ABL1500Z Air-Bearing Direct-Drive Lift Stage

Description

Design Features

  • Designed for high-performance scanning and inspection
  • Active air preload on all air-bearing surfaces
  • Linear encoder feedback provides subnanometer resolution
  • High stiffness for heavy loads and excellent geometrical performance
  • Four models with travels from 50 to 200 mm
  • Integral counterbalance

The ABL1500Z is a vertical translation version of the ABL1500 series air-bearing stage. The ABL1500Z is ideally suited for applications with large offset loads and where extreme accuracy is required.

Leading-edge manufacturing, particularly in the semiconductor and data storage industries, demands positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL1500Z, with its fully active preload, exceptionally high stiffness and excellent geometric characteristics, was designed specifically to meet those demands.

Air-Bearing Design for High Dynamic Performance

The ABL1500Z incorporates an air-on-air preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.

Aerotech's proprietary manufacturing techniques result in a stage with unsurpassed geometric characteristics, which maximize performance by yielding superior pitch, roll, yaw, straightness and flatness specifications.

Zero-Cogging Linear Motor Drive

The driving force behind this stage is Aerotech's BLMC series brushless linear servomotor. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed smoothness of motion.

No Maintenance

Our totally noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL1500Z experiences no wear or reduction in performance over time. Service life is virtually unlimited and because there is no lubrication – only clean, dry gas – air bearings are ideal for cleanroom and medical applications.

Cable Management

We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech's modular design makes cable replacement quick and easy with minimal downtime.

We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate integration into the final system. Both ends are fully connectorized for simple integration into the customer's machine.

Specifications

Mechanical Specifications

ModelABL15005ZABL15010ZABL15015ZABL15020Z
Travel 50 mm 100 mm 150 mm 200 mm
Accuracy(1) LN HALAR ±0.2 µm ±0.2 µm ±0.3 µm ±0.5 µm
Standard ±1.5 µm ±2.5 µm ±4.0 µm ±6.0 µm
LT HALAR ±0.3 µm ±0.3 µm ±0.4 µm ±0.5 µm
Standard ±2.0 µm ±3.0 µm ±5.0 µm ±8.0 µm
Bidirectional Repeatability(1) LN ±0.1 µm ±0.15 µm ±0.2 µm
LT ±0.1 µm ±0.15 µm ±0.2 µm
Straightness(1) ±0.4 µm ±0.6 µm ±0.8 µm ±1.0 µm
Flatness(1) ±0.4 µm ±0.6 µm ±0.8 µm ±1.0 µm
Pitch ±1 arc sec ±1.5 arc sec ±2 arc sec ±2.5 arc sec
Roll ±1 arc sec ±1.5 arc sec ±2 arc sec ±2.5 arc sec
Yaw ±1 arc sec ±1.5 arc sec ±2 arc sec ±2.5 arc sec
Maximum Speed 300 mm/s
Maximum Acceleration 2 g (No Load)
Maximum Force (Continuous) 93.6 N
Load Capacity(2) 15 kg
Operating Pressure 80 psi ±5 psig
Air Consumption Stage: 24-30 SLPM @ 551 kPa; Counterbalance: 60 SLPM maximum
Moving Mass (No Load) 5.9 kg (13.0 lb)
Stage Mass 23.8 kg 26.6 kg 28.5 kg 30.5 kg
Material Aluminum
MTBF (Mean Time Between Failure) 20,000 Hours
  1. Certified with each stage.
  2. Axis orientation for on-axis loading is listed.
  3. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard applications.
  4. To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier ESTOP input is recommended.
  5. Air supply must be clean, dry to 0°F dewpoint and filtered to 0.25 µm or better; recommend nitrogen at 99.9% purity.
  6. Maximum upper axis length is 200 mm when mounting the ABL1500 in an XY configuration.

Electrical Specifications

Drive System Brushless Linear Servomotor
Feedback Noncontact Linear Encoder (see signal period options on Order Information page)
Maximum Bus Voltage up to 80 VDC
Limit Switches 5 V, Normally Open
Home Switch Near Center

Recommended Controller

Multi-Axis A3200 Ndrive MP/Ndrive CP/Ndrive HLe/Npaq MXR
Ensemble Ensemble MP/Ensemble CP/Ensemble HLe/Epaq
Single Axis Soloist Soloist MP/Soloist CP/Soloist HLe

Dimensions

  • ABL1500Z

Ordering Information

Ordering Example

ABL15 010Z -M -10 -NC -LN10AS -SINGLE-CMS

Ordering Options

Series Travel (mm) Mounting and Grid PatternMotorLimitsLinear EncoderOptions
ABL15 005Z
010Z
015Z
020Z
-M -10 -NC -LTnnAS
-LTnnX50
-LNnnAS
-SINGLE-CMS
-Z-CMS

ABL1500Z Series Linear Air-Bearing Stage

Option Description
ABL15005Z 50 mm travel linear air-bearing stage with linear motor, limits and pneumatic counterbalance
ABL15010Z 100 mm travel linear air-bearing stage with linear motor, limits and pneumatic counterbalance
ABL15015Z 150 mm travel linear air-bearing stage with linear motor, limits and pneumatic counterbalance
ABL15020Z 200 mm travel linear air-bearing stage with linear motor, limits and pneumatic counterbalance

Mounting and Grid Pattern

Option Description
-M Metric dimension mounting pattern and holes

Motor

Option Description
-10 Brushless linear motor (BLMC-192-A)

Limits

Option Description
-NC Normally-closed end of travel limit switches (standard)

Standard Linear Encoders

Option Description
-LT05AS Linear encoder for ABL15005Z; amplified sine output
-LT10AS Linear encoder for ABL15010Z; amplified sine output
-LT15AS Linear encoder for ABL15015Z; amplified sine output
-LT20AS Linear encoder for ABL15020Z; amplified sine output
-LT05X50 Linear encoder for ABL15005Z; 0.1 micron line driver output
-LT10X50 Linear encoder for ABL15010Z; 0.1 micron line driver output
-LT15X50 Linear encoder for ABL15015Z; 0.1 micron line driver output
-LT20X50 Linear encoder for ABL15020Z; 0.1 micron line driver output

High-Accuracy Linear Encoders

Option Description
-LN05AS High-accuracy linear encoder for ABL15005Z; amplified sine output
-LN10AS High-accuracy linear encoder for ABL15010Z; amplified sine output
-LN15AS High-accuracy linear encoder for ABL15015Z; amplified sine output
-LN20AS High-accuracy linear encoder for ABL15020Z; amplified sine output

Options

Option Description
-SINGLE-CMS Cable management system for single-axis applications
-Z-CMS Cable management system for Y-Z assembly

Accessories (to be ordered as separate line item)

Option Description
HALAR High-accuracy system – linear error correction for accuracy and repeatability
ALIGNMENT-PA5Z YZ assembly; 5 arc-seconds or 3 microns/full travel, whichever is larger
ALIGNMENT-PA10Z YZ assembly; 10 arc-seconds or 7 microns/full travel, whichever is larger