Introduction
Aerotech’s ANT series stages are the world’s first nanometer-level
positioning systems with multi-millimeter travel. The
ANT95-V and ANT95-V-PLUS are linear-motor-driven wedge-style
vertical lift stages. The stages are designed to be
seamlessly integrated with other stages in the ANT95 family
for superior multi-axis performance, and are offered in two
accuracy grades.
Noncontact Direct-Drive
All of the original ANT series’ direct-drive advantages have
been preserved in the ANT95-V family. Only noncontact
direct-drive technology offers the robust, accurate, and high-speed
positioning necessary for mass production of precision
devices. ANT95-V stages utilize advanced direct-drive
technology pioneered by Aerotech to achieve the highest
level of positioning performance. This direct-drive technology
is high-performance, non-cogging, noncontact, high-speed,
high-resolution, and high-accuracy. This unique drive and
bearing combination, packaged in an extremely small-profile
and footprint, offers tangible advantages in many applications
such as high-precision positioning, disk-drive fabrication, fiber
alignment, optical delay element actuation, sensor testing, and
scanning processes that demand smooth and precise motion.
Flexible System Design
The ANT95-V family has universal mounting and tabletop
patterns that allow for easy system integration. Two, three, or
more axes can be combined easily for flexible system designs
and multi-axis configurations.
System Characteristics
Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT95-V stage’s
industry-leading 1 nm minimum incremental step size provides
this high level of performance. Excellent in-position stability is
assisted by high-quality, anti-creep, crossed-roller bearings.
The stage offers virtually maintenance-free operation over the
life of the product. Aerotech’s direct-drive technology has no
hysteresis or backlash, enabling accurate and repeatable
nanometer-scale motion.
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