- Travel lengths up to 150 mm with anti-creep crossed-roller bearings
- Optional center-mounted linear encoder for direct position feedback
- Versatile features and options enable convenient integration into a larger machine or use as a standalone positioning axis
- Vacuum- and cleanroom-compatible versions available
- Available with ThermoComp® for reliable performance in changing environments
Superior Motion PerformanceFeaturing anti-creep crossed-roller bearings and a precision-ground, fine-pitch ball-screw, the ATX115SL/SLE boasts excellent geometric performance and minimal angular error motion. With up to 150 mm of nominal travel, the ATX115SL/SLE offers superior minimum incremental step size and in-position stability compared to other stages that utilize recirculating ball bearings. This makes the ATX115SL/SLE ideal for many high-precision tasks such as vertical positioning of sensors and cameras, optics focusing, and beamline measurement and manipulation applications.
Linear Encoder OptionThe ATX115SLE offers an integral center-mounted linear encoder to provide direct position measurement at the stage’s moving carriage. The typical effects of backlash commonly associated with screw drives are virtually eliminated when using the linear encoder as a position feedback device. Applications that require exacting workpoint performance benefit greatly from the ATX115SLE’s direct linear encoder. Options are available with either incremental (1 Vpp and digital TTL) or absolute output signals.
Design and Integration FlexibilityThe ATX115SL/SLE is designed with a variety of standard features and available options allowing it to be easily integrated into a larger subsystem or machine, or to serve as a stand-alone positioning axis. It mounts to both metric and English optical tables and features a versatile customer mounting interface on the moving carriage to which other positioning stages or equipment can be mounted. Brushless, slotless servomotors, with or without a holding brake, as well as stepper motors, are available options. The ATX115SL/SLE can be equipped with an optional motor foldback kit in order to reduce the overall length of the stage. This is particularly useful in vertical-axis applications where space is limited. Vacuum- and cleanroom-compatible variants are also available.
Mitigate Thermal Errors with ThermoComp®Temperature changes and thermal effects are often the most detrimental sources of error in precision machines, and screw drives are particularly susceptible. All ATX-series stages are available with Aerotech’s ThermoComp® feature, an integrated temperature compensation solution that delivers accurate and dependable positioning performance in the presence of thermal disturbances. It protects the stage from the effects of variable-temperature environments and friction-induced self-heating, ultimately providing stability to the user’s process, even in extreme industrial environments.
|Travel||50 mm||100 mm||150 mm|
|Accuracy(1)||SL||Uncalibrated||±6 µm||±6 µm||±7 µm|
|Calibrated(2)||±0.75 µm||±1 µm||±1 µm|
|SLE||Uncalibrated||±2 µm||±3 µm||±4 µm|
|Calibrated(2)||±0.5 µm||±0.6 µm||±0.6 µm|
|Resolution (Minimum Incremental Motion)||SL||
|SLE||0.025 µm (-E1 feedback option)(6)
0.1 µm (-E2 feedback option)
0.2 µm (-E3 feedback option)
|Bidirectional Repeatability(1)||SL||±0.5 µm|
|SLE||±0.15 µm||±0.2 µm||±0.2 µm|
|Horizontal Straightness(1)||±1.25 µm||±1.5 µm||±1.75 µm|
|Vertical Straightness(1)||±1.25 µm||±1.5 µm||±1.75 µm|
|Pitch||60 µrad (12 arc-sec)||70 µrad (14 arc-sec)||80 µrad (16 arc-sec)|
|Yaw||40 µrad (8 arc-sec)||50 µrad (10 arc-sec)||60 µrad (12 arc-sec)|
|Maximum Speed(5)||DC Servomotor (-M1 through -M4)||220 mm/s||180 mm/s|
|Stepper Motor (-M5)||60 mm/s|
|Load Capacity||Horizontal||14 kg|
|Vertical (Axial)||7 kg|
|Moving Mass||0.8 kg||1.0 kg||1.3 kg|
|Stage Mass||3.2 kg||3.8 kg||4.5 kg|
- Certified with each stage.
- Available with Aerotech controllers.
- Achieved with Aerotech rotary motor with amplified sine encoder. Specification is unidirectional.
- Achieved with Aerotech rotary motor with 10,000 lines/rev digital encoder. Specification is unidirectional.
- Requires the selection of an appropriate amplifier with sufficient voltage and current.
- Requires motor with 1 Vpp amplified sine encoder (-M3, -M4 motor options) and linear amplifier.
- Specifications listed are valid for non-foldback kit options. Contact factory for specifications when a foldback kit option (-FBx) is ordered.
|Drive System||Brushless Rotary Servomotor (-M1 through -M4)
Stepper Motor (-M5)
|Feedback (Linear Encoder - SLE Version Only)||Incremental: 1 Vpp (-E1 feedback option) or 0.05 μm TTL (-E2 feedback option)
Absolute: EnDat 2.2 (-E3 feedback option)
|Feedback (Rotary Encoder)||
Incremental: 10,000-Line TTL (-M1, -M2 motor options)
|Maximum Bus Voltage||48 VDC|
|Limit Switches||5 V, Normally Closed|
ATX115SL/SLE Series Mechanical-Bearing, Screw-Driven Linear Stage
Direct Linear Feedback (Required)
|SL||No direct linear feedback|
|SLE-E1||Incremental linear encoder, 1 Vpp|
|SLE-E2||Incremental linear encoder, 0.05 µm digital TTL output|
|SLE-E3||Absolute linear encoder|
|-050||50 mm travel|
|-100||100 mm travel|
|-150||150 mm travel|
|-M1||DC servomotor with 10,000-line TTL encoder|
|-M2||DC servomotor with 10,000-line TTL encoder and brake|
|-M3||DC servomotor with 1000-line 1 Vpp encoder|
|-M4||DC servomotor with 1000-line 1 Vpp encoder and brake|
Foldback Kit (Optional)
|-FB1||Foldback kit for ATX115 motor|
|-TCMP||ThermoComp integrated thermal compensation|
|-PL1||Metrology, uncalibrated with performance plots|
|-PL2||Metrology, calibrated (HALAR) with performance plots|
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
|-TAS||Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
|-TAC||Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.
- Note: HDZ bracket requires tabletop when mounting to a PRO stage.