Introduction
Aerotech’s ANT130-XY-ULTRA is a long travel (up to 160 mm
x 160 mm) nanopositioner for XY applications. Each axis uses
crossed-roller bearings, as well as Aerotech’s unique direct-drive
for non-cogging, zero backlash motion. In addition,
each stage receives a two-dimensional correction to achieve
unmatched nanometer resolution, accuracy, and repeatability.
This unique drive and bearing combination, packaged in an
extremely low profile and small footprint, offers tangible
advantages in your motion application.
The ANT130-XY-ULTRA extends the performance capability of
Aerotech’s ANT130-XY stage series to levels found nowhere
else. The exceptional geometric and dynamic performance of
the ANT130-XY-ULTRA make it an ideal choice for nearly all
high-end motion applications in the lab or in production
environments.
ULTRA Trajectory Management System
In order to achieve the highest possible system accuracy from
our multi-axis nanopositioning systems, Aerotech has
developed an advanced, interactive, dynamic trajectory
management system. To take advantage of this sophisticated
interactive calibration system, the mechanical system has to be
completely assembled and functionally tested prior to
calibration in our best-in-class metrology labs. Nano-level
system accuracy can only be achieved under stringent
environmental conditions, calibrating with the best test
equipment, and utilizing the formidable capability of
ULTIMUS. By implementing the ULTIMUS dynamic trajectory
management system with the ANT130-XY-ULTRA, we are able
to produce 2-dimensional accuracies of ±250 nm or better.
The plots below illustrate performance differences between a
standard ANT130-XY and the -ULTRA version. Straightness
errors, orthogonality errors, and accuracy errors caused by
stage yawing are virtually eliminated.
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