ANT180-L Mechanical-Bearing Direct-Drive Linear Stage

Description

Design Features

  • Noncontact, non-cogging, frictionless direct-drive
  • Zero backlash or hysteresis
  • High resolution, repeatability and accuracy
  • Anti-creep crossed-roller bearings
  • Travel to 360 mm
  • Integral cable management for multi-axis systems

The ANT180-L continues the expansion of Aerotech’s line of high precision crossed-roller-bearing stages. With its nanometer resolution, superior bi-directional repeatability and exceptional low-velocity performance, it is the ultimate solution for high-accuracy alignment, measurement, scanning and other demanding applications.

Noncontact Direct-Drive

The ANT180-L is driven by a high-power linear motor with ironless forcer and U-channel magnet track. The direct-drive linear motor drives the stage to a peak unloaded acceleration of 2 g and maximum velocity of 500 mm/s. Because the forcer is ironless, it is a cog-free design that provides exceptional velocity control.

Outstanding Resolution

The direct-drive linear motor and high-accuracy linear encoder make possible outstanding step-to-step resolution when coupled with an Aerotech control system. This is critical in spectroscopy, optical delay line and other applications. Furthermore, the linear motor and high resolution linear encoder system also provide excellent in-position stability.

Superior Geometry for High Performance

Its large cross-section provides a robust and stable base axis for multi-axis systems. Aerotech’s ultra-stiff construction and compact two-piece design result in a stage with unparalleled geometric tolerances. As a result, the straightness and flatness typically are <±1 μm over the entire travel.

Designed for smooth, vibration-free motion, the ANT180-L utilizes precision anti-cage-creep crossed-roller bearings for outstanding smoothness of motion. Since neither the bearing system nor the drive system utilize any recirculating elements, the ANT180-L exhibits the outstanding ripple-free motion required for scanning and inspection applications.

Precision Alignment and Cable Management

ANT180-L series stages are easily configured into XY and other multi-axis assemblies. Precision orthogonality alignment to 5 arc seconds and multi-axis cable management systems (CMS) are standard options. We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate incorporation into the final system. Both ends are fully connectorized for simple integration into the customer’s machine.

Specifications

Mechanical Specifications

ModelANT180-160-LANT180-210-LANT180-260-LANT180-360-L
Travel 160 mm 210 mm 260 mm 360 mm
Accuracy(1) LNAS PLUS ±150 nm ±150 nm ±200 nm ±200 nm
Standard ±2.0 µm ±2.5 µm ±3.0 µm ±3.5 µm
LTAS PLUS ±300 nm ±300 nm ±350 nm ±350 nm
Standard ±4.0 µm ±5.0 µm ±6.0 µm ±7.0 µm
Resolution LNAS 1 nm 1 nm 1 nm 1 nm
LTAS 3 nm 3 nm 3 nm 3 nm
Repeatability
(BiDirectional) (1)
LNAS ±100 nm ±100 nm ±125 nm ±125 nm
LTAS ±150 nm ±150 nm ±175 nm ±175 nm
Straightness(1) ±1.0 µm ±1.25 µm ±1.5 µm ±1.75 µm
Flatness(1) ±1.0 µm ±1.25 µm ±1.5 µm ±1.75 µm
Pitch 14 arc sec 14 arc sec 16 arc sec 16 arc sec
Roll 14 arc sec 14 arc sec 16 arc sec 16 arc sec
Yaw 10 arc sec 10 arc sec 12 arc sec 12 arc sec
Maximum Speed 500 mm/s 500 mm/s 500 mm/s 500 mm/s
Maximum Acceleration 2 g (No Load) 2 g (No Load) 2 g (No Load) 2 g (No Load)
Speed Stability See graph for typical performance
Settling Time See graph for typical performance
Maximum Force (Continuous) 110.5 N 110.5 N 110.5 N 110.5 N
Load Capacity(2) Horizontal 30 kg 30 kg 30 kg 30 kg
Side 20 kg 20 kg 20 kg 20 kg
Moving Mass 6.6 kg 7.8 kg 9.2 kg 11.7 kg
Stage Mass 12.8 kg 14.9 kg 17.6 kg 22.4 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. Axis orientation for on-axis loading is listed.
  3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  4. -PLUS requires the use of an Aerotech controller.
  5. Specifications are LNAS and LTAS only. Consult factory for specifications regarding the LTX50 option.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder (see signal period options on Order Information page)
Maximum Bus Voltage ±80 VDC
Limit Switches 5 V, Normally Open
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

  • ANT180-L

Dimensions

  • ANT180-L

Ordering Information

ANT180-L Series Linear Motor Stage

Option Description
ANT180-160-L 160 mm travel stage with linear motor and limits
ANT180-210-L 210 mm travel stage with linear motor and limits
ANT180-260-L 260 mm travel stage with linear motor and limits
ANT180-360-L 360 mm travel stage with linear motor and limits

Standard Linear Encoders

Option Description
-LTAS Amplified sine output 1 Vpp (20 μm signal period) requires signal multiplier
-LTX50 0.1 micron line driver output

High-Accuracy Linear Encoders

Option Description
-LNAS High-accuracy amplified sine output 1 Vpp (4 μm signal period) requires signal multiplier

CMS - Cable Management

Option Description
-XY Cable management system for X-Y assembly (only order with X axis)
-XY-AIR Cable management system for X-Y assembly with 6 mm air line (only order with X axis)
-XYZ Cable management system for X-Y-Z assembly (only order with X axis)
-XYZ-AIR Cable management system for X-Y-Z assembly with 6 mm air line (only order with X axis)
-Y Cable management system for X-Y assembly (only order with Y axis)
-Y-AIR Cable management system for X-Y assembly with 6 mm air line (only order with Y axis)
-YZ Cable management system for Y-Z assembly (only order with Y axis)
-YZ-AIR Cable management system for Y-Z assembly with 6 mm air line (only order with Y axis)

Accessories (to be ordered as separate line item)

Option Description
PLUS High-accuracy version
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal