Inspection of Grazing Incidence Mirrors

Air-bearing stages for ultimate pitch, roll, and yaw angular errors

The performance of grazing incidence X-ray mirrors depends heavily on the slope of the mirror surface. It is critical to measure that slope error to the highest degree possible. Aerotech’s air-bearing stages offer the ultimate angular stability for optical measurement equipment used to characterize those mirrors.


  • Stroke length up to 1200 mm
  • Pitch, roll, and yaw errors <7 arc sec (34 µrad)
  • Multiple available configurations including: - Dual carriages for optics and measurement equipment
    - Orthogonal linear axes
    - Rotary, lift, and tip/tilt for 6° of freedom operation

ROLL Error Plot