- Designed for high-performance photonics alignment and assembly
- Linear encoder feedback provides up to 2 nm resolution
- 62 picometer resolution available with the Automation 3200
- Fully-preloaded air bearing
- Complete noncontact design
- Ultra-smooth velocity control
The FiberGlide 3D series represents the highest performance miniature three axis air-bearing stages available. Aerotech has combined over 30 years of precision motion control and positioning system experience with the latest technologies to produce a truly outstanding miniature, linear air-bearing stage.
The linear positioner is a fully preloaded, noncontact design. Inherently frictionless, air bearings have proven to be the standard in precision applications, and Aerotech has now produced a miniature version that is well-suited for the photonics industry. Driven by a noncontact linear brushless servomotor, this stage proves the ultimate solution whether the application requires small, accurate steps or constant smooth velocity. Years of research have resulted in a robust and perturbation-free cable management system.
Feedback and Control System
Directly coupled, noncontact linear encoder position feedback is available with different options. A wide selection of state-of-the-art controllers is available, featuring the Automation 3200 software controller with digital drives.
Convenient rack or panel-mount amplifiers are included with all systems. Aerotech’s expert technical staff is experienced in custom system designs and will work with you to generate a system to meet the unique needs of your application.
Clean Room Compatibility
The air-bearing design is inherently clean room compatible. A high quality cable management system, together with low particulate generation materials, provides compliance to Class 1 with proper integration.
FiberGlide 3D Specifications
|Total Travel||25 mm||50 mm||100 mm||150 mm|
|Drive System||Linear Brushless Servomotor|
|Bus Voltage||up to 160 VDC|
|Continuous Current||Apk||up to 2.9 A|
|Arms||up to 2.1 A|
|BEMF, line-line, max.||V/m/sec||3.77952|
|N/A (lb/A), pk||3.29 (0.739)|
|N/A (lb/A), rms||4.65 (1.04)|
|Magnetic Pole Pitch||mm (inch)||16 (0.63)|
|Feedback||Noncontact Linear Encoder|
|Maximum Travel Speed(1)||300 mm/s|
|Maximum Linear Acceleration||1 g -10 m/s2 (No Load)|
|Maximum Load||5.0 kg|
|LT||±50 nm(2); ±100 nm|
|Straightness and Flatness(3)||±0.25 µm||±0.25 µm||±0.4 µm||±0.4 µm|
|Pitch and Yaw||±0.25 arc
|Nominal Stage Weight||4.5 kg||5.5 kg||6.4 kg||12.7 kg|
|Moving Mass||1.9 kg||4.8 kg|
|Operating Pressure(4)||80 psi ±5 psi|
|Air Consumption(5)(6)||53.1 SLPM @ 80 psi|
- Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system resolution.
- Values with Aerotech controls and HAL option.
- Dependent on flatness of stage mounting surface.
- To protect air bearing against under-pressure, an in-line pressure switch is required and tied to the contoller E-stop input.
- Air supply must be clean, dry to 0° F dew point, and filtered to 0.25 µm or better; recommend nitrogen at 99.99% purity.
- Maximum expected air consumption for a three-axis system.
FiberGlide 1000 Series Photonics Alignment and Assembly System
|FG1000-3D||Linear air bearing positioner|
Linear Stage Travel (Z, X, Y)
|-25*||25 mm (1 in) travel stage with linear motor|
|-50||50 mm (2 in) travel stage with linear motor|
|-100||100 mm (4 in) travel stage with linear motor|
|-150**||150 mm (6 in) travel stage with linear motor|
**-150 can only be used as the upper XY axis with a -150 lower axis
***Z axis can only be -25
|-LT||Linear encoder feedback (10 nm resolution), amplified sine output|
|-LN||High-accuracy linear encoder feedback (2 nm resolution), amplified sine output|
|-LT/lower||LT option with lower axis cable management|
|-LN/lower||LN option with lower axis cable management|
|-LT/upper||LT option with upper axis cable management|
|-LN/upper||LN option with upper axis cable management|
|-LT/vertical||LT option with vertical axis cable management|
|-LN/vertical||LN option with vertical axis cable management|