ANT130-L-ZS Series Single-Axis Z Low-Profile Direct-Drive Nanopositioning Stages

Description

Design Features

  • Nanometer performance in a large travel format (35 mm to 160 mm)
  • Dual-counterbalance, low-profile design
  • High-dynamic, noncontact direct-drive
  • Anti-creep crossed-roller bearings
  • Flexible tabletop and mounting patterns
  • High-resolution (2 nm), repeatability (75 nm), and accuracy (275 nm)
  • In-position stability of <2 nm

Introduction

Aerotech’s ANT series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. Designed for vertical axis applications, the ANT130-L-ZS series crossed-roller stages are the best-in-class in combining speed, resolution, accuracy, repeatability, reliability, and size, and are offered in two accuracy grades.

The ANT130-L-ZS stages use a nearly frictionless dual-counterbalance mechanism to maintain performance levels while minimizing motor heating. The counterbalance is user adjustable from 0 to 14 kg. The dual-counterbalance design minimizes overall stage height (same as ANT130-L) and prevents off-axis moments that are applied by the counterbalance design that adversely affect straightness and angular errors. The result is positioning and geometric performance nearly equivalent to a non-counterbalanced ANT stage.

Noncontact Direct-Drive

All of the original ANT series’ direct-drive advantages have been preserved in the ANT130-L-ZS family. Only noncontact direct-drive technology offers the robust, accurate, and high-speed positioning necessary for mass production of precision devices. ANT130-L-ZS stages utilise advanced direct-drive technology pioneered by Aerotech to achieve the highest level of performance for high-precision positioning, disk-drive fabrication, fibre alignment, optical delay element actuation, sensor testing, and scanning processes that demand smooth and precise motion.

Flexible System Design

The ANT130-L-ZS family has universal mounting and tabletop patterns that allow for easy system integration. Two, three, or more axes can be easily combined for flexible system designs and multi-axis configurations.

System Characteristics

Outstanding accuracy, position repeatability, and in-position stability require small minimum incremental motion (mechanical resolution). The ANT130-L-ZS stage’s industry-leading 2 nm minimum incremental step size enables this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Specifications

ANT130-L-ZS Series Specifications

 ANT130-035-L-ZSANT130-035-L-ZS-PLUSANT130-060-L-ZSANT130-060-L-ZS-PLUS
Travel 35 mm 35 mm 60 mm 60 mm
Accuracy(1) ±2.5 µm ±275 nm ±2.5 µm ±275 nm
Resolution 2 nm
Repeatability (Bidirectional)(1) ±100 nm ±75 nm ±100 nm ±75 nm
Repeatability (Unidirectional) ±35 nm
Straightness(1) ±1.5 µm
Flatness(1) ±1.5 µm
Pitch 10 arc sec
Roll 10 arc sec
Yaw 5 arc sec
Maximum Speed(2) 200 mm/s
Maximum Acceleration(2) 1 g (No Load)
In-Position Stability(3) <2 nm
Maximum Force (Continuous) 23 N
Load Capacity(4) Vertical 14 kg
Moving Mass 1.3 kg 1.3 kg 1.5 kg 1.5 kg
Stage Mass 2.5 kg 2.5 kg 2.9 kg 2.9 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
  3. In-position jitter listing is 3 sigma value.
  4. Axis orientation for on-axis loading is listed.
  5. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity. Supply pressure is determined by the amount of payload carried by the stage.
  6. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.
  7. -PLUS requires the use of an Aerotech controller

 

     ANT130-110-L-ZSANT130-110-L-ZS-PLUSANT130-160-L-ZSANT130-160-L-ZS-PLUS
    Travel 110 mm 110 mm 160 mm 160 mm
    Accuracy(1) ±3 µm ±325 nm ±4 µm ±325 nm
    Resolution 2 nm
    Repeatability (Bidirectional)(1) ±100 nm ±75 nm ±100 nm ±75 nm
    Repeatability (Unidirectional) ±35 nm
    Straightness(1) ±1.5 µm ±2 µm
    Flatness(1) ±1.5 µm ±2 µm
    Pitch 10 arc sec
    Roll 10 arc sec
    Yaw 5 arc sec
    Maximum Speed(2) 200 mm/s
    Maximum Acceleration(2) 1 g (No Load)
    In-Position Stability(3) <2 nm
    Maximum Force (Continuous) 23 N
    Load Capacity(4) Vertical 14 kg
    Moving Mass 2.1 kg 2.1 kg 2.5 kg 2.5 kg
    Stage Mass 3.9 kg 3.9 kg 4.6 kg 4.6 kg
    Material Aluminum Body/Black Hardcoat Finish
    MTBF (Mean Time Between Failure) 30,000 Hours
    1. Certified with each stage
    2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
    3. In-position jitter listing is 3 sigma value.
    4. Axis orientation for on-axis loading is listed.
    5. Air supply must be clean, dry to 0°F dew point and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity. Supply pressure is determined by the amount of payload carried by the stage.
    6. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and work-point dependent. Consult factory for multi-axis or non-standard applications.
    7. -PLUS requires the use of an Aerotech controller.

    Electrical Specifications

    Drive System Brushless Linear Servomotor
    Feedback Noncontact Linear Encoder
    Maximum Bus Voltage 320 VDC (-4DU-25DU), 80 VDC (-25DU)
    Limit Switches 5 V, Normally Closed
    Home Switch Near Center

    Recommended Controller

    Multi-Axis A3200 Npaq MXR
    Npaq MR-MXH
    Ndrive ML-MXH
    Ensemble Epaq MXH
    Epaq MR-MXH
    Ensemble ML-MXH
    Single Axis Soloist Soloist ML-MXH
    • Plots 1
      ANT130-L-ZS Plots

    Dimensions

    • ANT130-L-ZS
      ANT130-L-ZS-CAT

    Ordering Information

    ANT130-L-ZS Series Linear Stage

    Option Description
    ANT130-L-ZS/ANT130-L-ZS-PLUS Aerotech nanotranslation, crossed-roller, Z-axis linear positioner

    Linear Stage Travel

    Option Description
    ANT130-035-L-ZS 35 mm travel stage with linear motor and limits
    ANT130-035-L-ZS-PLUS 35 mm travel stage with linear motor and limits (high accuracy version)
    ANT130-060-L-ZS 60 mm travel stage with linear motor and limits
    ANT130-060-L-ZS-PLUS 60 mm travel stage with linear motor and limits (high accuracy version)
    ANT130-110-L-ZS 110 mm travel stage with linear motor and limits
    ANT130-110-L-ZS-PLUS 110 mm travel stage with linear motor and limits (high accuracy version)
    ANT130-160-L-ZS 160 mm travel stage with linear motor and limits
    ANT130-160-L-ZS-PLUS 160 mm travel stage with linear motor and limits (high accuracy version)

    Output Cable Connectors

    Option Description
    -25DU Single 25-pin D connector (standard)
    -4DU-25DU 4-pin HPD and 25-pin D connectors

    Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V

    Options

    Option Description
    -MP Breadboard mounting plate