Introduction
Aerotech’s ANT series stages are the world’s first nanometer-level
positioning systems with greater than 25 mm travel. The
ANT95-L-Z and ANT95-L-Z-PLUS crossed-roller stages are the
best-in-class in combining speed, accuracy, resolution,
repeatability, reliability, and size, and are offered in two
accuracy grades. As an evolution of the ANT stage family,
these linear stages exhibit enhanced motion performance over
Aerotech’s first generation ANT series.
Noncontact Direct-Drive
All of the original ANT series’ direct-drive advantages have
been preserved in the ANT95-L-Z family. Only noncontact
direct-drive technology offers the robust, accurate, and high-speed
positioning necessary for mass production of precision
devices. ANT95-L-Z stages utilize advanced direct-drive
technology pioneered by Aerotech to achieve the highest
level of positioning performance for high-precision positioning,
disk-drive fabrication, fiber alignment, optical delay element
actuation, sensor testing, and scanning processes that demand
smooth and precise motion.
The ANT95-L-Z stages use a nearly frictionless counterbalance
mechanism to maintain performance levels while minimizing
motor heating. The counterbalance is user-adjustable from 0
to 5 kg.
Flexible System Design
The ANT95-L-Z family has universal mounting and
tabletop patterns that allow for easy system integration.
Two, three, or more axes can be easily combined for
flexible system designs and multi-axis configurations.
System Characteristics
Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT95-L-Z stage’s
industry-leading 2 nm minimum incremental step size provides
this high level of performance. Excellent in-position stability is
assisted by high-quality, anti-creep, crossed-roller bearings.
The stage offers virtually maintenance-free operation over the
life of the product. Aerotech’s direct-drive technology has no
hysteresis or backlash, enabling accurate and repeatable
nanometer-scale motion.
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