ABL1500-B Air-Bearing Direct-Drive Linear Stage

Description

Design Features

  • Integral bellows protect the drive and bearing system from contamination
  • Designed for high-performance scanning and inspection
  • Air-on-air preload on all air-bearing surfaces
  • Linear encoder feedback provides nanometer-level
  • High stiffness for heavy loads and excellent geometrical performance
  • Travel up to 500 mm

Leading-edge manufacturing demands positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL1500-B, with its integral bellows, exceptionally high stiffness and excellent geometric characteristics, was designed specifically to meet those demands.

Air-Bearing Design for High Dynamic Performance

The ABL1500-B incorporates an air-on-air preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.

Proprietary manufacturing techniques result in a stage with unsurpassed geometrical characteristics. The air bearing has an inherent averaging effect that maximizes performance. The thin film will fill small surface voids and allow for other irregularities. This characteristic yields superior pitch, roll, yaw, straightness and flatness specifications.

Linear Motor Drive

The driving force behind this stage is Aerotech’s BLMC series brushless linear servomotor. Aerotech’s long history and experience as a motor manufacturer is reflected in this design. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed smoothness of motion. Capable of generating high force and velocity, the BLMC represents the ultimate combination of power and performance.

Zero Maintenance

Our totally noncontact air bearing, noncontact linear motor drive, and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL1500-B experiences no wear or reduction in performance over time. Service life is virtually unlimited and since there is no lubrication – only clean, dry gas – air bearings are ideal for cleanroom and medical applications.

Cable Management

We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech's modular design makes cable replacement quick and easy with minimal downtime. We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate integration into the final system. Both ends are fully connectorized for simple
integration into the customer's machine.

Integral Bellows

The ABL1500-B uses an integral bellows system to provide a high level of environmental protection. This system protects the air bearings and drive system from process-generated contamination like abrasive debris. The design also has been optimized to minimize the influence of the bellows on the stage's geometric performance.

Specifications

Mechanical Specifications

ModelABL15005-BABL15010-BABL15020-B
Travel 50 mm 100 mm 200 mm
Accuracy(1) LN HALAR ±0.3 µm ±0.3 µm ±0.5 µm
Standard ±1.0 µm ±2.0 µm ±5.0 µm
LT HALAR ±0.4 µm ±0.4 µm ±0.7 µm
Standard ±2.0 µm ±4.0 µm ±8.0 µm
Repeatability
(Bidirectional)(1)
LN ±0.15 µm ±0.15 µm ±0.25 µm
LT ±0.15 µm ±0.25 µm
Straightness(1) ±0.25 µm ±0.4 µm ±0.5 µm
Flatness(1) ±0.25 µm ±0.4 µm ±0.5 µm
Pitch ±0.5 arc sec ±1 arc sec ±2 arc sec
Roll ±0.5 arc sec ±1 arc sec ±2 arc sec
Yaw ±0.5 arc sec ±1 arc sec ±2 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 2 g (No Load)
Maximum Force (Continuous) 93.6 N
Load Capacity(2) Horizontal 35 kg
Side 25 kg
Operating Pressure 80 psi ±5 psig
Air Consumption 24-30 SLPM @ 551 kPa
Moving Mass (No Load) 5.9 kg
Stage Mass 19.4 kg 21.0 kg 25.2 kg
Material Aluminum
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. Axis orientation for on-axis loading is listed.
  3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  4. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
  5. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
  6. Maximum upper axis travel length is 100 mm when mounting the ABL1500-B in an XY configuration.
ModelABL15030-BABL15040-BABL15050-B
Travel 300 mm 400 mm 500 mm
Accuracy(1) LN HALAR ±0.6 µm ±0.75 µm ±0.75 µm
Standard ±5.0 µm ±5.0 µm ±5.0 µm
LT HALAR ±0.7 µm ±0.8 µm ±0.8 µm
Standard ±12.0 µm ±16.0 µm ±20.0 µm
Repeatability
(Bidirectional)(1)
LN ±0.25 µm ±0.3 µm
LT ±0.25 µm ±0.3 µm
Straightness(1) ±0.75 µm ±1.5 µm ±2.0 µm
Flatness(1) ±0.75 µm ±1.5 µm ±2.0 µm
Pitch ±3 arc sec ±4 arc sec ±5 arc sec
Roll ±3 arc sec ±4 arc sec ±5 arc sec
Yaw ±3 arc sec ±4 arc sec ±5 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 2 g (No Load)
Maximum Force (Continuous) 93.6 N
Load Capacity(2) Horizontal 35 kg
Side 25 kg
Operating Pressure 80 psi ±5 psig
Air Consumption 24-30 SLPM @ 551 kPa
Moving Mass (No Load) 5.9 kg
Stage Mass 29.0 kg 33.2 kg 37.1 kg
Material Aluminum
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. Axis orientation for on-axis loading is listed.
  3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  4. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
  5. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
  6. Maximum upper axis travel length is 100 mm when mounting the ABL1500-B in an XY configuration.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder (see signal period options on Order Information page)
Maximum Bus Voltage up to 80 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR
Ensemble Ensemble MP/Ensemble CP/Ensemble HLe/Epaq
Single Axis Soloist Soloist MP/Soloist CP/Soloist HLe
  • Cantilever load capability

Dimensions

  • ABL1500-B
  • ABL1500-B-XY

Ordering Information

Ordering Example

ABL15 010-B -M -10 -NC -LN10AS -SINGLE-CMS

Ordering Options

Series TravelMounting and Grid PatternMotorLimitsLinear EncoderOptions
ABL15 005-B
010-B
020-B
030-B
040-B
050-B
-M -10 -NC -LTnnAS
-LTnnX50
-LNnnAS
-SINGLE-CMS
-XY-CMS
-XIO-CMS
-Y-CMS
-YZ-CMS
-YIO-CMS

ABL1500-B Series Linear Air-Bearing Stage

Option Description
ABL15005-B 50 mm (2 in) travel linear air-bearing stage with linear motor, limits and bellows
ABL15010-B 100 mm (4 in) travel linear air-bearing stage with linear motor, limits and bellows
ABL15020-B 200 mm (8 in) travel linear air-bearing stage with linear motor, limits and bellows
ABL15030-B 300 mm (12 in) travel linear air-bearing stage with linear motor, limits and bellows
ABL15040-B 400 mm (16 in) travel linear air-bearing stage with linear motor, limits and bellows
ABL15050-B 500 mm (20 in) travel linear air-bearing stage with linear motor, limits and bellows

Mounting and Grid Pattern

Option Description
-M Metric dimension mounting pattern and holes

Motor

Option Description
-10 Brushless linear motor (BLMC-192-A)

Limits

Option Description
-NC Normally-closed end of travel limit switches (standard)

Standard Linear Encoders

Option Description
-LT05AS Linear encoder for ABL15005-B; amplified sine output
-LT10AS Linear encoder for ABL15010-B; amplified sine output
-LT20AS Linear encoder for ABL15020-B; amplified sine output
-LT30AS Linear encoder for ABL15030-B; amplified sine output
-LT40AS Linear encoder for ABL15040-B; amplified sine output
-LT50AS Linear encoder for ABL15050-B; amplified sine output
-LT05X50 Linear encoder for ABL15005-B; 0.1 micron line driver output
-LT10X50 Linear encoder for ABL15010-B; 0.1 micron line driver output
-LT20X50 Linear encoder for ABL15020-B; 0.1 micron line driver output
-LT30X50 Linear encoder for ABL15030-B; 0.1 micron line driver output
-LT40X50 Linear encoder for ABL15040-B; 0.1 micron line driver output
-LT50X50 Linear encoder for ABL15050-B; 0.1 micron line driver output

High-Accuracy Linear Encoders

Option Description
-LN05AS High-accuracy linear encoder for ABL15005-B; amplified sine output
-LN10AS High-accuracy linear encoder for ABL15010-B; amplified sine output
-LN20AS High-accuracy linear encoder for ABL15020-B; amplified sine output
-LN30AS High-accuracy linear encoder for ABL15030-B; amplified sine output
-LN40AS High-accuracy linear encoder for ABL15040-B; amplified sine output
-LN50AS High-accuracy linear encoder for ABL15050-B; amplified sine output

Options

Option Description
-SINGLE-CMS Cable management system for single-axis applications
-XY-CMS Cable management system for X-Y assembly; order with X axis only
-XIO-CMS Cable management system for single axis with two customer cables and one customer air line
-Y-CMS Cable management system for X-Y assembly; order with Y axis only
-YZ-CMS Cable management system for X-Y-Z assembly; order with Y axis only
-YIO-CMS Cable management system for X-Y assembly with two customer cables and one customer air line; order with Y axis only

Accessories (to be ordered as separate line item)

Option Description
HALAR High-accuracy system linear error correction for accuracy and repeatability
ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal
ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal