ABL8000 Air-Bearing Direct-Drive Linear Stage

Description

Design Features

  • Active air preload on all air-bearing surfaces
  • Travel to 1 meter
  • Linear encoder or laser interferometer feedback
  • High stiffness for heavy loads and excellent geometric performance
  • Integrated XY subsystems including granite

Leading-edge manufacturing, particularly in the semiconductor and data storage industries, demands positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL8000, with its air-on-air preload, exceptionally high stiffness and excellent geometric characteristics was designed specifically to meet those demands.

Air-Bearing Design

The ABL8000 incorporates an active preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.

Proprietary manufacturing techniques result in a stage with unsurpassed geometric characteristics. The air bearing has an inherent averaging effect that maximizes performance. The thin film will fill small surface voids and allow for other irregularities. This characteristic yields superior pitch, roll, yaw, straightness and flatness specifications.

Linear Motor Drive

The driving force behind this stage is Aerotech’s BLM series brushless linear servomotor. Aerotech’s long history and experience as a motor manufacturer is reflected in this design. The BLM utilizes an ironless forcer, which means there is zero cogging and no attractive forces – resulting in unsurpassed smoothness of motion. Capable of generating high force and velocity, the BLM represents the ultimate combination of power and performance.

Zero Maintenance

Our totally noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL8000 experiences no wear or reduction in performance over time. Service life is virtually unlimited and since there is no lubrication – only clean, dry gas – air bearings are ideal for clean room and medical applications.

Cable Management

We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime.

To facilitate integration into the final system, we include all customer-required cables, air hoses, etc. in our CMS bundle. Both ends are fully connectorized for simple integration into the customer’s machine.

Specifications

ABL8000 Specifications

ModelABL80020ABL80030ABL80040ABL80050ABL80075ABL80100
Total Travel(1) 200 mm 300 mm 400 mm 500 mm 750 mm 1000 mm
Accuracy(2) LN Standard ±5.0 µm ±6.0 µm ±7.0 µm
LT Standard ±8.0 µm ±11.5 µm ±14.0 µm ±15.75 µm ±18.5 µm ±20.0 µm
HALAR(3) ±0.5 µm ±0.75 µm ±1.0 µm
Bidirectional Repeatability(2) ±0.2 µm ±0.3 µm ±0.4 µm
Straightness(2) ±0.4 µm ±0.75 µm ±1.5 µm ±2.0 µm ±3.0 µm ±4.0 µm
Flatness(2) ±0.4 µm ±0.75 µm ±1.5 µm ±2.0 µm ±3.0 µm ±4.0 µm
Feedback Noncontact Linear Encoder (LN or LT) or Laser Interferometer
Pitch 2 arc sec 3 arc sec 4 arc sec 5 arc sec 7.5 arc sec 10 arc sec
Roll 2 arc sec 3 arc sec 4 arc sec 5 arc sec 7.5 arc sec 10 arc sec
Yaw 2 arc sec 3 arc sec 4 arc sec 5 arc sec 7.5 arc sec 10 arc sec
Maximum Speed(4) LN 1.2 m/s
LT 2 m/s
Maximum Acceleration 2 g (No Load)
Maximum Force, Continuous(5,6) -SC 110.5 N (-P Motor Option)
-LC 197.2 N (-P Motor Option)
Load Capacity(7) -SC Horizontal 70 kg
Side 30 kg
-LC Horizontal 120 kg
Side 50 kg
Operating Pressure(8) 517-551 kPa
Air Consumption(9) -SC 36 SLPM per Axis
-LC 58 SLPM per Axis
Moving Mass -SC 10 kg
-LC 16 kg
Stage Mass -SC 55 kg 62 kg 70.5 kg 78.5 kg 98 kg 116.5 kg
-LC 70 kg 77 kg 85.5 kg 93.5 kg 113 kg 131.5 kg
Material Aluminum
MTBF 30,000 Hours
  1. When mounting the ABL8000 in an XY configuration, the maximum upper axis length is 400 mm.
  2. Certified with each stage.
  3. Available with Aerotech controllers.
  4. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
  5. Thermal limitations of positioning stage with respect to performance may limit continuous force output.
  6. Force may be limited by amplifier output.
  7. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
  8. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
  9. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
  10. Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Electrical Specifications

Drive System -SC BLM-142-A
-LC BLM-264-A
Feedback LN Incremental Encoder; 4 µm Fundamental Period
LT Incremental Encoder; 20 µm Fundamental Period
Electronic Resolution See signal period options on Order Information
Maximum Bus Voltage 80 VDC
Limit Switches 5 V, Normally Open
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR
Ensemble Ensemble MP/Ensemble CP/Ensemble HLe/Epaq
Single Axis Soloist Soloist MP/Soloist CP/Soloist HLe
  • ABL8000-specs
  • abl8000-specs2

Dimensions

  • ABL8000-SC
  • ABL8000-LC

Ordering Information

Ordering Example

ABL80 030 -SC -M -S -NC -LN30AS -SINGLE-CMS

Ordering Options

Series TravelCarriageMounting and
Grid Pattern
MotorLimitsEncoder Resolution Options
ABL80 020
030
040
050
075
100
-SC
-LC
-M
-U
-P
-S
-NC
-NO
-LNxxAS
-LTxxAS
-SINGLE-CMS
-SINGLE-CUST.HOSE
-SINLGE-CUST.CABLE
-SINGLE-CUST.CABLE & HOSE
-XY-CMS
-XY-CUST.HOSE
-XY-CUST.CABLE
-XY-CUST.CABLE & HOSE

ABL8000 Series Linear Air-Bearing Stage

Option Description
ABL80020 200 mm (8 in) travel linear air-bearing stage with linear motor and limits
ABL80030 300 mm (12 in) travel linear air-bearing stage with linear motor and limits
ABL80040 400 mm (16 in) travel linear air-bearing stage with linear motor and limits
ABL80050 500 mm (20 in) travel linear air-bearing stage with linear motor and limits
ABL80075 750 mm (30 in) travel linear air-bearing stage with linear motor and limits
ABL80100 1000 mm (40 in) travel linear air-bearing stage with linear motor and limits

Carriage

Option Description
-SC 250 mm (10 in) length carriage (single-axis or y-axis use only)
-LC 400 mm (16 in) length carriage (required for x-axis in XY configuration)

Note: When mounting the ABL8000 in an XY configuration, the maximum upper axis length is 400 mm.

Mounting and Grid Pattern

Option Description
-M Metric dimension mounting pattern and holes
-U English dimension mounting pattern and holes

Motor

Option Description
-P MT-P magnet track
-S MT-S magnet track

Limits

Option Description
-NC Normally-closed end of travel limit switches (standard)
-NO Normally-open end of travel limit switches

Standard Linear Encoders

Option Description
-LT20AS Linear encoder for ABL80020; amplified sine output
-LT30AS Linear encoder for ABL80030; amplified sine output
-LT40AS Linear encoder for ABL80040; amplified sine output
-LT50AS Linear encoder for ABL80050; amplified sine output
-LT75AS Linear encoder for ABL80075; amplified sine output
-LT100AS Linear encoder for ABL80100; amplified sine output

High-Accuracy Linear Encoders

Option Description
-LN20AS High-accuracy linear encoder for ABL80020; amplified sine output
-LN30AS High-accuracy linear encoder for ABL80030; amplified sine output
-LN40AS High-accuracy linear encoder for ABL80040; amplified sine output
-LN50AS High-accuracy linear encoder for ABL80050; amplified sine output
-LN75AS High-accuracy linear encoder for ABL80075; amplified sine output
-LN100AS High-accuracy linear encoder for ABL80100; amplified sine output

Options

Option Description
-SINGLE-CMS Cable management system for single-axis applications
-SINGLE-CUST.HOSE Single CMS; 0.25 inch customer hose
-SINGLE-CUST.CABLE Single CMS; one customer cable
-SINGLE-CUST.CABLE & HOSE Single CMS; one customer cable and 0.25 inch hose
-XY-CMS Cable management system for X-Y assembly; order with each axis
-XY-CUST.HOSE XY CMS; customer hose
-XY-CUST.CABLE XY CMS; customer cable
-XY-CUST.CABLE & HOSE XY CMS; customer cable & hose