- Available with up to 1000 mm travel
- High-accuracy linear encoder
Leading-edge manufacturing, particularly in the semiconductor and data storage industries, demands positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL8000, with its air-on-air preload, exceptionally high stiffness and excellent geometric characteristics was designed specifically to meet those demands.
The ABL8000 incorporates an active preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.
Proprietary manufacturing techniques result in a stage with unsurpassed geometric characteristics. The air bearing has an inherent averaging effect that maximizes performance. The thin film will fill small surface voids and allow for other irregularities. This characteristic yields superior pitch, roll, yaw, straightness and flatness specifications.
Linear Motor Drive
The driving force behind this stage is Aerotech’s BLM series brushless linear servomotor. Aerotech’s long history and experience as a motor manufacturer is reflected in this design. The BLM utilizes an ironless forcer, which means there is zero cogging and no attractive forces – resulting in unsurpassed smoothness of motion. Capable of generating high force and velocity, the BLM represents the ultimate combination of power and performance.
Our totally noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL8000 experiences no wear or reduction in performance over time. Service life is virtually unlimited and since there is no lubrication – only clean, dry gas – air bearings are ideal for clean room and medical applications.
We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime.
To facilitate integration into the final system, we include all customer-required cables, air hoses, etc. in our CMS bundle. Both ends are fully connectorized for simple integration into the customer’s machine.
|Total Travel(1)||200 mm||300 mm||400 mm||500 mm||750 mm||1000 mm|
|Accuracy(2)||-E2 Encoder, Uncalibrated||±5.0 µm||±6.0 µm||±7.0 µm|
|-E1 Encoder, Uncalibrated||±8.0 µm||±11.5 µm||±14.0 µm||±15.75 µm||±18.5 µm||±20.0 µm|
|-E1 and -E2 Encoders, Calibrated(3)||±0.5 µm||±0.75 µm||±1.0 µm|
|Bidirectional Repeatability(2)||±0.2 µm||±0.3 µm||±0.4 µm|
|Straightness(2)||±0.4 µm||±0.75 µm||±1.5 µm||±2.0 µm||±3.0 µm||±4.0 µm|
|Flatness(2)||±0.4 µm||±0.75 µm||±1.5 µm||±2.0 µm||±3.0 µm||±4.0 µm|
|Feedback||Noncontact Linear Encoder (LN or LT) or Laser Interferometer|
|Pitch||2 arc sec||3 arc sec||4 arc sec||5 arc sec||7.5 arc sec||10 arc sec|
|Roll||2 arc sec||3 arc sec||4 arc sec||5 arc sec||7.5 arc sec||10 arc sec|
|Yaw||2 arc sec||3 arc sec||4 arc sec||5 arc sec||7.5 arc sec||10 arc sec|
|Maximum Speed(4)||-E2 Encoder||1.2 m/s|
|-E1 Encoder||2 m/s|
|Maximum Acceleration||2 g (No Load)|
|Load Capacity(7)||-SC||Horizontal||70 kg|
|Operating Pressure(8)||517-551 kPa|
|Air Consumption(9)||-SC||36 SLPM per Axis|
|-LC||58 SLPM per Axis|
|Moving Mass||-SC||10 kg|
|Stage Mass||-SC||55 kg||62 kg||70.5 kg||78.5 kg||98 kg||116.5 kg|
|-LC||70 kg||77 kg||85.5 kg||93.5 kg||113 kg||131.5 kg|
- When mounting the ABL8000 in an XY configuration, the maximum upper axis length is 400 mm.
- Certified with each stage.
- Available with Aerotech controllers.
- Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
- Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
- To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
- Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
- Specifications are for single-axis systems, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
|Feedback||-E2 Encoder||Incremental Encoder; 4 µm Fundamental Period|
|-E1 Encoder||Incremental Encoder; 20 µm Fundamental Period|
|Electronic Resolution||See signal period options on Order Information|
|Maximum Bus Voltage||80 VDC|
|Limit Switches||5 V, Normally Open|
|Home Switch||Near Center|
|Multi-Axis||A3200||Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR|
|Ensemble||Ensemble MP/Ensemble CP/Ensemble HLe/Epaq|
|Single Axis||Soloist||Soloist MP/Soloist CP/Soloist HLe|
ABL8000 Air-Bearing Direct-Drive Linear Stage
|-0200||200 mm travel|
|-0300||300 mm travel|
|-0400||400 mm travel|
|-0500||500 mm travel|
|-0750||750 mm travel|
|-1000||1000 mm travel|
|-SC||Short carriage - 250 mm length|
|-LC||Long carriage - 400 mm length|
Note:In an XY-assembled configuration, the -LC option is required for the lower (X) axis, and the -SC option with a maximum travel of 400 mm is required for the upper (Y) axis
|-LI1||Normally-closed, 5V end-of-travel limit switches|
|-LI2||Normally-open, 5V end-of-travel limit switc|
|-E1||Incremental linear encoder; 1 Vpp|
|-E2||Incremental linear encoder; high accuracy, 1 Vpp|
Cable Management (Optional)
|-CMS1||External cable management system for single axis|
|-CMS2||External cable management system for single axis w/air/vac line|
|-CMS3||External cable management system for single axis w/signal cable|
|-CMS4||External cable management system for single axis w/air/vac line and signal cable|
|-CMS5||External cable management system for lower-axis of XY|
|-CMS6||External cable management system for lower-axis of XY w/air/vac line|
|-CMS7||External cable management system for lower-axis of XY w/signal cable|
|-CMS8||External cable management system for lower-axis of XY w/air/vac line and signal cable|
|-PL1||Metrology, uncalibrated with performance plots|
|-PL2||Metrology, calibrated (HALAR) with performance plots|
|Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.|
|-TAS||Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
|-TAC||Integration - Test as components
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system
Accessories (to be ordered as separate line item)
|ABF||Air bearing filtration kit|