Nmark AGV-HP(O) High Accuracy, Thermally Stable Galvo Scanner

Description

Design Features

  • Highest accuracy scanner available attains single-digit, micron-level accuracy over the field of view
  • Optical feedback technology significantly improves thermal stability
  • Industry-best resolution of >24 bits when used with Aerotech's Nmark GCL controller
  • Wide range of apertures and focal lengths
  • Many choices of mirror surface treatments for a variety of laser wavelengths

The Ultimate in Accuracy and Stability

The highly repeatable and thermally stable feedback sensors used on the AGV-HP scanner systems can be calibrated down to single-digit, micron-level accuracy over the field of view (see figure below). With the extremely low thermal gain drift performance of the position transducers, complex, high-density laser machining applications that take long periods of time to complete will maintain consistent micron-level feature placement accuracy over the lifetime of the process. Likewise, high throughput applications will maintain consistent part-to-part quality without having to re-calibrate between parts. For the highest level of thermal stability, the AGV-HP scanners can be equipped with water cooling to stabilize the operating temperature of the device under varying loads, changes in ambient temperature or beam clipping on the input aperture.

Real-Time Process Visibility

The location of the AGV-HP(O) mirrors can be captured and analyzed in real time. With direct access to the positions of the scanner the user no longer has to program delay parameters to compensate for lag and tracking errors in the servo system. The process can be optimized prior to marking the part, saving time and reducing material waste. The state of the laser can also be controlled based on in-position and velocity criteria, further reducing programming complexity.

Advanced Programming Features

The AGV-HP(O) utilizes all of Aerotech’s advanced motion and PSO (Position Synchronized Output) capabilities that have been developed for traditional servo-based laser processing applications. Contouring functions such as Acceleration Limiting can be used to automatically reduce speeds in tight corners or small radii to minimize overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed. Aerotech’s Infinite Field of View (IFOV) function seamlessly combines servo and scanner motion to extend the marking capability of the scanner across the entire travel of the servo stages, eliminating stitching errors that can occur in a more traditional move-expose-repeat process.

Design Choices

The AGV-HP(O) family is available with 10, 14, 20, and 30 mm input apertures and can be equipped with an F-Theta or telecentric lens directly from Aerotech. Users can also acquire the focusing optic directly from a trusted supplier with Aerotech supplying a spacer ring to ensure that back reflections through the optic do not damage the scanner mirrors. Mirror coatings for a wide range of UV, visible, IR and CO2 wavelengths are supported. Coatings optimized for ultra-fast lasers are also available.

Additional Resources

For more information on How to Configure IFOV, please go HERE.

For more information on Advanced Laser Controls, please go HERE.

To get our brochure Effortlessly Combine Motion of Galvo Scanners & Servo Systems with Aerotech’s Infinite Field of View, please go HERE.

Galvo Calibration File Converter (GCFC) – Use the GCFC to create new, optimize existing, or convert third-party calibration files for operation with the Nmark CLS and Nmark SSaM.

In addition, the white paper Using the Galvo Calibration File Converter with the Nmark CLS outlines the procedures required to create new calibration tables and how to merge calibration tables for the Nmark CLS.

You may be interested in Aerotech's recent webcast, Accuracy of Combined Scanning and Servo Systems.

Summary: Linear and rotary actuators are often used to expand the effective working area of scanner/galvo marking heads. This presentation will discuss alignment, scaling, rotation, and stitching-induced errors and their combined impact on final part quality. Advanced error correction, path planning, and laser triggering techniques that help to minimize these errors will also be presented.

To access the archived presentation, please click HERE.

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Specifications

Mechanical Specifications

ModelAGV10HP(O)AGV14HP(O)AGV20HP(O)AGV30HP(O)
Optical Performance
Beam Aperture 10 mm 14 mm 20 mm 30 mm
Maximum Scan Angle ±20°
Beam Displacement 13.0 mm 18.0 mm 25.1 mm 35.7 mm
Feedback Resolution 0.007 µrad (26 bit)
Dither (Min. Incremental Motion)(2) 0.2 µradRMS
Accuracy 50 µrad pk-pk
Repeatability(3) 0.4 µradRMS
Gain Error 0.05 mrad
Non-Linearity 0.005%
Dynamic Performance
Tracking Error 0 µsec
Peak Acceleration(4,5) 288,000 m/s2 224,000 m/s2 80,000 m/s2 56,000 m/s2
Continuous Acceleration(4, 6) 75,200 m/s2 56,000 m/s2 20,800 m/s2 19,200 m/s2
Positioning Speed(4) 75 m/s 75 m/s 50 m/s 50 m/s
Marking Speed(4, 7, 8) 5 m/s 5 m/s 5 m/s 5 m/s
Jump & Settle Time, 1 mm Move(4, 9) 270 µsec 270 µsec 450 µsec 700 µsec
Stability
Long-Term Drift(3) Offset 10 µrad/12 hrs
15 µrad/24 hrs
Gain 10 ppm/24 hrs
Thermal Drift Offset 10 µrad/°C
Gain 1 ppm/°C
Mechanical Specifications
Weight 4.0 kg 4.3 kg 5.0 kg 5.8 kg
Material Aluminum (Black Anodize and Blue Paint)
MTBF (Mean Time Between Failure) 20,000

Notes:
1. All angles are optical unless otherwise specified.
2. Without -AC air cooling option.
3. After initial 3 hour warm-up, ambient temperature variation < ±0.5 deg.
4. Typical performance with f = 160mm F-Theta objective.
5. Based on maximum rated current of the motor.
6. Based on rated rms current of the motor with -WC water cooling option; maximum continuous acceleration is 70% of this value without water cooling.
7. Achievable with <1% velocity error over continuous velocity portion of move.
8. Marking speed is dependent on allowable tracking error.
9. Settled to within 1% of move distance.
10. All specifications are per axis unless otherwise noted.

Electrical Specifications

ModelAGV10HP(O)AGV14HP(O)AGV20HP(O)AGV30HP(O)
Drive System Brushless Direct-Drive Galvano Motor
Feedback Noncontact Rotary Encoder
Maximum Bus Voltage ±40 VDC
Limit Switches Software Limits Only
Home Switch At Center

Dimensions

Ordering Information

Nmark AGV-HP(O) Galvanometer Scanner

Option Description
AGV10HP(O) 2-axis galvanometer scanner with 10 mm diameter beam aperture and integral high-precision feedback
AGV14HP(O) 2-axis galvanometer scanner with 14 mm diameter beam aperture and integral high-precision feedback
AGV20HP(O) 2-axis galvanometer scanner with 20 mm diameter beam aperture and integral high-precision feedback
AGV30HP(O) 2-axis galvanometer scanner with 30 mm diameter beam aperture and integral high-precision feedback

Housing Type (Required)

Option Description
- Closed scanner housing (AGVxxHP)
O Open scanner housing (AGVxxHPO)

Beam Entry (Required)

Option Description
-BE1 Right-side laser beam entry (standard)
-BE2 Left-side laser beam entry

Wavelength of Mirror Coating (Required)

Option AGV10HP(O) AGV14HP(O) AGV20HP(O) AGV30HP(O)
-W1 - - 10.6 µm Wavelength Coating
-W26 Durable-Silver Coated Mirrors, 450 nm - 10.6 µm - - -
-W3 1552 nm Wavelength Coating -
-W4 1064 nm Wavelength Coating
-W5 1030 nm Wavelength Coating -
-W6 532 nm Wavelength Coating -
-W7 515 nm Wavelength Coating -
-W8 355 nm Wavelength Coating -
-W9 - 343 nm Wavelength Coating -
-W10 1064, 532, and 355 nm Tri-Band Wavelength Coating -
-W11 1030, 515, and 343 nm Tri-Band Wavelength Coating - -

Note:

  1. Custom coatings available. Contact factory for details.
  2. -W2 (Durable-Silver) option only available with AGV10HP(O)-BE1.
  3. -W4 (1064 nm) option not available with AGV30HP(O)-BE2.
  4. -W9 (343 nm) and -W11 (1030/515/343 nm) options not availabe with -BE2.
  5. AGV20HP(O)-BE2 only available with -W1 (CO2), -W4 (1064 nm), and -W6 (532 nm) options.
  6. Limited operating power.

F-Theta Lenses Available (Optional)(1, 2)

Option Description
-Lxx See table below for standard options

Mounting Plate (Optional)

Option Description
-MP Mounting plate

Note: -MP option is only available with closed scanner housing (AGVxxHP) models.

Air Cooling (Optional)

Option Description
-AC Air cooling

Note: Air cooling only available on closed housing models.

Water Cooling (Optional)

Option Description
-WC Water cooling

Note: Water cooling only available on closed housing models.

Performance Grade (Required)

Option Description
-PL0 Standard performance grade
-PL9 Ultra performance grade

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option Description
-TAS Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.
-TAC Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.

Lens Mounting Adapters (to be ordered as separate line item)

Option Description
LM10HP-XXX Lens mount adapter for AGV10HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM14HP-XXX Lens mount adapter for AGV14HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM20HP-XXX Lens mount adapter for AGV20HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request
LM30HP-XXX Lens mount adapter for AGV30HP(O); standard versions support the lens configurations offered by Aerotech; custom versions available on request

F-Theta Lenses Available (Optional)(1, 2)

Wavelength Focal Length AGV10HP(O) AGV14HP(O) AGV20HP(O) AGV30HP(O)
10.6 µm 100 mm
Telecentric
- - 10.6 µm Wavelength
100 mm Focal Length
38.6 x 38.6 mm FOV
Telecentric
(-L1)
-
160 mm - - 10.6 µm Wavelength
160 mm Focal Length
76.0 x 76.0 mm FOV
Non-Telecentric
(-L2)
-
255 mm - - 10.6 µm Wavelength
255 mm Focal Length
163.8 x 163.8 mm FOV
Non-Telecentric
(-L3)
10.6 µm Wavelength
255 mm Focal Length
104.4 x 104.4 mm FOV
Non-Telecentric
(-L1)

1552 nm
100 mm
Telecentric
1552 nm Wavelength
100 mm Focal Length
55.2 x 55.2 mm FOV
Telecentric
(-L1)
1552 nm Wavelength
100 mm Focal Length
49.4 x 49.4 mm FOV
Telecentric
(-L3)
- -
163 mm Telecentric 1552 nm Wavelength
163 mm Focal Length
93.8 x 93.8 mm FOV
Telecentric
(-L2)
1552 nm Wavelength
163 mm Focal Length
93.8 x 93.8 mm FOV
Telecentric
(-L4)
- -
1064 nm 100 mm 1064 nm Wavelength
100 mm Focal Length
66.9 x 66.9 mm FOV
Non-Telecentric
(-L3) [3]
1064 nm Wavelength
100 mm Focal Length
37.0 x 37.0 mm FOV
Non-Telecentric
(-L5) [3]
- -
100 mm Telecentric 1064 nm Wavelength
100 mm Focal Length
69.8 x 69.8 mm FOV
Telecentric
(-L4) [3]
1064 nm Wavelength
100 mm Focal Length
61.6 x 61.6 mm FOV
Telecentric
(-L6) [3]
1064 nm Wavelength
100 mm Focal Length
44.0 x 44.0 mm FOV
Telecentric
(-L4)
-
160 mm 1064 nm Wavelength
160 mm Focal Length
107.6 x 107.6 mm FOV
Non-Telecentric
(-L5) [3]
1064 nm Wavelength
160 mm Focal Length
107.6 x 107.6 mm FOV
Non-Telecentric
(-L7) [3]
- -
163 mm - - 1064 nm Wavelength
163 mm Focal Length
72.4 x 72.4 mm FOV
Non-Telecentric
(-L5) [3]
-
163 mm Telecentric 1064 nm Wavelength
163 mm Focal Length
92.0 x 92.0 mm FOV
Telecentric
(-L6)
1064 nm Wavelength
163 mm Focal Length
85.2 x 85.2 mm FOV
Telecentric
(-L8)
1064 nm Wavelength
163 mm Focal Length
71.6 x 71.6 mm FOV
Telecentric
(-L6)
-
170 mm - 1064 nm Wavelength
170 mm Focal Length
110.8 x 110.8 mm FOV
Non-Telecentric
(-L9) [3]
- -
200 mm - - - 1064 nm Wavelength
200 mm Focal Length
68.0 x 68.0 mm FOV
Non-Telecentric
(-L2) [3]
255 mm - - 1064 nm Wavelength
255 mm Focal Length
154.2 x 154.2 mm FOV
Non-Telecentric
(-L7) [3]
1064 nm Wavelength
255 mm Focal Length
154.2 x 154.2 mm FOV
Non-Telecentric
(-L3) [3]
500 mm - - - 1064 nm Wavelength
500 mm Focal Length
233.2 x 233.2 mm FOV
Non-Telecentric
(-L4)
1030 nm 100 mm Telecentric 1030 nm Wavelength
100 mm Focal Length
41.6 x 41.6 mm FOV
Telecentric
(-L7)
1030 nm Wavelength
100 mm Focal Length
34.8 x 34.8 mm FOV
Telecentric
(-L10)
- -
163 mm Telecentric 1030 nm Wavelength
163 mm Focal Length
92.0 x 92.0 mm FOV
Telecentric
(-L8)
1030 nm Wavelength
163 mm Focal Length
92.0 x 92.0 mm FOV
Telecentric
(-L11)
- -
532 nm 100 mm 532 nm Wavelength
100 mm Focal Length
57.2 x 57.2 mm FOV
Non-Telecentric
(-L9) [3]
- - -
100 mm Telecentric 532 nm Wavelength
100 mm Focal Length
64.6 x 64.6 mm FOV
Telecentric
(-L10) [3]
532 nm Wavelength
100 mm Focal Length
64.6 x 64.6 mm FOV
Telecentric
(-L12) [3]
- -
160 mm 532 nm Wavelength
160 mm Focal Length
107.0 x 107.0 mm FOV
Non-Telecentric
(-L11) [3]
532 nm Wavelength
160 mm Focal Length
107.0 x 107.0 mm FOV
Non-Telecentric
(-L13) [3]
- -
163 mm Telecentric 532 nm Wavelength
163 mm Focal Length
79.6 x 79.6 mm FOV
Telecentric
(-L12)
532 nm Wavelength
163 mm Focal Length
79.6 x 79.6 mm FOV
Telecentric
(-L14)
- -
170 mm - 532 nm Wavelength
170 mm Focal Length
103.8 x 103.8 mm FOV
Non-Telecentric
(-L15) [3]
- -
255 mm - - 532 nm Wavelength
255 mm Focal Length
148.0 x 148.0 mm FOV
Non-Telecentric
(-L8) [3]
-
515 nm 100 mm Telecentric 515 nm Wavelength
100 mm Focal Length
41.4 x 41.4 mm FOV
Telecentric
(-L13)
515 nm Wavelength
100 mm Focal Length
41.4 x 41.4 mm FOV
Telecentric
(-L16)
- -
163 mm Telecentric 515 nm Wavelength
163 mm Focal Length
41.4 x 41.4 mm FOV
Telecentric
(-L14)
515 nm Wavelength
163 mm Focal Length
41.4 x 41.4 mm FOV
Telecentric
(-L17)
- -
355 nm 53 mm Telecentric 355 nm Wavelength
53 mm Focal Length
17.2 x 17.2 mm FOV
Telecentric
(-L15)
355 nm Wavelength
53 mm Focal Length
8.2 x 8.2 mm FOV
Telecentric
(-L18)
- -
100 mm Telecentric 355 nm Wavelength
100 mm Focal Length
51.6 x 51.6 mm FOV
Telecentric
(-L16)
- - -
160 mm 355 nm Wavelength
160 mm Focal Length
92.4 x 92.4 mm FOV
Non-Telecentric
(-L17)
- - -
163 mm Telecentric 355 nm Wavelength
163 mm Focal Length
80.8 x 80.8 mm FOV
Telecentric
(-L18)
355 nm Wavelength
163 mm Focal Length
80.8 x 80.8 mm FOV
Telecentric
(-L19)
- -
255 mm 355 nm Wavelength
255 mm Focal Length
143.0 x 143.0 mm FOV
Non-Telecentric
(-L19)
355 nm Wavelength
255 mm Focal Length
119.4 x 119.4 mm FOV
Non-Telecentric
(-L20)
- -
343 nm 53 mm Telecentric - 343 nm Wavelength
53 mm Focal Length
8.0 x 8.0 mm FOV
Telecentric
(-L21)
- -
163 mm Telecentric - 343 nm Wavelength
163 mm Focal Length
74.0 x 74.0 mm FOV
Telecentric
(-L22)
- -
255 mm - 343 nm Wavelength
255 mm Focal Length
118.4 x 118.4 mm FOV
Non-Telecentric
(-L23)
- -

Notes:

  1. Input beam diameter is assumed to be equal to scan head entrance aperture at 1/e2 Gaussian profile
  2. Reported field size is minimum achievable based on zero beam vignetting.
  3. F-Theta lens is not recommended for use with short pulse lasers (ps and fs pulse durations). Please consult factory for lens options that are compatible with short pulse lasers.
  4. Custom coatings available. Contact factory for details.