Key Industry Expertise

  • Thin-Film Inspection
  • Wafer Inspection
  • Atomic Force Microscopy
  • Defect Detection
  • Scanning Particles
  • X-Ray Inspection
  • Electrical and Magnetic Analysis
  • Mask Inspection

Aerotech has a long history of engineering and manufacturing motion systems and components for semiconductor applications including wafer inspection (defect inspection, metrology, defect review, critical dimension) and wafer processing (wafer bumping, lithography). We also specialize in systems and components for vacuum applications such as EUV lithography and Scanning Electron Microscopy (SEM). Our ability to provide both standard and custom­-engineered motion solutions to end users, integrators, and high­-volume OEMs is unmatched. Aerotech products deliver quality, performance, flexibility, and the highest possible return on investment.

Wafer Inspection

Aerotech is the preferred supplier of high-performance motion control equipment for wafer inspection applications. From high-­end planar air-bearing motion platforms to integrated linear-­motor­-driven stage systems, Aerotech can help you choose the best motion solution for your wafer inspection, metrology, or defect review application.

Featured Products and Solutions:planardl_planardla



Aerotech has several ultra high-performance planar air-bearing systems for lithography applications including the PlanarHD and our newest and most advanced stage system, the PlanarHDX. These top-of-the-line stages coupled with Aerotech’s advanced control algorithms and powerful control electronics provide the ultimate in high-dynamic, high-accuracy positioning.

Featured Products and Solutions:planarhdx-andhd

Defect Detection

Aerotech’s ultra-smooth linear air-bearing motion systems and high-performance rotary stages are an excellent choice for macro-defect, particle contamination, and general defect measurements. High-speed linear and matched rotary stages coupled with a state-of-the-art motion controller provide accurate, high-throughput measurements. Whether it is simple radial motions or tightly controlled helical inspection profiles, Aerotech has the optimum stage combination.

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Scanning Probe Microscopy (SPM)

Many inspection applications require high-end performance, but few are as stringent as Scanning Probe Microscopy (SPM). To address these needs, Aerotech has multiple system solutions that provide high-dynamics, nanometer step sizes, and single-digit nanometer positional stability. Aerotech's product line spans high-dynamic, direct-drive piezo stages to ultra-high accuracy planar air bearings. Coupled with a controller that runs all of these axes on a single, cohesive, easy-to-use platform, Aerotech has the full solution for your SPM needs.

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Vacuum Systems

Aerotech’s vacuum-specific application experience, unmatched product scope, and extensive engineering capabilities make us the partner of choice for vacuum-compatible motion systems. Visit our vacuum page for more information.



For additional information about our products, please reference the following videos in our video library.