Introduction
Aerotech’s ANT95 series stages are the world’s first
nanometer-level positioning systems with greater than 25 mm
travel. The ANT95-L and ANT95-L-PLUS crossed-roller stages
are the best-in-class in combining speed, accuracy, resolution,
repeatability, reliability, and size, and are offered in two
accuracy grades. As an evolution of the ANT stage family,
these linear stages exhibit enhanced motion performance over
Aerotech’s first generation ANT series. Product improvements
such as 5 g acceleration, 500 mm/s velocity, enhanced load
capacity, and standardized, universal base mounting patterns
allow the use of this flexible stage family in an even wider
range of configurations than its predecessors.
Noncontact Direct-Drive
All of the original ANT series’ direct-drive advantages have
been preserved in the ANT95-L family. Only noncontact
direct-drive technology offers the robust, accurate, and highspeed
positioning necessary for mass production of precision
devices. ANT95-L stages utilize advanced direct-drive
technology pioneered by Aerotech to achieve the highest
level of positioning performance. This direct-drive technology
is high-performance, non-cogging, noncontact, high-speed,
high-resolution, and high-accuracy. This unique drive and
bearing combination, packaged in an extremely small-profile
and footprint, offers tangible advantages in many applications
such as high-precision positioning, disk-drive fabrication, fiber
alignment, optical delay element actuation, sensor testing, and
scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT95-L family has universal mounting and tabletop
patterns that allow for easy system integration. Two, three, or
more axes can be easily combined for flexible system designs
and multi-axis configurations.
System Characteristics
Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT95-L stage’s
industry-leading 1 nm minimum incremental step size provides
this high level of performance. Aerotech’s direct-drive
technology has no hysteresis or backlash, enabling accurate
and repeatable nanometer-scale motion.
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