ANT130LZS Series Single-Axis Z Low-Profile Direct-Drive Nanopositioning Stages

Description

Design Features

  • Nanometer performance in a large travel format (35 mm to 160 mm)
  • Dual-counterbalance, low-profile design
  • High-dynamic, noncontact direct-drive
  • Anti-creep crossed-roller bearings
  • Flexible tabletop and mounting patterns
  • High-resolution (2 nm), repeatability (75 nm), and accuracy (275 nm)
  • In-position stability of <2 nm

Introduction

Aerotech’s ANT series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. Designed for vertical axis applications, the ANT130LZS series crossed-roller stages are the best-in-class in combining speed, resolution, accuracy, repeatability, reliability, and size, and are offered in two accuracy grades.

The ANT130LZS stages use a nearly frictionless dual-counterbalance mechanism to maintain performance levels while minimizing motor heating. The counterbalance is user adjustable from 0 to 14 kg. The dual-counterbalance design minimizes overall stage height and prevents off-axis moments that are applied by the counterbalance design that adversely affect straightness and angular errors. The result is positioning and geometric performance nearly equivalent to a non-counterbalanced ANT stage.

Noncontact Direct-Drive

Only noncontact direct-drive technology offers the robust, accurate, and high-speed positioning necessary for mass production of precision devices. ANT130LZS stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of performance for high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT130LZS family has universal mounting and tabletop patterns that allow for easy system integration. Two, three, or more axes can be easily combined for flexible system designs and multi-axis configurations.

System Characteristics

Outstanding accuracy, position repeatability, and in-position stability require small minimum incremental motion (mechanical resolution). The ANT130LZS stage’s industry-leading 2 nm minimum incremental step size enables this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Specifications

ANT130LZS Series Specifications

 ANT130LZS-035ANT130LZS-060
Travel 35 mm 60 mm
Accuracy(1) BASE ±2.5 µm ±2.5 µm
PLUS ±275 nm ±275 nm
Resolution (Minimum Incremental Motion) 2 nm
Repeatability (Bidirectional)(1) BASE ±100 nm ±100 nm
PLUS ±75 nm ±75 nm
Repeatability (Unidirectional) ±35 nm
Straightness(1) ±1.5 µm
Flatness(1) ±1.5 µm
Pitch 10 arc sec
Roll 10 arc sec
Yaw 5 arc sec
Maximum Speed(2) 200 mm/s
Maximum Acceleration(2) 1 g (No Load)
In-Position Stability(3) <2 nm
Maximum Force (Continuous) 23 N
Load Capacity(4) Vertical 14 kg
Moving Mass 1.3 kg 1.5 kg
Stage Mass 2.5 kg 2.9 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
  3. In-position jitter listing is 3 sigma value.
  4. Axis orientation for on-axis loading is listed.
  5. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity. Supply pressure is determined by the amount of payload carried by the stage.
  6. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.
  7. -PLUS requires the use of an Aerotech controller
 ANT130LZS-110ANT130LZS-160
Travel 110 mm 160 mm
Accuracy(1) BASE ±3 µm ±4 µm
PLUS ±325 nm ±325 nm
Resolution (Minimum Incremental Motion) 2 nm
Repeatability (Bidirectional)(1) BASE ±100 nm ±100 nm
PLUS ±75 nm ±75 nm
Repeatability (Unidirectional) ±35 nm
Straightness(1) ±1.5 µm ±2 µm
Flatness(1) ±1.5 µm ±2 µm
Pitch 10 arc sec
Roll 10 arc sec
Yaw 5 arc sec
Maximum Speed(2) 200 mm/s
Maximum Acceleration(2) 1 g (No Load)
In-Position Stability(3) <2 nm
Maximum Force (Continuous) 23 N
Load Capacity(4) Vertical 14 kg
Moving Mass 2.1 kg 2.5 kg
Stage Mass 3.9 kg 4.6 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage
  2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
  3. In-position jitter listing is 3 sigma value.
  4. Axis orientation for on-axis loading is listed.
  5. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity. Supply pressure is determined by the amount of payload carried by the stage.
  6. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.
  7. -PLUS requires the use of an Aerotech controller.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage 320 VDC (-4DU-25DU), 80 VDC (-25DU)
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  • Plots 1
    ANT130-L-ZS Plots

Dimensions

  • ANT130LZS
    ANT130-L-ZS-CAT

Ordering Information

ANT130LZS Single-Axis Z Low-Profile Direct-Drive Nanopositioning Stage

Travel (Required)

Option Description
-035 35 mm travel
-060 60 mm travel
-110 110 mm travel
-160 160 mm travel

Connectors (Required)

Option Description
-CN1 Single 25-pin D connector, 25DU
-CN2 Two connectors, 4-pin HPD and 25-pin D, 4DU-25DU
    Note: -CN1 option not valid for systems using bus voltages greater than 80 V.

Mounting Plate (Optional)

Option Description
-MP Mounting plate

Performance Grade (Required)

Option Description
-PL1 Base performance
-PL2 High-accuracy performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components. This is typically used for spare parts, replacement parts, or items that will not be used or shipped together (ex: stage only). These components may or may not be part of a larger system