ABL2000 Air Bearing, Direct-Drive Linear Stage

Description

Design Features

  • Fully preloaded air-bearing
  • Available with up to 1000 mm travel
  • High-accuracy linear encoder feedback
  • Complete noncontact design
  • Ultra-smooth design for outstanding velocity stability

The ABL2000 combines excellent pitch/yaw characteristics with the unsurpassed velocity control that is necessary for printing, imaging, semiconductor and photonic applications.

Air-Bearing Design

By utilizing a magnetic preload, the ABL2000 features a smaller cross-section than typical air-bearing stages without sacrificing load capability. The large air-bearing surfaces provide excellent stiffness, allowing for heavy loading. Proprietary manufacturing techniques result in a stage with unsurpassed pitch, roll and yaw characteristics. Manufactured in Aerotech’s state-of-the-art production facility, the ABL2000 is machined with exacting tolerances that are unachievable by conventional methods.

Linear Motor Drive

The driving force behind this stage is Aerotech’s BLMC brushless linear servomotor. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces – resulting in unrivaled smoothness of motion. Since the stage is friction-free and the motor has zero cogging, extremely fine resolutions are achievable.

Zero Maintenance

The noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL2000 experiences no wear or reduction in performance over time. Service life is virtually unlimited, and since there is no lubrication – only clean, dry gas – air bearings are ideal for clean room and medical applications.

Cable Management

Years of research have resulted in what is universally considered to be the best cable management system (CMS) in the industry. We carefully optimize the cable bend radius and utilize only the highest quality cable to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime. To facilitate integration into the final system, we include all customer-required cables, air hoses, etc. in our CMS bundle. Both ends are fully connectorized for simple integration into the customer’s machine. High flex ribbon cable versions are also available.

Specifications

ABL2000 Specifications

Mechanical SpecificationsABL2000-0100ABL2000-0200ABL2000-0300ABL2000-0400ABL2000-0500ABL2000-0750ABL2000-1000
Total Travel 100 mm 200 mm 300 mm 400 mm 500 mm 750 mm 1000 mm
Motor Type Linear Brushless Servomotor
Bus Voltage(1) 80 VDC
Feedback Noncontact Linear Encoder
Maximum Speed(3) 2 m/s
Maximum Acceleration 2 g (No Load)
Maximum Load(4) 50.0 kg
Accuracy -E1 Encoder Calibrated(1) ±0.5 µm ±0.75 µm ±1 µm
Uncalibrated ±4.0 µm ±8.0 µm ±11.5 µm ±14.0 µm ±15.75 µm ±18.5 µm ±20.0 µm
-E3 Encoder Calibrated(1) ±0.5 µm ±0.75 µm ±1 µm
Uncalibrated ±5.0 µm
Repeatability -E1 Encoder ±0.2 µm ±0.3 µm ±0.4 µm
LN ±0.2 µm ±0.3 µm ±0.4 µm
Straightness and Flatness Maximum Deviation ±0.25 µm ±0.40 µm ±0.75 µm ±1.5 µm ±2.0 µm ±3.0 µm ±4.0 µm
Pitch/Roll/Yaw 1 arc sec 2 arc sec 3 arc sec 4 arc sec 5 arc sec 7.5 arc sec 10 arc sec
Nominal Stage Mass 30.0 kg 34.5 kg 39.5 kg 44.0 kg      
Operating Pressure(7) 80 psig ±5 psig
Air Consumption(8) 19.8 SLPM (0.7 SCFM) (Single Axis)
Moving Mass 9 kg
Material Aluminum
Finish Hard Coating (62 Rockwell Hardness)
  1. When mounting the ABL2000 in an XY configuration, the maximum upper axis length is 300 mm.
  2. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
  3. Maximum load based on bearing capability; maximum application load may be limited by acceleration requirements.
  4. Available with Aerotech controllers.
  5. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
  6. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
  7. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  • ABL2000
  • ABL2000

Dimensions

  • ABL2000

Ordering Information

ABL2000 Air-Bearing Direct-Drive Linear Stage

Travel (Required)

Option Description
-0100 100 mm travel
-0200 200 mm travel
-0300 300 mm travel
-0400 400 mm travel
-0500 500 mm travel
-0750 750 mm travel
-1000 1000 mm travel

Feedback (Required)

Option Description
-E1 Incremental linear encoder; 1 Vpp amplified sine output
-E2 Incremental linear encoder; 1.0 µm digital TTL output
-E3 High-accuracy incremental linear encoder; 1 Vpp amplified sine output

Limits (Required)

Option Description
-LI1 Normally-closed, 5V end-of-travel limit switches
-LI2 Normally-open, 5V end-of-travel limit switches

Cable Management (Optional)

Option Description
-CMS1 Cable management system for lower-axis of XY assembly
-CMS2 Cable management system for upper-axis of XY assembly

Metrology (Required)

Option Description
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system

Accessories (to be ordered as separate line item)

Option Description
ABF Air-bearing filtration kit