Home >>Dual-Axis Linear Nanopositioners

Aerotech’s dual-axis linear nanopositioners include the ANT95-XY and ANT130-XY. Both of these crossed-roller bearing, direct-drive, dual-axis linear stages offer 1 nm resolution, <1 nm in-position stability, and two-dimensional accuracy of ±250 nm. The ANT95-XY offers travels of 25 x 25 or 50 x 50 mm and loads of 4.0 or 6.0 kg, while the ANT130-XY offers travels of 60, 110, and 160 mm and loads to 12 kg. They are designed to be equally at home in the laboratory or 24/7 manufacturing environment.

Outstanding accuracy, position repeatability, and in-position stability require high system resolution. The ANT95-XY and ANT130-XY 1 nm minimum incremental step size provides this high level of performance. Excellent in-position stability, assisted by high-quality, anti-creep crossed-roller bearings, enables virtually maintenance-free operation over the life of the product. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.

Aerotech nanopositioners are offered as stand-alone units, or as part of a complete positioning package that includes Aerotech’s own controls and drives.

The ANT95-XY crossed-roller-bearing, linear motor, dual-axis stage continues the evolution of the ANT series of stages. The ANT95-XY and ANT95-XY-H are three-piece designs that allow travel in two dimensions (X and Y). The sleek design provides an extremely low profile of only 60 mm. The stage comes with proprietary direct-drive motor technology, noncontact linear encoders, limits, integrated cable management system, and two grades of accuracy.

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The ANT130-XY crossed-roller-bearing, linear motor, dual-axis stage continues the evolution of the ANT series of stages. The ANT130-XY and ANT130-XY-H are three-piece designs that allow travel in two dimensions (X and Y). The sleek design provides an extremely low profile of only 85 mm in travel options including 60 x 60 mm, 110 x 110 mm, and 160 x 160 mm.

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1 nm Best-In-Class Resolution

1 nm step plot for ANT95-XY

1 nm Best-In-Class Resolution


5 nm step plot for ANT130-XY

Aerotech’s ANT95-XY-ULTRA is a long travel (up to 50 mm x 50 mm) nanopositioner for XY applications. Each axis uses crossed-roller bearings, as well as Aerotech’s unique direct-drive for non-cogging, zero backlash motion. In addition, each stage receives a two-dimensional correction to achieve unmatched nanometer resolution, accuracy, and repeatability.

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Aerotech’s ANT130-XY-ULTRA is a long travel (up to 160 mm x 160 mm) nanopositioner for XY applications. Each axis uses crossed-roller bearings, as well as Aerotech’s unique direct-drive for non-cogging, zero backlash motion. In addition, each stage receives a two-dimensional correction to achieve unmatched nanometer resolution, accuracy, and repeatability.

Click here for complete product information.

1 nm Best-In-Class Resolution

1 nm step plot for ANT95-XY-ULTRA

1 nm Best-In-Class Resolution


5 nm step plot for ANT130-XY-ULTRA