- Nanometer performance with 3 mm vertical travel
- High resolution (1 nm), repeatability (100 nm) and accuracy (200 nm)
- In-position stability of <1 nm
- Anti-creep crossed-roller bearings
- High dynamic performance
Aerotech's ANT series stages are the world's first nanometer-level positioning systems with multi-millimeter travel. The ANT95V-3 and ANT95V-3-PLUS are linear-motor-driven wedge-style vertical lift stages. The stages are designed to be seamlessly integrated with other stages in the ANT95 family for superior multi-axis performance and are offered in two accuracy grades.
All of the original ANT series' direct-drive advantages have been preserved in the ANT95V-3 family. Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95V-3 stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT95V-3 family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be combined easily for flexible system designs and multi-axis configurations.
Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT95V-3 stage's industry-leading 1 nm minimum incremental step size provides this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech's direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.
|Resolution (Minimum Incremental Motion)||1 nm|
|Bidirectional Repeatability(1)||Base||±150 nm|
|Unidirectional Repeatability||±75 nm|
|Pitch(1)||20 arc sec|
|Roll(1)||10 arc sec|
|Yaw(1)||10 arc sec|
|Maximum Speed||75 mm/s|
|Maximum Acceleration||0.4 g (No Load)|
|Settling Time||See graphs for typical performance|
|In-Position Stability(3)||<1 nm|
|Maximum Force (Continuous)||71 N|
|Load Capacity(4)||1.5 kg|
|Moving Mass||1.1 kg|
|Stage Mass||2.0 kg|
|Material||Aluminum and Stainless-Steel Body/Black Hardcoat Finish/Black Anodize Finish|
|MTBF (Mean Time Between Failure)||30,000 Hours|
- Certified with each stage.
- Measured perpendicular or parallel to wedge direction.
- In-Position Stability listing is 3 sigma value.
- Assumes loading along axis of travel.
- Specifications are per axis measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- -PLUS requires the use of an Aerotech controller.
|Drive System||Brushless Linear Servomotor|
|Feedback||Noncontact Linear Encoder|
|Maximum Bus Voltage||±40 VDC|
|Limit Switches||5 V, Normally Closed|
|Home Switch||Near Center|
|Single Axis||Soloist||Soloist ML-MXH|
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.
ANT95V-3 Single-Axis Lift Direct-Drive Nanopositioning Stage, 3 mm Travel
Mounting Plate (Optional)
Performance Grade (Required)
|-PL2||High-Accuracy Performance, PLUSn)|
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
|-TAS||Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
|-TAC||Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.