ABL1500 Air-Bearing Direct-Drive Linear Stage

Description

Design Features

  • Designed for high-performance scanning and inspection
  • Active air preload on all air bearing surfaces
  • Linear encoder feedback provides subnanometer resolution
  • High stiffness for heavy loads and excellent geometric performance
  • Travel up to 500 mm

Leading-edge manufacturing, particularly in the semiconductor and data storage industries, demands positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL1500 air bearing stage, with its fully active preload, exceptionally high stiffness and excellent geometric characteristics was designed specifically to meet those demands.

Air-Bearing Design for High Dynamic Performance

The ABL1500 incorporates an air-on-air preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.

Proprietary manufacturing techniques result in a stage with unsurpassed geometric characteristics. The air bearing has an inherent averaging effect that maximizes performance. The thin film will fill small surface voids and allow for other irregularities. This characteristic yields superior pitch, roll, yaw, straightness and flatness specifications.

Linear Motor Drive

The driving force behind this stage is Aerotech’s BLMC series brushless linear servomotor. Aerotech’s long history and experience as a motor manufacturer is reflected in this design. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed smoothness of motion. Capable of generating high force and velocity, the BLMC represents the ultimate combination of power and performance.

Zero Maintenance

Our totally noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL1500 experiences no wear or reduction in performance over time. Service life is virtually unlimited and since there is no lubrication – only clean, dry gas – air bearings are ideal for cleanroom and medical applications.

Cable Management

We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime. We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate integration into the final system. Both ends are fully connectorized for simple integration into the customer’s machine.

Specifications

Mechanical Specifications

ModelABL1500-050ABL1500-100ABL1500-200
Travel 50 mm 100 mm 200 mm
Accuracy(1) E1 Calibrated ±0.3 µm ±0.3 µm ±0.5 µm
Standard ±2.0 µm ±4.0 µm ±8.0 µm
E3 Calibrated ±0.2 µm ±0.2 µm ±0.4 µm
Standard ±1.0 µm ±2.0 µm ±5.0 µm
Repeatability
(Bidirectional)(1)
E1 ±0.1 µm ±0.2 µm
E3 ±0.05 µm ±0.05 µm ±0.1 µm
Straightness(1) ±0.25 µm ±0.4 µm ±0.5 µm
Flatness(1) ±0.25 µm ±0.4 µm ±0.5 µm
Pitch ±0.5 arc sec ±1 arc sec ±2 arc sec
Roll ±0.5 arc sec ±1 arc sec ±2 arc sec
Yaw ±0.5 arc sec ±1 arc sec ±2 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 2 g (No Load)
Maximum Force (Continuous) 93.6 N
Load Capacity(2) Horizontal 35 kg
Side 25 kg
Operating Pressure 80 psi ±5 psig
Air Consumption 24-30 SLPM @ 551 kPa (0.85-1.06 SCFM @ 5.51 bar)
Moving Mass (No Load) 5.1 kg
Stage Mass 14.7 kg 16.0 kg 18.6 kg
Material Aluminum
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. Axis orientation for on-axis loading is listed.
  3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  4. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
  5. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
  6. For XY configurations, the maximum upper axis travel is 200 mm. For upper axis travels greater than 200 mm but equal to or less than 500 mm, an ABL1500WB is required as the lower axis.

ModelABL1500-300ABL1500-400ABL1500-500
Travel 300 mm 400 mm 500 mm
Accuracy(1) E1 Calibrated ±0.5 µm ±0.6 µm ±0.6 µm
Standard ±12.0 µm ±16.0 µm ±20.0 µm
E3 Calibrated ±0.4 µm ±0.5 µm ±0.5 µm
Standard ±5.0 µm ±5.0 µm ±5.0 µm
Repeatability
(Bidirectional)(1)
E1 ±0.2 µm ±0.3 µm
E3 ±0.15 µm ±0.2 µm
Straightness(1) ±0.75 µm ±1.5 µm ±2.0 µm
Flatness(1) ±0.75 µm ±1.5 µm ±2.0 µm
Pitch ±3 arc sec ±4 arc sec ±5 arc sec
Roll ±3 arc sec ±4 arc sec ±5 arc sec
Yaw ±3 arc sec ±4 arc sec ±5 arc sec
Maximum Speed 2 m/s
Maximum Acceleration 2 g (No Load)
Maximum Force (Continuous) 93.6 N
Load Capacity(2) Horizontal 35 kg
Side 25 kg
Operating Pressure 80 psi ±5 psig
Air Consumption 24-30 SLPM @ 551 kPa (0.85-1.06 SCFM @ 5.51 bar)
Moving Mass (No Load) 5.1 kg
Stage Mass 21.3 kg 23.9 kg 26.5 kg
Material Aluminum
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. Axis orientation for on-axis loading is listed.
  3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  4. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
  5. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
  6. For XY configurations, the maximum upper axis travel is 200 mm. For upper axis travels greater than 200 mm but equal to or less than 500 mm, an ABL1500WB is required as the lower axis.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder (see signal period options on Order Information page)
Maximum Bus Voltage up to 80 VDC
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR
Ensemble Ensemble MP/Ensemble CP/Ensemble HLe/Epaq
Single Axis Soloist Soloist MP/Soloist CP/Soloist HLe
  • ABL1500Spec
  • ABL1500Spec-2

Dimensions

  • ABL1500

Ordering Information

ABL1500 Air-Bearing Direct-Drive Linear Stage

Travel (Required)

Option Description
-050 50 mm travel
-100 100 mm travel
-200 200 mm travel
-300 300 mm travel
-400 400 mm travel
-500 500 mm travel

Feedback (Required)

Option Description
-E1 Incremental linear encoder, 1 Vpp amplified sine output
-E2 Incremental linear encoder, 0.1 µm TTL line driver output
-E3 High-accuracy incremental linear encoder, 1 Vpp amplified sine output

Cable Management (Required)

Option Description
-CMS1 Single axis cable management system
-CMS2 Cable management system for XY assembly
-CMS3 Cable management system for Y axis, upper axis only
-CMS4 Cable management system for YZ assembly, upper axis only

Metrology (Required)

Option Description
-PL1 Metrology, uncalibrated with performance plots
-PL2 Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system

Accessories (to be ordered as a separate line item)

 Description
ALIGN-NPA Non-precision XY assembly
ALIGN-PA10 XY assembly; 10 arc sec orthogonality. Alignment to within 7 microns orthogonality for short travel stages.
ALIGN-PA5 XY assembly; 5 arc sec orthogonality. Alignment to within 3 microns orthogonality for short travel stages.
ABF Air-bearing filtration kit