ALS135 Mechanical-Bearing Direct-Drive Linear Stage
Description
Design Features
- Direct-drive linear motor for ultra-precise motion
- High-accuracy noncontact linear encoder
- Outstanding performance in a small footprint
The ALS135, with its low profile and outstanding performance characteristics, is the ultimate solution for high-accuracy alignment and inspection stations.
Linear Motor Drive
Unlike many stages that utilize a side-drive lead screw, the ALS135 employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device there is no backlash, windup or “stiction” that is normally associated with a lead screw or ball screw drive.
The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS135 to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.
Outstanding Resolution
For alignment applications, outstanding step-to-step resolution is critical. The ALS135 meets this demand with a resolution of 2.5 nm when coupled with Aerotech controls. The direct-drive linear motor allows the ALS135 to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.
Superior Geometry
Aerotech’s ultra-stiff construction and compact two-piece design results in a stage with unmatched geometric tolerances. As a result, straightness and flatness for the standard stage is <±2 μm over the entire travel. The effects of Abbe error are nearly eliminated, vastly improving overall system accuracy.
Smooth Travel
Designed for smooth, vibration-free motion, the ALS135 exhibits the outstanding ripple-free motion required for scanning and inspection applications.
Designed for Long Life
Like all stages in the Aerotech product family, the ALS135 was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices — they not only exhibit long-life, but are completely maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.
Precision Alignment
ALS135 series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to 5 arc seconds and available vertical axis solutions.
Specifications
Mechanical Specifications
| Model | ALS135-025 | ALS135-050 | ALS135-100 | ALS135-150 | ALS135-200 | |
|---|---|---|---|---|---|---|
| Travel | 25 mm | 50 mm | 100 mm | 150 mm | 200 mm | |
| Drive System | Linear Brushless Servomotor (BLMUC-95-A) | |||||
| Bus Voltage | Up to 80 VDC with a single 25-pin D connector; Up to 160 VDC with split feedback and power – two 25-pin D connectors |
|||||
| Continuous Current | Apk | 2.94 | ||||
| Arms | 2.08 | |||||
| Feedback | Noncontact Linear Encoder | |||||
| Resolution | 0.0025 µm - 1.0 µm | |||||
| Maximum Travel Speed(1) | 300 mm/s | |||||
| Maximum Linear Acceleration | 1 g (No Load) | |||||
| Maximum Load(2) | Horizontal | 15.0 kg | ||||
| Side | 10.0 kg | |||||
| Accuracy | HALAR(3) | ±0.3 µm | ||||
| Standard | ±2.0µm | ±2.0 µm | ±4.0 µm | ±6.0 µm | ±8.0 µm | |
| Repeatability(3) | ±100 nm | |||||
| Straightness and Flatness | Maximum Deviation | ±1 µm | ±1.5 µm | ±1.5 µm | ±2 µm | ±2 µm |
| Pitch | ±5 arc sec | ±6 arc sec | ±8 arc sec | ±10 arc sec | ±12 arc sec | |
| Roll | ±5 arc sec | ±6 arc sec | ±8 arc sec | ±10 arc sec | ±12 arc sec | |
| Yaw | ±5 arc sec | ±5 arc sec | ±6 arc sec | ±7 arc sec | ±9 arc sec | |
| Nominal Stage Weight | 2.8 kg | 3.0 kg | 3.8 kg | 4.6 kg | 5.4 kg | |
| Moving Mass | 0.9 kg | 1 kg | 1.2 kg | 1.4 kg | 1.6 kg | |
| Construction | Aluminum Body/Black Anodize Finish | |||||
- Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution.
- Maximum load based on bearing capability. Maximum application load may be limited by acceleration requirements.
- Value with Aerotech controls and HAL option.
- Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
Dimensions
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ALS135 
Ordering Information
Ordering Example
| ALS135 | -100 | -NC | -LT10X50 | -25DU |
Ordering Options
| Series | Travel (mm) | Limits | Linear Encoder | Ouput Cable Connectors |
|---|---|---|---|---|
| ALS135 | -025 -050 -100 -150 -200 |
-NC -NO |
-LTnnAS -LTnnX5 -LTnnX50 |
-25DU -4DU-25DU |
ALS135 Series Linear Motor Stage
| Option | Description |
|---|---|
| ALS135-025 | 25 mm (1 in) travel stage with linear motor and limits |
| ALS135-050 | 50 mm (2 in) travel stage with linear motor and limits |
| ALS135-100 | 100 mm (4 in) travel stage with linear motor and limits |
| ALS135-150 | 150 mm (6 in) travel stage with linear motor and limits |
| ALS135-200 | 200 mm (8 in) travel stage with linear motor and limits |
Limits
| Option | Description |
|---|---|
| -NC | Normally-closed end of travel limit switches (standard) |
| -NO | Normally-open end of travel limit switches |
Linear Encoders
| Option | Description |
|---|---|
| -LTAS | Linear encoder for ALS135 with amplified sine read-head; requires external multiplier |
| -LTX5 | Linear encoder for ALS135 with 1.0 µm digital TTL output |
| -LTX50 | Linear encoder for ALS135 with 0.1 µm digital TTL output |
Note: Amplified sine output (LTAS) linear encoders require external multiplier. MX50 required for 0.1 micron resolution.
Accessories (to be ordered as separate line item)
| Option | Description |
|---|---|
| MXH5-D-mm(1) | External 20-times multiplier, 32 MHz maximum data rate, 1.0 µm (LTAS) |
| MXH10-D-mm(1) | External 40-times multiplier, 32 MHz maximum data rate, 0.5 µm (LTAS) |
| MXH25-D-mm(1) | External 100-times multiplier, 32 MHz maximum data rate, 0.2 µm (LTAS) |
| MXH50-D-mm(1) | External 200-times multiplier, 32 MHz maximum data rate, 0.1 µm (LTAS) |
| MXH100-D-mm(1) | External 400-times multiplier, 32 MHz maximum data rate, 0.05 µm (LTAS) |
| MXH200-D-mm(1) | External 800-times multiplier, 32 MHz maximum data rate, 0.025 µm (LTAS) |
| MXH250-D-mm(1) | External 1000-times multiplier, 32 MHz maximum data rate, 0.02 µm (LTAS) |
| MXH500-D-mm(1) | External 2000-times multiplier, 32 MHz maximum data rate, 0.01 µm (LTAS) |
| MXC-nn | Multiplier to controller cable; specify length '-nn' in feet |
| HALAR | High-accuracy system — linear error correction for accuracy and repeatability |
| HALSF | High-accuracy system — improved straightness and flatness |
| ALIGNMENT-NPA | Non-precision XY assembly |
| ALIGNMENT-PA10 | XY assembly; 10 arc sec orthogonal |
| ALIGNMENT-PA5 | XY assembly; 5 arc sec orthogonal |
- Specify data rate "mm" 2M=2 MHz, 4M=4 MHz, 8M=8 MHz, 16M=16 MHz, 32M=32 MHz.
Output Cable Connectors
| Option | Description |
|---|---|
| -25DU | Single 25-pin D connector (standard) |
| -4DU-25DU | 4-pin HPD and 25-pin D connectors |
Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V.