Description

Design Features

• 3- to 6-axis photonics alignment
• High resolution (2 nm), repeatability (100 nm), and accuracy (300 nm)
• Anti-creep crossed-roller bearings
• Noncontact direct-drive linear motors
• Direct-drive rotary and goniometer options
• Raster, spiral, or power peaking algorithms
• Interface to industry-standard power meters

Automated Production

As alignment accuracies, the quest for higher yields, and device volumes increase, the need for a precise, reliable, and repeatable motion system becomes increasingly important. Due to the rapidly changing nature of components and manufacturing processes, flexibility in system configuration becomes a must. Aerotech’s FAe series responds to and satisfies all of these requirements. With the selection of robust system components and decades of precision motion experience, high-volume production in a 24/7 manufacturing environment has become a reality.

Advanced Drive Technology

Only noncontact direct-drive technology offers the robust, accurate, high-speed, and high-resolution positioning necessary for mass production of precision devices. Aerotech's state-of-the-art drive technology offers industry-leading resolution combined with travels up to 160 mm and positioning speeds up to 200 mm/s. Utilizing ultra-quiet linear drives and advanced control technology, Aerotech’s FAe series offers the best position repeatability, accuracy, and in-position stability to meet the motion system requirement of higher yields.

Fast Vision Alignment and Power Scanning Algorithms

A comprehensive software toolkit provides easy access to commonly used functions. Alignment functions such as hill climbing from a power meter input, and raster, square, or circular spiral scans are easily implemented via standard functions. In addition to the automated tools, both joystick and on-screen jog control are available for manual operations.

FA95e or FA130e - Which is Right for You?

To satisfy the ongoing positioning and processing needs of the photonics manufacturing industry, Aerotech offers both the FA95e and FA130e. Both basic three-axis models can be extended with additional axes to satisfy the requirement to control motion in six axes: X, Y, Z, T (yaw), P (pitch), R (roll).

FA95e represents the more compact version (one-third of the volume of FA130e) and is ideal where space is limited. Additional axes can be attached to provide high-resolution, high-accuracy rotary motion.

Yaw rotary motion is provided by Aerotech’s ANT95-R direct-drive, high-resolution rotary actuators, while pitch and roll motion are provided by Aerotech’s advanced ANT-20G series direct-drive, high-resolution goniometers. The rotary devices offer a 20 degree angular range with industry-leading step resolution of 0.01 arc-seconds.

The FA130e is similar in construction to the FA95e but offers a larger travel and larger load carrying capability in a slightly larger envelope. Travel for the X and Y axes are selectable up to 160 millimeters.

The FA130e also accepts the ANT95-R rotary actuator and the ANT-20G goniometers, providing up to six axes of motion control.