ANT95L Series Single-Axis Linear Direct-Drive Nanopositioning Stages

Description

Design Features

  • Nanometer-level performance in a large travel format
  • High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm)
  • In-position stability of <1 nm
  • Anti-creep crossed-roller bearings
  • High dynamic performance

Introduction

Aerotech’s ANT95L series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95L and ANT95L-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability and size, and are offered in two accuracy grades. These linear stages exhibit up to 5 g acceleration, 500 mm/s velocity, enhanced load capacity and are available with standardized, universal base mounting patterns that allow their use in a wide range of configurations.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95L stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. The unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT95L family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations.

System Characteristics

Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT95L stage’s industry-leading 1 nm minimum incremental step size provides this high level of performance. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Specifications

Mechanical Specifications

ModelANT95L-025ANT95L-050
Travel 25 mm 50 mm
Accuracy(1) Base ±2.5 µm (±100 µin) ±2.5 µm (±100 µin)
PLUS ±250 nm (±10 µin) ±250 nm (±10 µin)
Resolution (Minimum Incremental Motion) 1 nm (0.04 µin) 1 nm (0.04 µin)
Repeatability (Bidirectional)(1) Base ±100 nm (±4 µin) ±100 nm (±4 µin)
PLUS ±75 nm (±3 µin) ±75 nm (±3 µin)
Repeatability (Unidirectional) ±25 nm (±1 µin) ±25 nm (±1 µin)
Straightness(1) ±1.0 µm (±40 µin) ±1.0 µm (±40 µin)
Flatness(1) ±1.0 µm (±40 µin) ±1.0 µm (±40 µin)
Pitch 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec
Maximum Speed 500 mm/s (20 in/s) 500 mm/s (20 in/s)
Maximum Acceleration 5 g (no load) 4 g (no load)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
In-Position Stability(2) <1 nm (<0.04 µin) <1 nm (<0.04 µin)
Maximum Force (Continuous) 7.75 N 9.5 N
Load Capacity(3) Horizontal 5.0 kg (11 lb) 7.0 kg (15.4 lb)
Side 5.0 kg (11 lb) 5.0 kg (11 lb)
Moving Mass 0.46 kg (1.0 lb) 0.52 kg (1.1 lb)
Stage Mass 0.8 kg (1.8 lb) 1.2 kg (2.7 lb)
Material Aluminum body/black hardcoat finish
MTBF (Mean Time Between Failure) 30,000 hours
  1. Certified with each stage.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  • Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • -PLUS requires the use of an Aerotech controller.
ModelANT95L-075ANT95L-100
Travel 75 mm 100 mm
Accuracy(1) Base ±4.0 µm (±160 µin) ±5.0 µm (±200 µin)
PLUS ±275 nm (±11 µin) ±275 nm (±11 µin)
Resolution (Minimum Incremental Motion) 1 nm (0.04 µin) 1 nm (0.04 µin)
Repeatability (Bidirectional)(1) Base ±100 nm (±4 µin) ±100 nm (±4 µin)
PLUS ±75 nm (±3 µin) ±75 nm (±3 µin)
Repeatability (Unidirectional) ±25 nm (±1 µin) ±25 nm (±1 µin)
Straightness(1) ±2.0 µm (±80 µin) ±2.5 µm (±80 µin)
Flatness(1) ±2.0 µm (±80 µin) ±2.5 µm (±80 µin)
Pitch 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec
Maximum Speed 500 mm/s (20 in/s) 500 mm/s (20 in/s)
Maximum Acceleration 3 g (no load) 3 g (no load)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
In-Position Stability(2) <1 nm (<0.04 µin) <1 nm (<0.04 µin)
Maximum Force (Continuous) 9.5 N 12.9 N
Load Capacity(3) Horizontal 7.0 kg (15.4 lb) 7.0 kg (15.4 lb)
Side 5.0 kg (11 lb) 5.0 kg (11 lb)
Moving Mass 0.72 kg (1.6 lb) 0.91 kg (2.0 lb)
Stage Mass 1.64 kg (3.6 lb) 2.1 kg (4.6 lb)
Material Aluminum body/black hardcoat finish
MTBF (Mean Time Between Failure) 30,000 hours
  1. Certified with each stage.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  • Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • -PLUS requires the use of an Aerotech controller.
Electrical SpecificationsANT95L
Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended ControllerANT95L
Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Npaq ML-MXH
Ensemble Epaq MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH

 

  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

  • Step Plot
  • Performance Graphs

Dimensions

Ordering Information

ANT95L Single-Axis Linear Direct-Drive Nanopositioning Stage

Travel (Required)

Option Description
-025 25 mm travel
-050 50 mm travel
-075 75 mm travel
-100 100 mm travel

Mounting Plate (Optional)

Option Description
-MP Mounting plate

Performance Grade (Required)

Option Description
-PL1 Base performance
-PL2 High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.