
-050 | 50 mm travel |
-075 | 75 mm travel |
-100 | 100 mm travel |
Mounting Plate (Optional)
Option | Description |
---|---|
-MP | Mounting plate |
Performance Grade (Required)
Option | Description |
---|---|
-PL1 | Base performance |
-PL2 | High-accuracy performance, PLUS |
Integration (Required)
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
Option | Description |
---|---|
-TAS | Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration. |
-TAC | Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system. |