Sample Positioning


Rotation Stages with Minimal Sphere of Confusion

Aerotech’s air-bearing rotary stages have minimal axial, radial, and tilt (wobble) error to minimize the sphere of confusion. This allows the sample under test to remain within the beam.

CombinedImages_SamplePositioningRESIZE

The ABRT-400 is one example of a high-accuracy, air-bearing rotary axis. It is equipped with a non-influencing rotary union and slip-ring to pass vacuum or air and electrical service to the device under test, while maintaining outstanding Sphere of Confusion performance.

 

Aerotech offers a range of solutions for a variety of price and performance points. Contact an Aerotech Application Engineer to find the right solution for your application.

GoodBetterBest
  ABRT-260 ABRT-400 µARC
Accuracy 4 arc sec 2 arc sec 0.12 arc sec
Repeatability <1 arc sec <1 arc sec 0.08 arc sec
Axial Error Motion (Synchronous) <100 nm <100 nm <50 nm
Radial Error Motion (Synchronous) <150 nm <250 nm <75 nm
Tilt Error Motion (Synchronous) <0.5 arc sec <0.5 arc sec <0.1 arc sec
Axial Error Motion (Asynchronous) <20 nm <20 nm <10 nm
Radial Error Motion (Asynchronous) <20 nm <20 nm <10 nm
Tilt Error Motion (Asynchronous) 0.04 arc sec 0.04 arc sec 0.01 arc sec
Load Capacity Axial 69 kg 110 kg 200 kg
Load Capacity Radial 10 kg 90 kg 50 kg
Slip-Ring Additional Equipment and 360° Rotation Optional Optional Optional


Piezo Actuators for Fine Sample Adjustment

Aerotech’s Q-series piezo actuators offer best-in-class performance with higher stiffness and linearity than competitive products.

PiezoLinearStages_Image

  • Travel ranges from 100 µm to 600 µm available
  • Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor options
  • Configurable open-loop and closed-loop control in one controller platform
  • High-precision 20-bit sensor resolution for capacitive sensor feedback in closed-loop operation
  • Advanced control features such as learning control, harmonic cancellation and command shaping improve tracking error, and overall process throughput


Mechanical Specifications

QNP-40-100LQNP-50-250LQNP-60-500L
Closed-Loop Travel 100 µm 250 µm 500 µm
Open-Loop Travel, -30 to +150 V(1) 120 µm 300 µm 600 µm
Resolution(2) Closed-Loop (Integrated Feedback) 0.30 nm 0.50 nm 0.90 nm
Open-Loop 0.15 nm 0.20 nm 0.40 nm
Linearity(3)(4) 0.01% 0.01% 0.007%
Bidirectional Repeatability(5) 1 nm 1 nm 3 nm
Pitch/Yaw 6 µrad (1.2 arc sec) 6 µran (1.2 arc sec) 12 µrad (2.5 arc sec)
Stiffness (In Direction of Motion)(6) 1.25 N/µm 0.40 N/µm 0.27 N/µm
Unloaded Resonant Frequency(6) 1300 Hz 475 Hz 350 Hz
Resonant Frequency (50 Gram Load)(6) 650 Hz 325 Hz 260 Hz
Push/Pull Capacity (In Direction of Motion)(7) 10 N
Max Payload(8) 1 kg
Stage Mass 0.06 kg 0.09 kg 0.14 kg
Material Anodized Aluminum(9)
MTBF (Mean Time Between Failure) 30,000 Hours
  1. Value ±10%
  2. See Piezo Engineering Reference section 4.2 for description of resolution.
  3. Certified with each stage (closed-loop feedback models only).
  4. Measured approximately 15 mm above the carriage by an external metrology device. See Piezo Engineering Reference section 4.1 for description of linearity specifications.
  5. Specified as a 1 sigma (standard deviation) value. See Piezo Engineering Reference section 4.3 for description of bidirectional repeatability.
  6. Values ±20%.
  7. See Piezo Engineering Reference section 4.6 for description of piezo stage load ratings.
  8. On-axis loading listed.
  9. External elements are anodized aluminum. Some internal components are stainless steel. Other materials upon request.


X, Y, and Z Linear Stages for Course Adjustment

Rugged, high load-capacity stages for coarse positioning in X, Y, and Z dimensions.

High-Load Vertical Stage
High-Load-Vertical-Stage
  • Vertical stage
  • 1000 lb (455 kg) load capacity
  • No back-driving
  • Adjustable electrical limits
Five Axis, XYZ, Pitch and Roll
Five-Axis,-XYZ,-Pitch-and-Roll
  • Integrated cable management
  • Direct-drive, high accuracy
  • Pneumatic vertical counterbalance
High Load, Ball Screw, XY Linear Stages
High-Load,-Ball-Scre,-XY-Linear-Stages
  • Payloads up to 1500 lb (682 kg)
  • Optional linear encoders for high accuracy and repeatability
  • Cleanroom or Vac 10-6 Torr compatible
ATS0500 Heavy-Duty XYZ
ATS0500-Extra-Room-Test
  • Good for large payloads
  • 250 lb (114 kg) load capacity
  • Up to 1 meter of travel in all directions
  • Bellows provide dirt shield
  • Cleanroom or Vac 10-6 Torr compatible
Large Capacity, Heavy Duty, XYZ System
Large-Capacity,-Heavy-Duty,-XYZ-System
  • 500 lb (227 kg) load
  • 200 nm stepping capability
  • Large capacity
  • 4 nm resolution direct encoders
  • Cleanroom compatible
High Load X/Theta
High-Load-X-Theta
  • 350 mm travel
  • Continuous rotation
  • 1500 lb (682 kg) load
  • ±10 µrad rotary accuracy
  • Cleanroom or Vac 10-6 Torr compatible


Motorized Angular Adjustment

From limited-travel to 360° of continuous rotation, Aerotech rotary and angular positioners offer a large range of motion for a variety of applications.

ALAG Large Capacity Goniometer



ALAG
  • 1500 lb (682 kg) load capacity
  • Rotation point is 330 mm or 1200 mm above tilt stage
  • ±2 µrad repeatability
  • ±5 µrad accuracy
  • Vac 10-6 Torr
  • AZ direct drive
  • 0.025 µrad machine resolution
  • Goniometer includes direct tabletop feedback
  • ±3° to ±5° travel
ANT-20G Series Direct-Drive Goniometer


Goniometer_group_04_10
  • Noncontact direct drive
  • High speed and high resolution
  • No maintenance
  • 20° of travel
  • ±30 µrad accuracy
  • 3.3 to 11 lb (1.5 to 5 kg) load capacity
  • Stackable for pitch/roll
AGC Series Gear-Drive Goniometer
AGC_nested
  • ±60 µrad accuracy
  • ±45° rotary positioning with unobstructed 360° view of load
  • Precision worm-gear-drive for outstanding accuracy and repeatability
  • Direct encoder options available
  • Horizontal or vertical mounting orientation
  • 44 to 110 lb (20 to 50 kg) load