- Travel ranges from 100 μm to 600 μm available
- Long device lifetime
- High-precision, frictionless flexure guidance system
- Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor options
- Mounting compatibility with other QNP-series piezo nanopositioners
- Open-loop and vacuum versions
Aerotech’s QNP™-series of piezo nanopositioning stages offers nanometer-level performance in a compact, high-stiffness package. A variety of travel (100 µm to 600 µm) and feedback options make this the ideal solution for applications ranging from microscopy to optics alignment
High Quality in a Compact Package
The QNP piezo stages are guided by precision flexures that are optimized using finite element analysis to ensure high-stiffness and long device life. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response. Furthermore, these stages have been designed to provide excellent geometric performance (straightness and angular errors) while at the same time minimizing the overall stage package size.
High-Resolution and Positioning Accuracy
All of the QNP piezo stages have the option of closed-loop feedback using a unique capacitive sensor design that allows for sub-nanometer resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly, enabling superior accuracy and repeatability.
When coupled with Aerotech’s Q-series controllers and drives, the QNP piezo nanopositioning stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter), and high-positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times.
Automatic parameter and calibration identification is accomplished using Aerotech’s FlashConfig feature. The stage is automatically identified and all operational parameters including axis calibration data are uploaded into the controller ensuring safe, accurate and true “plug-and-play” operation.
Learn more about our controls and software HERE.
Design Flexibility Aerotech’s
QNP piezo stages are available with capacitance sensor feedback or without feedback (open-loop). Open-loop provides a cost-effective option for applications where compact size, high-dynamics, and sub-nanometer positioning resolution are required, but absolute positioning accuracy and repeatability are not required. Open-loop designs can also be used where the piezo position is controlled via an external feedback source (interferometer, vision system, photodetector, etc.).
An optional mounting plate provides direct mounting to English or metric breadboard optical tables. The QNP-series also includes the -L and -XY stages in which common travels mount together with adapter plates.
All QNP piezo stages are available in vacuum-prepared versions upon request.
|Closed-Loop Travel||100 µm||250 µm||500 µm|
|Open-Loop Travel, -30 to +150 V(2)||140 µm||300 µm||600 µm|
|Resolution(3)||Closed-Loop||0.30 nm||0.50 nm||0.90 nm|
|Open-Loop||0.15 nm||0.20 nm||0.40 nm|
|Bidirectional Repeatabililty(6)||1 nm||1 nm||3 nm|
|Pitch/Roll/Yaw||15 µrad (3 arc sec)||25 µrad (5 arc sec)||39 µrad (8 arc sec)|
|Stiffness (in direction of motion)(7)||0.96 N/µm||0.40 N/µm||0.42 N/µm|
|Unloaded Resonant Frequency(7)||1050 Hz||510 Hz||310 Hz|
|Resonant Frequency (50 gram load)(7)||620 Hz||340 Hz||260 Hz|
|Push/Pull Capacity (in direction of motion)(8)||10/8 N||8/8 N||10/10 N|
|Max Payload(9)||1 kg||0.8 kg||1 kg|
|Stage Mass||0.08 kg||0.13 kg||0.31 kg|
|MTBF (Mean Time Between Failure)||30,000 Hours|
- All specifications, unless noted, are measured centered over the output carriage.
- Value ±10%.
- See Piezo Engineering reference section 4.2 for description of resolution.
- Certified with each stage (closed-loop feedback models only).
- See Piezo Engineering reference section 4.1 for description of linearity and accuracy specifications.
- Specified as a 1 sigma (standard deviation) value (closed-loop feedback models only). See Piezo Engineering reference section 4.3 for description of bidirectional repeatability.
- Values ±20%.
- See Piezo Engineering reference section 4.6 for description of piezo stage load ratings.
- On-axis loading listed.
- External elements are anodized aluminum. Some stainless steel components are used in the internal construction. Other materials upon request.
|Drive System||Piezo Multi-Layer Stack Actuator|
|Feedback||Closed Loop: Capacitive Sensor (-C)
Open Loop: None (-)
|Maximum Voltage||-30 V to +150 V|
|Piezo Stack Capacitance(1)||1.6 µF||2.3 µF||13.2 µF|
- Value ±20%
- Unless noted, the QLAB, QDe, or QLe drives are required to achieve the listed specifications. Contact Aerotech for specifications when used with the QL drives.
QNP-Z Series Single-Axis Piezo Nanopositioning Stage
|QNP-40-100Z||QNP-Z series open-loop nanopositioner, 40 mm wide, 140 µm open-loop travel|
|QNP-40-100Z-C||QNP-Z series closed-loop nanopositioner with capacitive sensor feedback, 40 mm wide, 100 µm closed-loop travel (140 µm open-loop travel)|
|QNP-50-250Z||QNP-Z series open-loop nanopositioner, 50 mm wide and 300 µm open-loop travel|
|QNP-50-250Z-C||QNP-Z series closed-loop nanopositioner with capacitive sensor feedback, 50 mm wide, 250 µm closed-loop travel (300 µm open-loop travel)|
|QNP-60-500Z||QNP-Z series open-loop nanopositioner, 60 mm wide, 600 µm open-loop travel|
|QNP-60-500Z-C||QNP-Z series closed-loop nanopositioner with capacitive sensor feedback, 60 mm wide, 500 µm closed-loop travel (600 µm open-loop travel)|
Mounting Plate (Optional)
|-MP||Mounting plate for English and metric optical breadboard tables|
Adapter Plate (Optional)
|-AP-QNP-250XY-100Z||Adapter plate for mounting QNP-40-100Z on top of QNP-50-250XY|
|-AP-QNP-500XY-100Z-250Z||Adapter plate for mounting QNP-40-100Z or QNP-50-250Z on top of QNP-60-500XY|