ANT95-L Series Single-Axis Linear Direct-Drive Nanopositioning Stages

Description

Design Features

  • Nanometer-level performance in a large travel format
  • High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm)
  • In-position stability of <1 nm
  • Anti-creep crossed-roller bearings
  • High dynamic performance

Introduction

Aerotech’s ANT95-L series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT95-L and ANT95-L-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability and size, and are offered in two accuracy grades. These linear stages exhibit up to 5 g acceleration, 500 mm/s velocity, enhanced load capacity and are available with standardized, universal base mounting patterns that allow their use in a wide range of configurations.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95-L stages utilise advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. The unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fibre alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT95-L family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations.

System Characteristics

Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT95-L stage’s industry-leading 1 nm minimum incremental step size provides this high level of performance. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Specifications

Mechanical Specifications

ModelANT95-25-LANT95-25-L-PLUSANT95-50-LANT95-50-L-PLUS
Travel 25 mm 25 mm 50 mm 50 mm
Accuracy(1) ±2.5 µm ±250 nm ±2.5 µm ±250 nm
Resolution 1 nm 1 nm 1 nm 1 nm
Repeatability (Bidirectional)(1) ±100 nm ±75 nm ±100 nm ±75 nm
Repeatability (Unidirectional) ±25 nm ±25 nm ±25 nm ±25 nm
Straightness(1) ±1.0 µm ±1.0 µm ±1.0 µm ±1.0 µm
Flatness(1) ±1.0 µm ±1.0 µm ±1.0 µm ±1.0 µm
Pitch 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec 5 arc sec 5 arc sec
Maximum Speed 500 mm/s 500 mm/s 500 mm/s 500 mm/s
Maximum Acceleration 5 g (No Load) 5 g (No Load) 4 g (No Load) 4 g (No Load)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
In-Position Stability(2) <1 nm <1 nm <1 nm <1 nm
Maximum Force (Continuous) 7.75 N 7.75 N 9.5 N 9.5 N
Load Capacity(3) Horizontal 5.0 kg 5.0 kg 7.0 kg 7.0 kg
Side 5.0 kg 5.0 kg 5.0 kg 5.0 kg
Moving Mass 0.46 kg 0.46 kg 0.52 kg 0.52 kg
Stage Mass 0.8 kg 0.8 kg 1.2 kg 1.2 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  • Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • -PLUS requires the use of an Aerotech controller.
ModelANT95-75-LANT95-75-L-PLUSANT95-100-LANT95-100-L-PLUS
Travel 75 mm 75 mm 100 mm 100 mm
Accuracy(1) ±4.0 µm ±275 nm ±5.0 µm ±275 nm
Resolution 1 nm 1 nm 1 nm 1 nm
Repeatability (Bidirectional)(1) ±100 nm ±75 nm ±100 nm ±75 nm
Repeatability (Unidirectional) ±25 nm ±25 nm ±25 nm ±25 nm
Straightness(1) ±2.0 µm ±2.0 µm ±2.5 µm ±2.5 µm
Flatness(1) ±2.0 µm ±2.0 µm ±2.5 µm ±2.5 µm
Pitch 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec 5 arc sec 5 arc sec
Maximum Speed 500 mm/s 500 mm/s 500 mm/s 500 mm/s
Maximum Acceleration 3 g (No Load) 3 g (No Load) 3 g (No Load) 3 g (No Load)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
In-Position Stability(2) <1 nm <1 nm <1 nm <1 nm
Maximum Force (Continuous) 9.5 N 9.5 N 12.9 N 12.9 N
Load Capacity(3) Horizontal 7.0 kg 7.0 kg 7.0 kg 7.0 kg
Side 5.0 kg 5.0 kg 5.0 kg 5.0 kg
Moving Mass 0.72 kg 0.72 kg 0.91 kg 0.91 kg
Stage Mass 1.64 kg 1.64 kg 2.1 kg 2.1 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  • Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • -PLUS requires the use of an Aerotech controller.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

  • Step Plot
  • Performance Graphs

Dimensions

  • ANT95-25-L/ANT95-25-L-PLUS
  • ANT95-50-L/ANT95-50-L-PLUS
  • ANT95-75-L/ANT95-75-L-PLUS
  • ANT95-100-L/ANT95-100-L-PLUS
  • Mounting Plates: ANT95-25-L/ANT95-25-L-PLUS
  • Mounting Plates: ANT95-50-L/ANT95-50-L-PLUS
  • Mounting Plates: ANT95-75-L/ANT95-75-L-PLUS
  • Mounting Plates: ANT95-100-L/ANT95-100-L-PLUS

Ordering Information

ANT95-L Series Linear Stage

Option Description
ANT95-L/ANT95-L-PLUS Aerotech nanotranslation crossed-roller linear positioner

Linear Stage Travel

Option Description
ANT95-25-L 25 mm (1 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits
ANT95-25-L-PLUS 25 mm (1 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
ANT95-50-L 50 mm (2 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits
ANT95-50-L-PLUS 50 mm (2 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
ANT95-75-L 75 mm (3 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits
ANT95-75-L-PLUS 75 mm (3 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
ANT95-100-L 100 mm (4 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits
ANT95-100-L-PLUS 100 mm (4 in) travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)

Options

Option Description
-MP Breadboard mounting plate
-AP XY adapter plate (6 mm thick; ANT95-50-L and ANT95-50-L-PLUS only)