Description

Design Features

• Motion subsystem designed to incorporate customer electrical equipment on top of a continuous rotation rotary axis
• Integrated low-noise slip ring to pass electrical signals through the rotation stage
• Stainless-steel mechanics for improved stability and repeatability over an extended time period
• High-precision air-bearing vertical stage to reduce geometric errors throughout stage travel
• Direct-drive rotary stage and linear-motor vertical stage for high-resolution positioning
• Integrated pneumatic counterbalance to support vertically oriented linear motor and customer payload
• Low-noise linear amplifiers to enable isolated measurements of the customer’s equipment
• Applications include metrology and inspection