- Nanometer performance with 3 mm vertical travel
- High resolution (1 nm), repeatability (100 nm) and accuracy (200 nm)
- In-position stability of <1 nm
- Anti-creep crossed-roller bearings
- High dynamic performance
Aerotech's ANT series stages are the world's first nanometer-level positioning systems with multi-millimeter travel. The ANT95-V and ANT95-V-PLUS are linear-motor-driven wedge-style vertical lift stages. The stages are designed to be seamlessly integrated with other stages in the ANT95 family for superior multi-axis performance and are offered in two accuracy grades.
All of the original ANT series' direct-drive advantages have been preserved in the ANT95-V family. Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95-V stages utilise advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. This unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fibre alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT95-V family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be combined easily for flexible system designs and multi-axis configurations.
Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT95-V stage's industry-leading 1 nm minimum incremental step size provides this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech's direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.
|Accuracy(1)||±2 µm||±200 nm|
|Bidirectional Repeatability(1)||±150 nm||±100 nm|
|Unidirectional Repeatability||±75 nm|
|Pitch(1)||20 arc sec|
|Roll(1)||10 arc sec|
|Yaw(1)||10 arc sec|
|Maximum Speed||75 mm/s|
|Maximum Acceleration||0.4 g (No Load)|
|Settling Time||See graphs for typical performance|
|In-Position Stability(3)||<1 nm|
|Maximum Force (Continuous)||71 N|
|Load Capacity(4)||1.5 kg|
|Moving Mass||1.1 kg|
|Stage Mass||2.0 kg|
|Material||Aluminum and Stainless-Steel Body/Black Hardcoat Finish/Black Anodize Finish|
|MTBF (Mean Time Between Failure)||30,000 Hours|
- Certified with each stage.
- Measured perpendicular or parallel to wedge direction.
- In-Position Stability listing is 3 sigma value.
- Assumes loading along axis of travel.
- Specifications are per axis measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
- -PLUS requires the use of an Aerotech controller.
|Drive System||Brushless Linear Servomotor|
|Feedback||Noncontact Linear Encoder|
|Maximum Bus Voltage||±40 VDC|
|Limit Switches||5 V, Normally Closed|
|Home Switch||Near Center|
|Single Axis||Soloist||Soloist ML-MXH|
- Linear amplifiers are required to achieve the listed specifications. Other options are available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.
ANT95-V Series Lift Stage
|ANT95-V/ANT95-V-PLUS||Aerotech's nanotranslation crossed-roller bearing vertical lift positioner|
Linear Stage Travel
|ANT95-3-V||3 mm vertical travel lift stage with proprietary direct-drive motor technology, 1 Vpp sinusoidal output linear encoder and limits|
|ANT95-3-V-PLUS||3 mm vertical travel lift stage with proprietary direct-drive motor technology, 1 Vpp sinusoidal output linear encoder and limits (High Accuracy Version)|
|-MP||Breadboard mounting plate|