ABS2000 Direct-Drive Spindle

Description

Design Features

  • Low-loss brushless servomotor
  • Instrument-grade precision
  • Noncontact air-bearing
  • Balanced to ISO 1940 G 0.4
  • Sub-arc second resolution at high speed
  • Custom configurations available
  • Ideally suited for data storage, wafer processing, diamond turning, and imaging
Aerotech’s ABS series direct-drive air-bearing spindles were designed to provide superior angular positioning and velocity control for applications including data storage, wafer processing, diamond turning, and imaging.

Superior Mechanical Design
The ABS2000 utilizes a precision ground air-bearing to provide exceptional rotational accuracy with an extremely high stiffness. This design allows for a large load capacity and superior performance over a wide range of operation speeds. The ABS2000 is balanced to ISO 1940 G 0.4 tolerances.

Low Loss, Non-Influencing Direct-Drive Motor
Aerotech’s custom designed, low-loss motor produces >0.25 N-m (38 oz-in) of continuous torque with negligible motor losses, eliminating the need for cooling fins and/or external cooling. The non-influencing motor design minimizes parasitic forces in the motor, providing the exceptionally high level of error motion performance. These motors have all the advantages of a brushless direct drive motor — no brushes to wear, and high acceleration and high speeds.

Accurate Positioning
With a velocity ripple of <0.1%, an asynchronous error motion =20 nm, and total error motion <100 nm, the Aerotech spindle offers superior performance for high accuracy applications. The high performance motor and rotary encoder are directly coupled to a common shaft. When used with the AerotechA3200 controllerandNpaq®drive rackthe spindle resolution can be as high as 0.05 arc sec with no speed trade-offs. This makes the spindle ideal for applications requiring both spindle operation and stage operation.

Flexible Configurations
A variety of encoder resolutions, as well as an optional rotary union for a vacuum supply, are available. Other options include mechanical or vacuum chuck configurations, grounding ball, and optics mounting. Alternative higher torque motors are available. Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated motion package.

Specifications

ABS2000 Specifications

Basic ModelABS2000
Motor SF75-21-2X
Continuous Current, Stall Apk 2.25 A
Arms 1.6 A
Feedback Directly-Coupled Rotary Encoder
Resolution 256-2048 lines/rev; other line counts available
Rated Speed(1) 6000 rpm
Maximum Load Radial 66 N
Axial 178 N
Inertia (Unloaded) 0.0015 kg·m2
Synchronous Error Motion(2) Radial ‹100 nm
Axial ‹100 nm
Asynchronous Error Motion(2) Radial 20 nm
Axial 20 nm
Velocity Ripple <0.1% at 6000 rpm
Balance Grade(3) ISO 1940 G 0.4
Bearing Rigidity Radial 50 N/µm
Axial 140 N/µm
Mass 6.0 kg
Operating Pressure(4) 120 psi
Air Consumption(5) <2 SCFM
Material Shaft Steel
Housing Aluminum (Steel Available)
Finish Electroless Nickel Plating or Black Hardcoat Available
  1. Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
  2. Consult Aerotech regarding error motions for the ABS2000 with rotary union option.
  3. Per ISO 1940, "Mechanical vibration - balancing quality requirements of rigid rotors".
  4. An in-line pressure switch tied to the motion controller is recommended to protect the air bearing against under-pressure.
  5. Air supply must be clean, dry to 0°F dew point, and filtered to 0.25 µm or better. Recommend nitrogen at 99.9% purity.
  • ABS2000 Error Motion

Dimensions

  • ABS2000

Ordering Information

Ordering Example

ABS2000 -2048 -RU

ABS2000 High-Speed Air-Bearing Spindle Options

Position Transducer Options

Option Description
-256 256 lines/rev directly-coupled rotary encoder
-512 512 lines/rev directly-coupled rotary encoder
-1000 1000 lines/rev directly-coupled rotary encoder
-1024 1024 lines/rev directly-coupled rotary encoder
-2000 2000 lines/rev directly-coupled rotary encoder
-2048 2048 lines/rev directly-coupled rotary encoder

Other Options

Option Description
-RU Single port rotary union