ANT130-L-Z Series Single-Axis Z Direct-Drive Nanopositioning Stages

Description

Design Features

  • Nanometer performance in a large travel format (35 and 60 mm)
  • High resolution (2 nm), repeatability (75 nm) and accuracy (300 nm)
  • In-position stability of <2 nm
  • Anti-creep crossed-roller bearings
  • High dynamic performance

Introduction

Aerotech’s ANT series stages are the world’s first nanometer-level positioning systems with greater than 25 mm travel. The ANT130-L-Z and ANT130-L-Z-PLUS crossed-roller stages are the best-in-class in combining speed, accuracy, resolution, repeatability, reliability and size, and are offered in two accuracy grades. As an evolution of the ANT stage family, these linear stages exhibit enhanced motion performance over Aerotech’s first generation ANT series.

Noncontact Direct-Drive

All of the original ANT series’ direct-drive advantages have been preserved in the ANT130-L-Z family. Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT130-L-Z stages utilise advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance for high-precision positioning, disk-drive fabrication, fibre alignment, optical delay element actuation, sensor testing and scanning processes that demand smooth and precise motion.

The ANT130-L-Z stages use a nearly frictionless counterbalance mechanism to maintain performance levels while minimizing motor heating. The counterbalance is user adjustable from 0 to 10 kg.

Flexible System Design

The ANT130-L-Z family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations.

System Characteristics

Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT130-L-Z stage’s industry-leading 2 nm minimum incremental step size provides this high level of performance. Excellent in-position stability is assisted by high-quality, anti-creep, crossed-roller bearings. The stage offers virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Specifications

Mechanical Specifications

ModelANT130-035-L-ZANT130-035-L-Z-PLUSANT130-060-L-ZANT130-060-L-Z-PLUS
Travel 35 mm 35 mm 60 mm 60 mm
Accuracy(1) ±3 µm ±300 nm ±3 µm ±300 nm
Resolution 2 nm 2 nm 2 nm 2 nm
Bidirectional Repeatability(1) ±100 nm ±75 nm ±100 nm ±75 nm
Unidirectional Repeatability ±50 nm ±50 nm ±50 nm ±50 nm
Straightness(1) ±2.0 µm ±2.0 µm ±2.0 µm ±2.0 µm
Flatness(1) ±2.0 µm ±2.0 µm ±2.0 µm ±2.0 µm
Pitch 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Roll 10 arc sec 10 arc sec 10 arc sec 10 arc sec
Yaw 5 arc sec 5 arc sec 5 arc sec 5 arc sec
Maximum Speed 200 mm/s 200 mm/s 200 mm/s 200 mm/s
Maximum Acceleration 1 g (No Load) 1 g (No Load) 1 g (No Load) 1 g (No Load)
In-Position Stability(2) <2 nm <2 nm <2 nm <2 nm
Maximum Force (Continuous) 23 N 23 N 23 N 23 N
Load Capacity(3) Vertical 10 kg 10 kg 10 kg 10 kg
Moving Mass 1.2 kg 1.2 kg 1.4 kg 1.4 kg
Stage Mass 4.3 kg 4.3 kg 5.2 kg 5.2 kg
Material Aluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Certified with each stage.
  2. In-Position Jitter listing is 3 sigma value.
  3. Axis orientation for on-axis loading is listed.
  4. Air supply must be clean, dry to 0°F dewpoint and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity. Supply pressure is determined by the amount of payload carried by the stage.

• Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder
Maximum Bus Voltage 320 VDC (-4DU-25DU), 80 VDC (-25DU)
Limit Switches 5 V, Normally Closed
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH
Ensemble Epaq MXH
Epaq MR-MXH
Ensemble ML-MXH
Single Axis Soloist Soloist ML-MXH
  1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

  • ANT130-L-Z-Plus Step Plot
  • ANT130-L-Z Performance Graphs

Dimensions

  • ANT130-L-Z

Ordering Information

ANT130-L-Z Series Vertical Stage

Option Description
ANT130-L-Z Aerotech’s nanotranslation crossed-roller vertical positioner

Linear Stage Travel

Option Description
ANT130-035-L-Z 35 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vpp sinusoidal output linear encoder and limits
ANT130-035-L-Z-PLUS 35 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vpp sinusoidal output linear encoder and limits (High Accuracy Version)
ANT130-060-L-Z 60 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vpp sinusoidal output linear encoder and limits
ANT130-060-L-Z-PLUS 60 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vpp sinusoidal output linear encoder and limits (High Accuracy Version)

Output Cable Connectors

Option Description
-25DU Single 25-pin D (standard)
-4DU-25DU Motor 4-pin HPD; feedback 25-pin D

Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V.