- Nanometer performance in a large travel format (25 and 50 mm)
- High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm)
- In-position stability of <2 nm
- Anti-creep crossed-roller bearings
- High dynamic performance
The ANT95-L-Z and ANT95-L-Z-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability and size, and are offered in two accuracy grades. As an evolution of the ANT stage family, these linear stages exhibit enhanced motion performance over Aerotech’s first generation ANT series.
All of the original ANT series’ direct-drive advantages have been preserved in the ANT95-L-Z family. Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95-L-Z stages utilise advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance for high-precision positioning, disk-drive fabrication, fibre alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.
The ANT95-L-Z stages use a nearly frictionless counterbalance mechanism to maintain performance levels while minimizing motor heating. The counterbalance is user-adjustable from 0 to 5 kg.
Flexible System Design
The ANT95-L-Z family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be combined easily for flexible system designs and multi-axis configurations.
Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT95-L-Z stage’s industry-leading 2 nm minimum incremental step size provides this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.
|Travel||25 mm||25 mm||50 mm||50 mm|
|Accuracy(1)||±4.0 µm||±300 nm||±4.0 µm||±300 nm|
|Resolution||2 nm||2 nm||2 nm||2 nm|
|Bidirectional Repeatability(1)||±100 nm||±75 nm||±100 nm||±75 nm|
|Unidirectional Repeatability||±50 nm||±50 nm||±50 nm||±50 nm|
|Straightness(1)||±2.25 µm||±2.25 µm||±3.0 µm||±3.0 µm|
|Flatness(1)||±3.5 µm||±3.5 µm||±4.0 µm||±4.0 µm|
|Pitch||10 arc sec||10 arc sec||10 arc sec||10 arc sec|
|Roll||10 arc sec||10 arc sec||10 arc sec||10 arc sec|
|Yaw||5 arc sec||5 arc sec||5 arc sec||5 arc sec|
|Maximum Speed||200 mm/s||200 mm/s||200 mm/s||200 mm/s|
|Maximum Acceleration||1 g (No Load)||1 g (No Load)||1 g (No Load)||1 g (No Load)|
|In-Position Stability(2)||<2 nm||<2 nm||<2 nm||<2 nm|
|Maximum Force (Continuous)||7.75 N||7.75 N||9.5 N||9.5 N|
|Load Capacity(3)||Vertical||5.0 kg||5.0 kg||5.0 kg||5.0 kg|
|Moving Mass||0.46 kg||0.46 kg||0.52 kg||0.52 kg|
|Stage Mass||1.9 kg||1.9 kg||2.5 kg||2.5 kg|
|Material||Aluminum Body/Black Hardcoat Finish|
|MTBF (Mean Time Between Failure)||30,000 Hours|
- Certified with each stage.
- In-Position Jitter listing is 3 sigma value.
- Axis orientation for on-axis loading is listed.
- Air supply must be clean, dry to 0°F dewpoint and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity. Supply pressure is determined by the amount of payload carried by the stage.
• Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.
|Drive System||Brushless Linear Servomotor|
|Feedback||Noncontact Linear Encoder|
|Maximum Bus Voltage||±40 VDC|
|Limit Switches||5 V, Normally Closed|
|Home Switch||Near Center|
|Single Axis||Soloist||Soloist ML-MXH|
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time environmental temperature must be controlled to within 0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.
ANT95-L-Z Series Vertical Stage
|ANT95-L-Z/ANT95-L-Z-PLUS||Aerotech nanotranslation crossed-roller vertical positioner|
Linear Stage Travel
|ANT95-25-L-Z||25 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vpp sinusoidal output linear encoder and limits|
|ANT95-25-L-Z-PLUS||25 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vpp sinusoidal output linear encoder and limits (High Accuracy Version)|
|ANT95-50-L-Z||50 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vpp sinusoidal output linear encoder and limits|
|ANT95-50-L-Z-PLUS||50 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vpp sinusoidal output linear encoder and limits (High Accuracy Version)|
|-RH||Right-hand cable exit|
|-LH||Left-hand cable exit|