AVS1000 Mechanical-Bearing Ball-Screw Lift Stage

Description

Design Features

  • High-load lift stage with aperture
  • Submicron closed-loop positioning
  • Excellent pitch and yaw characteristics over full travel
  • 5 mm or 10 mm travel; custom designs for alternate travels available
  • Optional cleanroom and ESD protection
  • Precision-ground ball screw for high performance

Aerotech’s AVS1000 series stages offer the ideal solution for applications that require moving large or heavy loads over very small incremental movements in elevation above a horizontal plane. Low profiles and precise motion capability make these stages ideal for use in semiconductor manufacturing and inspection, automated tool alignment, machine vision inspection systems and laser machining applications.

Quality Design Provides Superior Performance

The AVS1000 series provides precise elevation of a load in a vertical plane using a moving wedge design. The precision machined wedge block converts horizontal movement from a precision-ground ball screw to vertical elevation of the AVS1000 series tabletop.

Sealed linear motion guide bearings with integral wipers are incorporated to provide excellent payload capability, long life and smooth, precision motion. Stable and parallel vertical motion with no rocking or horizontal deviation of the platform is ensured.

Careful design of the wedge angle and bearing system allows the AVS1000 series to achieve submicron resolution and still maintain a compact profile. The optional HALAR factory calibration option is available to further increase standard accuracy and repeatability.

A Better Approach to Vertical Motion

The vertical lift approach offers an alternative to traditional Z-plane oriented stages. Not only do the AVS1000 series stages offer a lower profile, but the load can also be accessed easily from any side. And by centering the payload over the bearings, there are no cantilevering effects.

Motor and Drives

The AVS1000 series includes Aerotech's high performance NEMA 34 frame-size BMS series brushless, slotless servomotor. The slotless motor has zero cogging and therefore is optimized for applications requiring very smooth motion.

Aerotech manufactures a wide range of matching drives and controls to provide a fully integrated and optimized motion solution.

Specifications

Mechanical Specifications

ModelAVS1005AVS1010
Travel 5 mm 10 mm
Accuracy(1) Standard ±2.0 µm ±4.0 µm
HALAR ±1.0 µm ±1.0 µm
Resolution 5 nm
Bidirectional Repeatability(1) ±0.5 µm
Straightness(2) ±0.5 µm ±1.0 µm
Pitch(2) ±5 arc sec ±7.5 arc sec
Roll(2) ±5 arc sec ±7.5 arc sec
Yaw(2) ±5 arc sec ±7.5 arc sec
Maximum Speed 5 mm/rev 20 mm/s
Maximum Acceleration 0.05 g
Load Capacity(3) Vertical 135 kg
Material Aluminum
MTBF (Mean Time Between Failure) 15,000 Hours
  1. Certified with each stage.
  2. Specifications are for no-load condition. Pitch, roll and straightness may be affected by amount and centering of the load.
  3. Load must be centered within the stage aperture.
  4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.

Electrical Specifications

Drive System Brushless Rotary Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage up to 320 VDC
Limit Switches 5 V, Normally Closed

Recommended Controller

Multi-Axis A3200 Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR
Ensemble Ensemble MP/Ensemble CP/Ensemble HLe/Epaq
Single Axis Soloist Soloist MP/Soloist CP/Soloist HLe
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Dimensions

  • AVS1000 (AVS1005 model shown)

Ordering Information

Ordering Example

AVS10 05 /STANDARD -M -BMS -NC -FB

Ordering Options

Series Travel (mm) Construction OptionsMounting and Grid PatternMotorLimitsOptions
AVS10 05
10
/STANDARD
/CR
/ESD
/VAC3
/VAC6
-M -BMS
-BMS-AS
-NM
-NC
-NO
-9DU
-FLY
-FB
-BRK

AVS1000 Series Vertical Lift Stage

Option Description
AVS1005 5 mm travel stage with limits
AVS1010 10 mm travel stage with limits
AVS10XX Custom travels available; consult factory

Stage Construction Options

Option Description
/STANDARD Standard construction
/CR Cleanroom compatibility
/ESD Electroless nickel for ESD protection
/VAC3 Vacuum preparation of stage to 10-3 torr
/VAC6 Vacuum preparation of stage to 10-6 torr

Mounting and Grid Pattern

Option Description
-M Metric dimension mounting pattern and holes

Motor

Option Description
-BMS Brushless servomotor with connectors and 1000-line line driver output encoder (BMS280-MS-E1000H)
-BMS-AS Brushless servomotor with connectors and 1000-line amplified sine output encoder (BMS280-MS-E1000AS)
-NM No motor or encoder

Limits

Option Description
-NC Normally-closed end-of-travel and home limit switches (standard)
-NO Normally-open end-of-travel and home limit switches
-9DU 9-pin D limit connector (use with -BMS motor option)
-FLY Flying lead limit wiring (use with -NM motor option)

Options

Option Description
-FB Foldback motor kit
-BRK Brake; holding torque is 1.7 N-m, 24 VDC, 0.4 A

Accessories

Option Description
HALAR High-accuracy system – linear error correction for accuracy and repeatability