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Home >> Linear Stages Selection Guide >> Mechanical Bearings Ball-Screw-Driven Stages


Precision Mechanical Bearings Ball-Screw-Driven Stages


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MPS50SL Linear Ball-Screw Stage

MPS75SL Linear Ball-Screw Stage

ATS50 Linear Stage

The MPS50SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment, and component assembly in space-constrained applications.

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The MPS75SL is a compact, high-performance linear positioning stage that is perfect for the confines of the laboratory while providing the high reliability required in a production environment. It is the ideal choice for measurement, testing, accurate alignment, and component assembly.

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The ATS50 linear stage offers superior positioning performance in a very compact, low profile unit. They are companion stages to the ART50 and ART100 series rotary stages and are ideal for space-critical applications such as optical trains and vacuum operation.

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Travel
25 or 50 mm
Accuracy

±1.5 µm

Load
5.0 kg
Travel
25, 50, 75 or 100 mm
Accuracy

±1.0 µm

Load
15.0 kg
Travel
25 or 50 mm
Accuracy

±2.5µm/25mm

Load
5.0 kg

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ATS100 Linear Stage ATS150 Linear Stage PRO115 Linear Stage

The ATS100 linear stage provides the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems, and precision micromachining applications.

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The ATS150 linear stage provides the high resolution and repeatability required for semiconductor wafer testing and fabrication, automated microscope inspection systems, and precision micromachining applications.

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The PRO115 linear stage is Aerotech’s smallest hard cover, side-sealed stage design. Competitive pricing coupled with Aerotech’s reputation for producing high-quality linear motion devices make the PRO115 an attractive stage for medium-performance applications.

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Travel
up to 200 mm
Accuracy
±0.5 µm
Load
25.0 kg
Travel
up to 250 mm
Accuracy

±1.0 µm

Load
45 kg
Travel
up to 600 mm
Accuracy
±6 µm
Load
40.0 kg

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PRO165 Linear Stage PRO225 Linear Stage PRO280 Linear Stage

The PRO165 linear stage is a medium performance, entry-level design. The PRO165 series is similar in design to the PRO115 series, providing additional load carrying capability with larger bearings and a wider cross-section.

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The PRO225 is a medium performance, entry-level linear stage from Aerotech. It is similar in design to the PRO165 series, providing additional load carrying capability with larger bearings and a wider cross-section.

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When a PRO-style stage is desired, but more load capability is necessary, the PRO280 series is ideal. Similar in design to the PRO225 series, PRO280 series stages provide additional load carrying capability with larger bearings, a wider cross-section, and a larger servomotor.

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Travel
up to 600 mm
Accuracy

±6 µm

Load
45 kg
Travel
up to 1000 mm
Accuracy

±11 µm

Load
100 kg
Travel
300 mm - 1000 mm
Accuracy
±17.5 µm
Load
150.0 kg

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PRO560 Linear Stage PRO115-HS (High-Speed) Linear Stage PRO165-HS (High-Speed) Linear Stage

The PRO560 series is similar in design to the PRO280 series but with a wider cross-section for better support of long travel upper axes or large footprint payloads. There is a choice of six models in travels from 300 mm to 1000 mm with speeds to 220 mm/s and load capacities to 150 kg.

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The PRO115-HS is Aerotech’s smallest hard cover, side-sealed stage design and comes with a 20 mm/rev ball screw for high-speed applications requiring up to 1200 mm/s. Competitive pricing coupled with Aerotech’s reputation for producing high-quality linear motion devices make the PRO115-HS an attractive stage for medium-performance, high-speed applications.

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The PRO165-HS is a medium performance, entry-level linear stage and features a 20 mm/rev ball screw for high-speed applications requiring up to 1200 mm/s. It is similar in design to the PRO115-HS series, providing additional load carrying capability with larger bearings and a wider cross-section.

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Travel
300 mm - 1000 mm
Accuracy
±17.5 µm
Load
150.0 kg
Travel
up to 500 mm
Accuracy
±8 µm
Load
40.0 kg
Travel
up to 500 mm
Accuracy

±8 µm

Load
45 kg

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PRO225-HS (High-Speed) Linear Stage PRO280-HS (High-Speed) Linear Stage PRO560-HS (High-Speed) Linear Stage

The PRO225 is a medium performance, entry-level linear stage from Aerotech. It is similar in design to the PRO165 series, providing additional load carrying capability with larger bearings and a wider cross-section. It features a 25 mm/rev ball screw for speeds up to 1400 mm/s.

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When a PRO-style stage is desired, but more load and speed capability is necessary, the PRO280-HS is ideal. The PRO280-HS comes with a 25 mm/rev ball screw for high-speed applications requiring up to 1400 mm/s, and the stage features a maximum load of 150 kg. It is similar in design to the PRO225 series, providing additional load carrying capability with larger bearings and a wider cross-section.

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The PRO560-HS series is similar in design to the PRO280-HS series stages but with a wider cross section for better support of long travel upper axes or large footprint payloads. It also has a 25 mm/rev ground ball-screw for higher speed compared to the standard PRO560 series.

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Travel
up to 1500 mm
Accuracy

±11 µm

Load
100 kg
Travel
300 mm - 1500 mm
Accuracy
±17.5 µm
Load
150.0 kg
Travel
300 mm - 1500 mm
Accuracy
±17.5 µm
Load
150.0 kg

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ATS0300 Linear Stage ATS1000 Linear Stage ATS1500 Linear Stage

The ATS0300 linear stage provides an economical solution for applications requiring fine positioning in a confined area.

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The ATS1000 linear stage is a compact, high- performance stage that is as accurate as it is versatile. It provides a small cross section, medium payload capacity, environmentally protected, cost-effective solution for precision applications.

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The ATS1500 linear stage provides a flexible, economical platform that is an outstanding selection for use as a general purpose positioner.

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Travel
50 mm
Accuracy
±2.5µm/25mm
Load
25.0 kg
Travel
up to 600 mm
Accuracy

±1.0 µm

Load
50 kg
Travel
up to 300 mm
Accuracy

1.0 µm/25 mm

Load
135 kg

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ATS2000 Linear Stage ATS3600 Open-Frame Linear Stage ATS5000 Linear Stage

The ATS2000 linear stage is a compact, high- performance stage with hard-coated table top and waycovers.

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The demand for a high accuracy, robust, open-frame stage is met with the ATS3600. This dual-axis, large aperture, open-frame stage addresses the unique needs of scanning microscopy, wafer and printed circuit board inspection, and automated assembly.

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The ATS5000 linear stage was designed to meet the needs of the most demanding applications. A rigid base, fully sealed metal waycovers, and high- performance brushless servomotor make the ATS5000 the stage of choice in industrial applications such as laser machining, ceramic scribing, or any other application requiring high accuracy in a production environment.

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Travel
up to 300 mm
Accuracy
±1.0 µm
Load
80.0 kg
Travel
up to 400 mm
Accuracy

±1.0 µm

Load
90 kg
Travel
up to 1000 mm
Accuracy

±1.0 µm

Load
135 kg
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ATS5000WB Linear Stage    

By increasing the overall width of the stage, the ATS5000WB linear stage can handle heavy cantilever loads and still maintain high accuracy.

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Travel
up to 1000 mm
Accuracy
±1.0 µm
Load
135 kg
   

  

 

 
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