ALS2200 Mechanical-Bearing Direct-Drive Linear Stage

Description

Design Features

  • Fully enclosed design
  • Exceptionally smooth and cog-free motion
  • Powerful linear brushless servomotor
  • High accuracy and up to 3 nm resolution
  • Outstanding straightness/flatness

By combining a powerful linear motor drive with high-accuracy crossed-roller bearings and a fully sealed system, the ALS2200 is a production-grade stage with exceptional performance.

Superior Construction

Designed for applications requiring exceptional smoothness of travel, the ALS2200 utilizes precision crossed-roller bearings. Since there are no recirculating elements, vibration throughout travel is minimized resulting in outstanding velocity stability. Machined from a stress-relieved special aluminum-alloy extruded base, the ALS2200 has excellent stiffness and long-term stability.

Linear Motor Drive

The ALS2200 utilizes an ironless core so it is a cog-free design. The lack of cogging enables extremely tight velocity control, as well as superior contour motion profiles. As with all of Aerotech’s ALS series stages, there is zero backlash, no windup, zero friction and outstanding system responsiveness.

Outstanding Resolution

Many applications require outstanding step-to-step resolution. The ALS2200 meets this demand with a resolution of 3 nm when coupled with Aerotech control products. The direct-drive linear motor allows the ALS2200 to make precise, small resolution steps that are particularly important in alignment applications where step accuracy is critical.

Enclosed Design

To protect the stage from debris and particulates, the ALS2200 incorporates a full-length metal waycover and advanced sealing system. Tensioned side straps are used in lieu of bellows which are difficult to keep clean and increase the overall stage profile. The straps are in a vertical orientation that prevents debris from accumulating and the straps are under constant tension to create a tight seal.

Convenient Assembly

The tabletop of the ALS2200 is treated with a protective, scratch-resistant, Teflon®-impregnated hardcoat (Rockwell 62 hardness). All of the tabletop mounting holes utilize stainless-steel Helicoil® inserts to protect against thread wear. The base mounting holes are located outboard of the stage, which allows the stage to be mounted without removing the hardcover.

The ALS2200 utilizes a moving magnet design in the linear-motor drive mechanism. As a result, there are no moving cables and therefore no cable management system, simplifying system interconnection.

ALS2200slide

Specifications

Mechanical Specifications

ModelALS22010ALS22015
Travel 100 mm 150 mm
Accuracy(1) Standard ±4.0 µm ±6.0 µm
HALAR ±0.75 µm
Resolution 3 nm
Repeatability(1) (Bidirectional) ±0.2 µm
Repeatability(1) (Unidirectional) ±0.1 µm
Straightness(1) ±1.5 µm ±2.0 µm
Flatness(1) ±1.5 µm ±2.0 µm
Pitch 10 arc sec 14 arc sec
Roll 10 arc sec 14 arc sec
Yaw 8 arc sec 10 arc sec
Maximum Speed 500 mm/s
Maximum Acceleration 1 g
Maximum Force (Continuous) 32.4 N
Load Capacity(2) Horizontal 30 kg
Side 30 kg
Moving Mass 6.4 kg 7.4 kg
Stage Mass 14 kg 16 kg
Material Aluminum
MTBF (Mean Time Between Failure) 20,000 Hours
  1. Certified with each stage.
  2. Axis orientation for on-axis loading is listed.
  3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage 320 VDC
Limit Switches 5 V, Normally Closed/Normally Open
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Ndrive MP/Ndrive CP/Ndrive HPe/Ndrive HLe
Ensemble

Ensemble MP/Ensemble CP/Ensemble HPe/Ensemble HLe

Single Axis Soloist Soloist MP/Soloist CP/Soloist HPe/Soloist HLe

Dimensions

  • ALS2200 Dimensions

Ordering Information

Ordering Example

ALS2200 -015 -M -NC

Ordering Options

Series Travel (mm) Mounting and Grid PatternLimits
ALS2200 -010
-015
-M -NC
-NO

ALS2200 Series Linear Motor Stage

Option Description
ALS22010 100 mm (4 in) travel stage with linear motor, crossed-roller bearings and limits
ALS22015 150 mm (6 in) travel stage with linear motor, crossed-roller bearings and limits

Mounting and Grid Pattern

Option Description
-M Metric dimension mounting pattern and holes

Limits

Option Description
-NC Normally-closed end of travel limit switches (standard)
-NO Normally-open end of travel limit switches

Accessories (to be ordered as separate line item)

Option Description
HALAR High accuracy system; linear error correction for accuracy and repeatability
HALSF High accuracy system; improved straightness and flatness
ALIGNMENT-NPA Non-precision XY assembly
ALIGNMENT-PA10 XY assembly; 10 arc second orthogonal
ALIGNMENT-PA5 XY assembly; 5 arc second orthogonal