AVS/AVSI100 Mechanical-Bearing Ball-Screw Lift Stage

Description

Design Features

  • Long-life linear guide bearing system
  • Submicron closed-loop positioning
  • Low-cost, high-performance stage
  • 6, 13 and 25 mm travel models
  • Precision-ground ball screw
  • Integral or removable motor

Aerotech's AVS100/AVSI100 series stages offer the ideal solution for applications that require very small incremental movements in elevation above a horizontal plane. Low profiles and precise motion capability make these stages ideal for use in semiconductor wafer inspection and testing, fibre optics assembly and inspection, automated tool alignment, machine vision inspection systems and laser machining applications.

The AVSI100 series stages provide identical performance to the AVS100 stages, but in an even smaller footprint. The AVSI100 integrates the motor directly with the drive screw with no motor coupling. This makes the stage significantly shorter in length.

Quality Design Provides Superior Performance

The AVS100/AVSI100 series provides precise elevation of a load in a vertical plane using a moving wedge design. The precision machined wedge block converts horizontal movement from a precision-ground ball screw to vertical elevation of the AVS100/AVSI100 series tabletop.

Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability, long life and smooth, precision motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is ensured.

Careful design of the wedge angle and bearing system allows the AVS100/AVSI100 series to achieve submicron resolution and still maintain a compact profile. The optional HALAR factory calibration option is available to further increase standard accuracy and repeatability.

A Better Approach to Vertical Motion

The vertical lift approach offers an alternative to traditional Z-plane oriented stages. Not only do the AVS100/AVSI100 series stages offer a lower profile, but the load can also be accessed easily from any side. And by centering the payload over the bearings, there are no cantilevering effects. The AVS100/AVSI100 series stages provide a space-saving alternative to traditional XYZ systems and are equally suited to laboratory and industrial applications. Optional stage finishes are available for various environments, including vacuum preparation.

Additional Standard Features

All AVS100/AVSI100 series stages are equipped standard with integral limit switches and mechanical hard stops. The stage tabletop is treated with a Teflon®-impregnated hardcoat (Rockwell 62 hardness) that is scratch-resistant and provides outstanding protection in the harshest environments. The stage itself has a black anodize finish.

Specifications

AVS/AVSI100 Specifications

ModelAVS/AVSI106AVS/AVSI113AVS/AVSI125
Travel 6 mm 13 mm 25 mm
Drive System Precision Ball Screw/Brushless Servomotor (BMS60-A-D25-E1000H)
Bus Voltage Up to 160 VDC
Continuous Current Apk 2.3 A
Arms 1.6 A
Resolution 1000-line line driver output encoder (AVS) 0.53 µm @ 4000 steps/rev motor resolution
1000-line amplified sine output encoder (AVSI) 5.3 nm - 0.106 µm
2500-line line driver output encoder (AVSI) 0.2 µm @ 10,000 steps/rev motor resolution
Maximum Travel Speed 50 mm/s
Effective Lead 2.12 mm/rev
Maximum Load(1) 25.0 kg
Accuracy Standard ±1.5 µm ±3.0 µm ±5.0 µm
HALAR(2) ±1.0 µm
Bidirectional Repeatability Standard ±1.0 µm
HALAR(2) ±0.75 µm
Straightness and Flatness
(Maximum Deviation)
±1.5 µm ±3.0 µm ±5.0 µm
Pitch and Roll ±5 arc sec ±7.5 arc sec ±10 arc sec
Nominal Stage Weight (With Motor) 4.1 kg 6.1 kg 10.5 kg
Construction Aluminum/Black Anodize/Hardcoat Table
  1. Higher load possible with larger motor on the AVS series stage.
  2. Requires Aerotech controller.
  3. Specifications are for single-axis systems measured 50 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  4. For inverted operation, consult factory.

Dimensions

  • AVS106
  • AVSI106
  • AVS113
  • AVSI113
  • AVS125
  • AVSI125

Ordering Information

Ordering Example

AVS1 06 /VAC3 -M -BMS -NC -FB

Ordering Options

Series Travel (mm) Vacuum PreparationMounting and Grid PatternMotorLimitsOptions
AVS1 06
13
25
/VAC3
/VAC6
-M -BMS
-NM
-SM
-NC
-NO
-9DU
-FLY
-FB
-BRK23

AVS100 Series Vertical Translation Stage

Option Description
AVS106 6 mm travel stage with limits
AVS113 13 mm travel stage with limits
AVS125 25 mm travel stage with limits

Stage Construction Options

Option Description
/VAC3 Vacuum preparation of stage to 10-3 torr
/VAC6 Vacuum preparation of stage to 10-6 torr

Mounting and Grid Pattern

Option Description
-M Metric dimension mounting pattern and holes

Motor

Option Description
-BMS Brushless servomotor with connectors and 1000-line line driver output encoder (BMS60-A-D25-E1000H)
-NM No motor or encoder
-SM 50SMB2-HM NEMA 23 stepper motor with home marker

Limits

Option Description
-NC Normally-closed end-of-travel and home limit switches (standard)
-NO Normally-open end-of-travel and home limit switches
-9DU 9-pin D limit connector (use with -BMS motor options)
-FLY Flying lead limit wiring (use with -NM or -SM motor options)

Options

Option Description
-FB Foldback motor kit (not available with -IM versions)
-BRK23 24 VDC spring-set motor brake for NEMA 23 motor

Accessories

Option Description
HALAR High-accuracy system – linear error correction for accuracy and repeatability

AVSI1 Ordering Example

AVSI1 06 /VAC3 -M -NC -IM2500H -3

Ordering Options

Series Travel (mm) Vacuum PreparationMounting and Grid PatternLimitsMotorOptions
AVSI1 06
13
25
/VAC3
/VAC6
-M -NC
-NO
-IM2500H
-IM1000AS
-IM2500H-BRK
-IM1000AS-BRK
-3
-5

AVSI100 Series Vertical Translation Stage

Option Description
AVSI106 6 mm travel stage with limits
AVSI113 13 mm travel stage with limits
AVSI125 25 mm travel stage with limits

Stage Construction Options

Option Description
/VAC3 Vacuum preparation of stage to 10-3 torr
/VAC6 Vacuum preparation of stage to 10-6 torr

Mounting and Grid Pattern

Option Description
-M Metric dimension mounting pattern and holes

Limits

Option Description
-NC Normally-closed end-of-travel and home limit switches (standard)
-NO Normally-open end-of-travel and home limit switches

Motor

Option Description
-IM2500H Integral motor based on BMS60 with 2500 line driver encoder
-IM1000AS Integral motor based on BMS60 with 1000 amplified sine encoder
-IM2500H-BRK Integral motor based on BMS60 with 2500 line driver encoder and 24 VDC holding brake
-IM1000AS-BRK Integral motor based on BMS60 with 1000 amplified sine encoder and 24 VDC holding brake

Options - Cable Orientation

Option Description
-3 Left cable exit
-5 Right cable exit